JP2007064662A5 - - Google Patents

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Publication number
JP2007064662A5
JP2007064662A5 JP2005247639A JP2005247639A JP2007064662A5 JP 2007064662 A5 JP2007064662 A5 JP 2007064662A5 JP 2005247639 A JP2005247639 A JP 2005247639A JP 2005247639 A JP2005247639 A JP 2005247639A JP 2007064662 A5 JP2007064662 A5 JP 2007064662A5
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JP
Japan
Prior art keywords
leg
legs
detection
drive
width
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JP2005247639A
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English (en)
Japanese (ja)
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JP2007064662A (ja
JP4668739B2 (ja
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Priority to JP2005247639A priority Critical patent/JP4668739B2/ja
Priority claimed from JP2005247639A external-priority patent/JP4668739B2/ja
Priority to US11/510,553 priority patent/US7673511B2/en
Publication of JP2007064662A publication Critical patent/JP2007064662A/ja
Publication of JP2007064662A5 publication Critical patent/JP2007064662A5/ja
Application granted granted Critical
Publication of JP4668739B2 publication Critical patent/JP4668739B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005247639A 2005-08-29 2005-08-29 振動ジャイロ Expired - Fee Related JP4668739B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005247639A JP4668739B2 (ja) 2005-08-29 2005-08-29 振動ジャイロ
US11/510,553 US7673511B2 (en) 2005-08-29 2006-08-28 Vibration gyro

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005247639A JP4668739B2 (ja) 2005-08-29 2005-08-29 振動ジャイロ

Publications (3)

Publication Number Publication Date
JP2007064662A JP2007064662A (ja) 2007-03-15
JP2007064662A5 true JP2007064662A5 (enExample) 2008-08-07
JP4668739B2 JP4668739B2 (ja) 2011-04-13

Family

ID=37892240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005247639A Expired - Fee Related JP4668739B2 (ja) 2005-08-29 2005-08-29 振動ジャイロ

Country Status (2)

Country Link
US (1) US7673511B2 (enExample)
JP (1) JP4668739B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100116052A1 (en) * 2007-03-20 2010-05-13 Citizen Holdings Co., Ltd. Piezoelectric vibrator, and vibration gyro
JP5294142B2 (ja) * 2008-03-27 2013-09-18 Ｔｄｋ株式会社 振動ジャイロセンサ
US8310369B1 (en) * 2009-03-27 2012-11-13 Nth Solutions, Llc Detecting unintended flush toilet water flow
TWI398097B (zh) 2009-11-18 2013-06-01 Wafer Mems Co Ltd 音叉型石英晶體諧振器
JP5786303B2 (ja) * 2009-12-10 2015-09-30 セイコーエプソン株式会社 振動片、振動子、物理量センサー、及び電子機器
US8283988B2 (en) 2010-02-25 2012-10-09 Seiko Epson Corporation Resonator element, resonator, oscillator, and electronic device
JP6337443B2 (ja) * 2013-10-30 2018-06-06 セイコーエプソン株式会社 振動片、角速度センサー、電子機器及び移動体
JP2016085190A (ja) 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、振動素子の製造方法、電子デバイス、電子機器、および移動体
JP2016085191A (ja) * 2014-10-29 2016-05-19 セイコーエプソン株式会社 振動素子、振動素子の製造方法、電子デバイス、電子機器、および移動体

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5325574A (en) * 1987-02-27 1994-07-05 Seiko Epson Corporation Method of forming a quartz oscillator temperature sensor
JPH0783671A (ja) 1993-07-22 1995-03-28 Yoshiro Tomikawa 振動型ジャイロスコープ
JP3029001B2 (ja) * 1993-10-28 2000-04-04 トヨタ自動車株式会社 振動子
JPH0894362A (ja) 1994-09-20 1996-04-12 Yoshiro Tomikawa 振動型ジャイロスコープ
JP2000004138A (ja) * 1998-03-31 2000-01-07 Seiko Epson Corp 振動子の製造方法及び電子機器
JP2000283765A (ja) * 1999-03-30 2000-10-13 Matsushita Electric Ind Co Ltd 三脚音叉振動子および角速度センサ
JP3477618B2 (ja) * 2000-10-31 2003-12-10 有限会社ピエデック技術研究所 屈曲水晶振動子
JP4068370B2 (ja) * 2001-09-07 2008-03-26 シチズンホールディングス株式会社 振動ジャイロ
WO2004079296A1 (ja) * 2003-03-06 2004-09-16 Nec Corporation 六脚型圧電振動ジャイロスコープ
JP4026074B2 (ja) * 2003-06-30 2007-12-26 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器
JP4509621B2 (ja) * 2003-10-10 2010-07-21 日本電波工業株式会社 角速度センサ用音叉型水晶振動子の製造方法
US7140251B2 (en) * 2004-05-19 2006-11-28 Ngk Insulators, Ltd. Devices for measuring physical values and vibrators
JP4631329B2 (ja) * 2004-07-01 2011-02-16 パナソニック株式会社 角速度センサ及びその製造方法
ATE392602T1 (de) * 2004-12-20 2008-05-15 Eta Sa Mft Horlogere Suisse Messwertgeber zur drehgeschwindigkeitsmessung
US7084556B1 (en) * 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator

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