JP2010087575A5 - - Google Patents
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- Publication number
- JP2010087575A5 JP2010087575A5 JP2008251182A JP2008251182A JP2010087575A5 JP 2010087575 A5 JP2010087575 A5 JP 2010087575A5 JP 2008251182 A JP2008251182 A JP 2008251182A JP 2008251182 A JP2008251182 A JP 2008251182A JP 2010087575 A5 JP2010087575 A5 JP 2010087575A5
- Authority
- JP
- Japan
- Prior art keywords
- axis direction
- base
- piezoelectric device
- tuning fork
- outer frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003139 buffering effect Effects 0.000 claims 10
- 239000000758 substrate Substances 0.000 claims 6
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008251182A JP4685910B2 (ja) | 2008-09-29 | 2008-09-29 | 圧電デバイス |
| US12/564,846 US8110965B2 (en) | 2008-09-29 | 2009-09-22 | Piezoelectric devices having improved impact resistance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008251182A JP4685910B2 (ja) | 2008-09-29 | 2008-09-29 | 圧電デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010087575A JP2010087575A (ja) | 2010-04-15 |
| JP2010087575A5 true JP2010087575A5 (enExample) | 2010-07-08 |
| JP4685910B2 JP4685910B2 (ja) | 2011-05-18 |
Family
ID=42056661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008251182A Expired - Fee Related JP4685910B2 (ja) | 2008-09-29 | 2008-09-29 | 圧電デバイス |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8110965B2 (enExample) |
| JP (1) | JP4685910B2 (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4647677B2 (ja) * | 2008-08-11 | 2011-03-09 | 日本電波工業株式会社 | 圧電デバイス |
| JP4885206B2 (ja) * | 2008-12-22 | 2012-02-29 | 日本電波工業株式会社 | 音叉型圧電振動片および圧電デバイス |
| JP2010147953A (ja) * | 2008-12-22 | 2010-07-01 | Nippon Dempa Kogyo Co Ltd | 圧電フレーム及び圧電デバイス |
| US8552624B2 (en) * | 2009-09-18 | 2013-10-08 | Seiko Epson Corporation | Impact resistance vibrating reed, vibrator, oscillator, and electronic device |
| KR20110087375A (ko) * | 2010-01-26 | 2011-08-03 | 삼성전자주식회사 | 하드디스크 드라이브의 디스크 센터링 방법 |
| US8368476B2 (en) * | 2010-03-19 | 2013-02-05 | Seiko Epson Corporation | Resonator element, resonator device and electronic device |
| JP6468350B2 (ja) * | 2015-04-27 | 2019-02-13 | 株式会社村田製作所 | 共振子及び共振装置 |
| JP6548149B2 (ja) | 2015-04-27 | 2019-07-24 | 株式会社村田製作所 | 共振子及び共振装置 |
| JP6551706B2 (ja) | 2015-04-28 | 2019-07-31 | 株式会社村田製作所 | 共振子及び共振装置 |
| WO2018042994A1 (ja) * | 2016-08-30 | 2018-03-08 | 株式会社大真空 | 水晶振動板、及び水晶振動デバイス |
| JP6819945B2 (ja) * | 2017-05-16 | 2021-01-27 | 株式会社村田製作所 | 音叉型水晶振動素子及びその製造方法、並びに音叉型水晶振動子 |
| US10812046B2 (en) | 2018-02-07 | 2020-10-20 | Murata Manufacturing Co., Ltd. | Micromechanical resonator having reduced size |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5458395A (en) * | 1977-10-19 | 1979-05-11 | Matsushima Kogyo Kk | Piezooelectric vibrator |
| JP2592280B2 (ja) * | 1988-02-18 | 1997-03-19 | セイコー電子工業株式会社 | 縦水晶振動子 |
| JP2001007678A (ja) * | 1999-06-25 | 2001-01-12 | Seiko Epson Corp | 圧電振動子 |
| JP3995918B2 (ja) * | 2001-10-29 | 2007-10-24 | セイコーインスツル株式会社 | 表面実装型圧電振動子 |
| JP2004208237A (ja) * | 2002-12-26 | 2004-07-22 | Seiko Epson Corp | 圧電デバイスと圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器 |
| JP3951058B2 (ja) * | 2003-08-19 | 2007-08-01 | セイコーエプソン株式会社 | 音叉型圧電振動片 |
| JP2007258918A (ja) * | 2006-03-22 | 2007-10-04 | Epson Toyocom Corp | 圧電デバイス |
| JP2007258917A (ja) * | 2006-03-22 | 2007-10-04 | Epson Toyocom Corp | 圧電デバイス |
| JP5061654B2 (ja) * | 2007-03-02 | 2012-10-31 | 株式会社大真空 | 圧電振動デバイスの製造方法 |
| JP5062413B2 (ja) * | 2007-11-08 | 2012-10-31 | セイコーエプソン株式会社 | 音叉型圧電振動片及び音叉型圧電振動子 |
| JP5584500B2 (ja) * | 2009-05-01 | 2014-09-03 | 日本電波工業株式会社 | 圧電フレーム及び圧電デバイス |
| US8552624B2 (en) * | 2009-09-18 | 2013-10-08 | Seiko Epson Corporation | Impact resistance vibrating reed, vibrator, oscillator, and electronic device |
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2008
- 2008-09-29 JP JP2008251182A patent/JP4685910B2/ja not_active Expired - Fee Related
-
2009
- 2009-09-22 US US12/564,846 patent/US8110965B2/en not_active Expired - Fee Related