JP5405574B2 - テンプレート、およびリソグラフィ用高アスペクト比テンプレートを製造する方法、ならびにナノスケールで基板を穿孔するためのテンプレートの使用 - Google Patents

テンプレート、およびリソグラフィ用高アスペクト比テンプレートを製造する方法、ならびにナノスケールで基板を穿孔するためのテンプレートの使用 Download PDF

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JP5405574B2
JP5405574B2 JP2011521455A JP2011521455A JP5405574B2 JP 5405574 B2 JP5405574 B2 JP 5405574B2 JP 2011521455 A JP2011521455 A JP 2011521455A JP 2011521455 A JP2011521455 A JP 2011521455A JP 5405574 B2 JP5405574 B2 JP 5405574B2
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template
nanostructures
substrate
nanostructure
templates
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JP2011530803A (ja
JP2011530803A5 (enExample
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アミン サレーム ムハンマド，
ダヴィド ブルド，
ヨナス ベリ，
モハマド， シャフィクル カビール，
ヴィンセント デスマリス，
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スモルテック アーベー
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/002—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor using materials containing microcapsules; Preparing or processing such materials, e.g. by pressure; Devices or apparatus specially designed therefor
    • G03F7/0022—Devices or apparatus
    • G03F7/0027—Devices or apparatus characterised by pressure means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/902—Specified use of nanostructure
    • Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Manufacture Or Reproduction Of Printing Formes (AREA)
  • Catalysts (AREA)
JP2011521455A 2008-08-05 2009-07-23 テンプレート、およびリソグラフィ用高アスペクト比テンプレートを製造する方法、ならびにナノスケールで基板を穿孔するためのテンプレートの使用 Expired - Fee Related JP5405574B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SE0801770 2008-08-05
SE0801770-9 2008-08-05
PCT/EP2009/005340 WO2010015333A2 (en) 2008-08-05 2009-07-23 Template and method of making high aspect ratio template for lithography and use of the template for perforating a substrate at nanoscale

Publications (3)

Publication Number Publication Date
JP2011530803A JP2011530803A (ja) 2011-12-22
JP2011530803A5 JP2011530803A5 (enExample) 2012-11-15
JP5405574B2 true JP5405574B2 (ja) 2014-02-05

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US (1) US9028242B2 (enExample)
EP (1) EP2307928A2 (enExample)
JP (1) JP5405574B2 (enExample)
KR (1) KR20110055586A (enExample)
CN (1) CN102119363B (enExample)
MY (1) MY153444A (enExample)
WO (1) WO2010015333A2 (enExample)

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Publication number Publication date
KR20110055586A (ko) 2011-05-25
CN102119363B (zh) 2015-10-21
WO2010015333A2 (en) 2010-02-11
US20110195141A1 (en) 2011-08-11
EP2307928A2 (en) 2011-04-13
JP2011530803A (ja) 2011-12-22
CN102119363A (zh) 2011-07-06
US9028242B2 (en) 2015-05-12
WO2010015333A3 (en) 2010-05-27
MY153444A (en) 2015-02-13

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