JP5375624B2 - 加速度センサー、及び加速度検出装置 - Google Patents

加速度センサー、及び加速度検出装置 Download PDF

Info

Publication number
JP5375624B2
JP5375624B2 JP2010007860A JP2010007860A JP5375624B2 JP 5375624 B2 JP5375624 B2 JP 5375624B2 JP 2010007860 A JP2010007860 A JP 2010007860A JP 2010007860 A JP2010007860 A JP 2010007860A JP 5375624 B2 JP5375624 B2 JP 5375624B2
Authority
JP
Japan
Prior art keywords
acceleration sensor
substrate piece
support surface
acceleration
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2010007860A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011145243A5 (enExample
JP2011145243A (ja
Inventor
潤 渡辺
和之 中仙道
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010007860A priority Critical patent/JP5375624B2/ja
Priority to US12/985,554 priority patent/US20110174075A1/en
Priority to CN201110007098XA priority patent/CN102169128A/zh
Priority to KR20110004559A priority patent/KR20110084843A/ko
Publication of JP2011145243A publication Critical patent/JP2011145243A/ja
Publication of JP2011145243A5 publication Critical patent/JP2011145243A5/ja
Application granted granted Critical
Publication of JP5375624B2 publication Critical patent/JP5375624B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
JP2010007860A 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置 Expired - Fee Related JP5375624B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010007860A JP5375624B2 (ja) 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置
US12/985,554 US20110174075A1 (en) 2010-01-18 2011-01-06 Acceleration sensor and acceleration detecting apparatus
CN201110007098XA CN102169128A (zh) 2010-01-18 2011-01-13 加速度传感器和加速度检测装置
KR20110004559A KR20110084843A (ko) 2010-01-18 2011-01-17 가속도센서 및 가속도 검출장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010007860A JP5375624B2 (ja) 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置

Publications (3)

Publication Number Publication Date
JP2011145243A JP2011145243A (ja) 2011-07-28
JP2011145243A5 JP2011145243A5 (enExample) 2013-02-28
JP5375624B2 true JP5375624B2 (ja) 2013-12-25

Family

ID=44276537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010007860A Expired - Fee Related JP5375624B2 (ja) 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置

Country Status (4)

Country Link
US (1) US20110174075A1 (enExample)
JP (1) JP5375624B2 (enExample)
KR (1) KR20110084843A (enExample)
CN (1) CN102169128A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9759739B2 (en) * 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
JP5678741B2 (ja) * 2011-03-11 2015-03-04 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置
JP5967194B2 (ja) * 2012-04-27 2016-08-10 株式会社村田製作所 加速度センサ
WO2017007428A1 (en) * 2015-07-07 2017-01-12 Agency For Science, Technology And Research Motion measurement devices and methods for measuring motion
JP6627501B2 (ja) * 2015-12-28 2020-01-08 セイコーエプソン株式会社 計測装置、減衰特性算出方法、プログラム、および計測システム
JP6604200B2 (ja) * 2015-12-28 2019-11-13 セイコーエプソン株式会社 加速度センサー、計測システム、および計測装置
IT201600129935A1 (it) 2016-12-22 2018-06-22 Pietro Fiorentini Spa Struttura di trasduttore, trasduttore comprendente tale struttura di trasduttore, e sensore comprendente detto trasduttore
CN109765404B (zh) * 2018-12-28 2020-03-17 西安交通大学 基于QoS工艺的加速度计芯片及加工工艺和加速度计
CN110095634B (zh) * 2019-05-24 2024-03-29 上海工程技术大学 一种杠杆式双向声表面波加速度传感器
CN114280329A (zh) * 2021-12-27 2022-04-05 西安交通大学 一种双端固支音叉石英加速度传感器

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4479385A (en) * 1982-09-23 1984-10-30 The United States Of America As Represented By The Department Of Energy Double resonator cantilever accelerometer
US4628735A (en) * 1984-12-14 1986-12-16 Sundstrand Data Control, Inc. Vibrating beam accelerometer
US4856350A (en) * 1987-10-22 1989-08-15 Hanson Richard A Force sensing device and method
US4970903A (en) * 1987-10-22 1990-11-20 Hanson Richard A Force sensing device
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4881408A (en) * 1989-02-16 1989-11-21 Sundstrand Data Control, Inc. Low profile accelerometer
US5036715A (en) * 1989-06-30 1991-08-06 Richard Hanson Cantilevered force sensing assembly utilizing one or two resonating force sensing devices
ES2073903T3 (es) * 1991-10-31 1995-08-16 K Tron Tech Inc Disposicion dinamometrica.
US5289719A (en) * 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd, Inc. Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
JP2000206141A (ja) * 1999-01-20 2000-07-28 Miyota Kk 運動量センサ
DE60213981T2 (de) * 2001-05-15 2007-08-30 Honeywell International Inc. Element zur spannungsentlastung für einen beschleunigungssensor
FR2848298B1 (fr) * 2002-12-10 2005-03-11 Thales Sa Accelerometre a poutre vibrante
US6938334B2 (en) * 2003-10-31 2005-09-06 Honeywell International, Inc. Vibrating beam accelerometer two-wafer fabrication process
JP2008209389A (ja) * 2006-10-13 2008-09-11 Seiko Epson Corp 加速度センサ
US7802475B2 (en) * 2006-10-13 2010-09-28 Seiko Epson Corporation Acceleration sensor
JP2008170203A (ja) * 2007-01-10 2008-07-24 Epson Toyocom Corp 加速度検知ユニット、及び加速度センサ
JP2009156831A (ja) * 2007-12-28 2009-07-16 Epson Toyocom Corp 加速度検知ユニット及び加速度検知装置
US8117917B2 (en) * 2008-03-27 2012-02-21 Honeywell International Inc. Vibrating beam accelerometer with improved performance in vibration environments
FR2937145B1 (fr) * 2008-10-10 2010-09-24 Thales Sa Accelerometre micro-usine
JP2011117944A (ja) * 2009-10-29 2011-06-16 Seiko Epson Corp 加速度センサー
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置

Also Published As

Publication number Publication date
US20110174075A1 (en) 2011-07-21
CN102169128A (zh) 2011-08-31
KR20110084843A (ko) 2011-07-26
JP2011145243A (ja) 2011-07-28

Similar Documents

Publication Publication Date Title
JP5375624B2 (ja) 加速度センサー、及び加速度検出装置
US8939027B2 (en) Acceleration sensor
US8297124B2 (en) Pressure sensor
JP5305028B2 (ja) 圧力センサー
US8225662B2 (en) Acceleration sensing device
JP5018227B2 (ja) 力検知ユニット
CN102455232A (zh) 压力传感器
US20110221312A1 (en) Vibrator element, vibrator, sensor, and electronic apparatus
CN102243077A (zh) 振动型力检测传感器以及振动型力检测装置
JP2008286521A (ja) 回転速度検知ユニット、及び回転速度センサ
JP2004132913A (ja) 感圧素子、及びこれを用いた圧力センサ
JP2002122614A (ja) 加速度センサ
JP2002107373A (ja) 加速度センサ
JP2010181210A (ja) 加速度センサ
JP2011169671A (ja) 慣性センサー及び慣性センサー装置
JP2010243276A (ja) 相対圧力センサー、相対圧力測定装置及び相対圧力測定方法
JP2011153836A (ja) 加速度センサー、及び加速度計
JP2008197030A (ja) 応力感応素子
JP2011141152A (ja) 加速度センサー、及び加速度計
JP2010048643A (ja) 加速度検知ユニット、及び加速度センサ
JP2008309731A (ja) 加速度検知ユニット及び加速度センサ
JP5321812B2 (ja) 物理量センサーおよび物理量測定装置
JP4784436B2 (ja) 加速度センサ
JP2008076075A (ja) 絶対圧センサ
JP2013217719A (ja) 圧力センサー及び電子機器

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130116

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130116

TRDD Decision of grant or rejection written
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130821

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20130827

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130909

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130930

R150 Certificate of patent or registration of utility model

Ref document number: 5375624

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees