JP2011145243A5 - - Google Patents

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Publication number
JP2011145243A5
JP2011145243A5 JP2010007860A JP2010007860A JP2011145243A5 JP 2011145243 A5 JP2011145243 A5 JP 2011145243A5 JP 2010007860 A JP2010007860 A JP 2010007860A JP 2010007860 A JP2010007860 A JP 2010007860A JP 2011145243 A5 JP2011145243 A5 JP 2011145243A5
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JP
Japan
Prior art keywords
acceleration sensor
substrate piece
support surface
fixed part
fixed
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Application number
JP2010007860A
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English (en)
Japanese (ja)
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JP5375624B2 (ja
JP2011145243A (ja
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Priority to JP2010007860A priority Critical patent/JP5375624B2/ja
Priority claimed from JP2010007860A external-priority patent/JP5375624B2/ja
Priority to US12/985,554 priority patent/US20110174075A1/en
Priority to CN201110007098XA priority patent/CN102169128A/zh
Priority to KR20110004559A priority patent/KR20110084843A/ko
Publication of JP2011145243A publication Critical patent/JP2011145243A/ja
Publication of JP2011145243A5 publication Critical patent/JP2011145243A5/ja
Application granted granted Critical
Publication of JP5375624B2 publication Critical patent/JP5375624B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010007860A 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置 Expired - Fee Related JP5375624B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010007860A JP5375624B2 (ja) 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置
US12/985,554 US20110174075A1 (en) 2010-01-18 2011-01-06 Acceleration sensor and acceleration detecting apparatus
CN201110007098XA CN102169128A (zh) 2010-01-18 2011-01-13 加速度传感器和加速度检测装置
KR20110004559A KR20110084843A (ko) 2010-01-18 2011-01-17 가속도센서 및 가속도 검출장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010007860A JP5375624B2 (ja) 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置

Publications (3)

Publication Number Publication Date
JP2011145243A JP2011145243A (ja) 2011-07-28
JP2011145243A5 true JP2011145243A5 (enExample) 2013-02-28
JP5375624B2 JP5375624B2 (ja) 2013-12-25

Family

ID=44276537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010007860A Expired - Fee Related JP5375624B2 (ja) 2010-01-18 2010-01-18 加速度センサー、及び加速度検出装置

Country Status (4)

Country Link
US (1) US20110174075A1 (enExample)
JP (1) JP5375624B2 (enExample)
KR (1) KR20110084843A (enExample)
CN (1) CN102169128A (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9759739B2 (en) * 2011-02-02 2017-09-12 Honeywell International Inc. MEMS vibrating-beam accelerometer with piezoelectric drive
JP5678741B2 (ja) * 2011-03-11 2015-03-04 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置
JP5967194B2 (ja) * 2012-04-27 2016-08-10 株式会社村田製作所 加速度センサ
WO2017007428A1 (en) * 2015-07-07 2017-01-12 Agency For Science, Technology And Research Motion measurement devices and methods for measuring motion
JP6627501B2 (ja) * 2015-12-28 2020-01-08 セイコーエプソン株式会社 計測装置、減衰特性算出方法、プログラム、および計測システム
JP6604200B2 (ja) * 2015-12-28 2019-11-13 セイコーエプソン株式会社 加速度センサー、計測システム、および計測装置
IT201600129935A1 (it) 2016-12-22 2018-06-22 Pietro Fiorentini Spa Struttura di trasduttore, trasduttore comprendente tale struttura di trasduttore, e sensore comprendente detto trasduttore
CN109765404B (zh) * 2018-12-28 2020-03-17 西安交通大学 基于QoS工艺的加速度计芯片及加工工艺和加速度计
CN110095634B (zh) * 2019-05-24 2024-03-29 上海工程技术大学 一种杠杆式双向声表面波加速度传感器
CN114280329A (zh) * 2021-12-27 2022-04-05 西安交通大学 一种双端固支音叉石英加速度传感器

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4479385A (en) * 1982-09-23 1984-10-30 The United States Of America As Represented By The Department Of Energy Double resonator cantilever accelerometer
US4628735A (en) * 1984-12-14 1986-12-16 Sundstrand Data Control, Inc. Vibrating beam accelerometer
US4856350A (en) * 1987-10-22 1989-08-15 Hanson Richard A Force sensing device and method
US4970903A (en) * 1987-10-22 1990-11-20 Hanson Richard A Force sensing device
FR2627592B1 (fr) * 1988-02-22 1990-07-27 Sagem Accelerometre pendulaire non asservi a poutre resonante
US4881408A (en) * 1989-02-16 1989-11-21 Sundstrand Data Control, Inc. Low profile accelerometer
US5036715A (en) * 1989-06-30 1991-08-06 Richard Hanson Cantilevered force sensing assembly utilizing one or two resonating force sensing devices
ES2073903T3 (es) * 1991-10-31 1995-08-16 K Tron Tech Inc Disposicion dinamometrica.
US5289719A (en) * 1991-11-13 1994-03-01 New Sd, Inc. Accelerometer with temperature compensation and matched force transducers
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd, Inc. Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
JP2000206141A (ja) * 1999-01-20 2000-07-28 Miyota Kk 運動量センサ
DE60213981T2 (de) * 2001-05-15 2007-08-30 Honeywell International Inc. Element zur spannungsentlastung für einen beschleunigungssensor
FR2848298B1 (fr) * 2002-12-10 2005-03-11 Thales Sa Accelerometre a poutre vibrante
US6938334B2 (en) * 2003-10-31 2005-09-06 Honeywell International, Inc. Vibrating beam accelerometer two-wafer fabrication process
JP2008209389A (ja) * 2006-10-13 2008-09-11 Seiko Epson Corp 加速度センサ
US7802475B2 (en) * 2006-10-13 2010-09-28 Seiko Epson Corporation Acceleration sensor
JP2008170203A (ja) * 2007-01-10 2008-07-24 Epson Toyocom Corp 加速度検知ユニット、及び加速度センサ
JP2009156831A (ja) * 2007-12-28 2009-07-16 Epson Toyocom Corp 加速度検知ユニット及び加速度検知装置
US8117917B2 (en) * 2008-03-27 2012-02-21 Honeywell International Inc. Vibrating beam accelerometer with improved performance in vibration environments
FR2937145B1 (fr) * 2008-10-10 2010-09-24 Thales Sa Accelerometre micro-usine
JP2011117944A (ja) * 2009-10-29 2011-06-16 Seiko Epson Corp 加速度センサー
JP2012242343A (ja) * 2011-05-24 2012-12-10 Seiko Epson Corp 加速度センサー及び加速度検出装置

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