JP2007052012A5 - - Google Patents

Download PDF

Info

Publication number
JP2007052012A5
JP2007052012A5 JP2006216242A JP2006216242A JP2007052012A5 JP 2007052012 A5 JP2007052012 A5 JP 2007052012A5 JP 2006216242 A JP2006216242 A JP 2006216242A JP 2006216242 A JP2006216242 A JP 2006216242A JP 2007052012 A5 JP2007052012 A5 JP 2007052012A5
Authority
JP
Japan
Prior art keywords
vibrating
vibrating beam
drive
gyroscope
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006216242A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007052012A (ja
JP5161441B2 (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2007052012A publication Critical patent/JP2007052012A/ja
Publication of JP2007052012A5 publication Critical patent/JP2007052012A5/ja
Application granted granted Critical
Publication of JP5161441B2 publication Critical patent/JP5161441B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006216242A 2005-08-08 2006-08-08 振動ジャイロスコープ Active JP5161441B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US70660705P 2005-08-08 2005-08-08
US60/706,607 2005-08-08

Publications (3)

Publication Number Publication Date
JP2007052012A JP2007052012A (ja) 2007-03-01
JP2007052012A5 true JP2007052012A5 (enExample) 2009-07-16
JP5161441B2 JP5161441B2 (ja) 2013-03-13

Family

ID=37339226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006216242A Active JP5161441B2 (ja) 2005-08-08 2006-08-08 振動ジャイロスコープ

Country Status (3)

Country Link
US (1) US7886598B2 (enExample)
EP (2) EP1752735B1 (enExample)
JP (1) JP5161441B2 (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7565839B2 (en) * 2005-08-08 2009-07-28 Northrop Grumman Guidance And Electronics Company, Inc. Bias and quadrature reduction in class II coriolis vibratory gyros
EP2063224A4 (en) * 2006-08-21 2012-05-09 Panasonic Corp ANGLE SPEED SENSOR
US7874209B2 (en) * 2008-01-08 2011-01-25 Northrop Grumman Guidance And Electronics Company, Inc. Capacitive bulk acoustic wave disk gyroscopes with self-calibration
US7912664B2 (en) 2008-09-11 2011-03-22 Northrop Grumman Guidance And Electronics Company, Inc. Self calibrating gyroscope system
US8011246B2 (en) * 2008-09-22 2011-09-06 Northrop Grumman Guidance And Electronics Company, Inc. Apparatus and method for self-calibration of coriolis vibratory gyroscope
US8661898B2 (en) * 2008-10-14 2014-03-04 Watson Industries, Inc. Vibrating structural gyroscope with quadrature control
US9212908B2 (en) 2012-04-26 2015-12-15 Analog Devices, Inc. MEMS gyroscopes with reduced errors
WO2014172487A1 (en) 2013-04-16 2014-10-23 The Regents Of The University Of California Continuous mode reversal for rejecting drift in gyroscopes
US9869552B2 (en) * 2015-03-20 2018-01-16 Analog Devices, Inc. Gyroscope that compensates for fluctuations in sensitivity
US9927239B2 (en) 2015-06-01 2018-03-27 Analog Devices, Inc. Micromachined cross-hatch vibratory gyroscopes
JP6571065B2 (ja) 2016-12-08 2019-09-04 株式会社東芝 振動装置
US11333499B2 (en) 2018-09-14 2022-05-17 Honeywell International Inc. Vibratory error compensation in a tuning fork gyroscope such as a Coriolis Vibratory Gyroscope (CVG)
CN109269490A (zh) * 2018-11-02 2019-01-25 杨荣彬 一种多单元耦合的酒杯模态陀螺仪及其操作方法
US11788840B2 (en) * 2021-11-08 2023-10-17 Northrop Grumman Systems Corporation Vibrating-mass sensor system
US11841243B1 (en) 2022-02-09 2023-12-12 Hrl Laboratories, Llc Frequency multiplexed operation of vibratory gyroscopes for continuous self-calibration
WO2025205848A1 (ja) * 2024-03-27 2025-10-02 住友精密工業株式会社 ジャイロスコープ

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349857A (en) * 1988-08-12 1994-09-27 Murata Manufacturing Co., Ltd. Vibratory gyroscope
JPH063455B2 (ja) * 1989-04-06 1994-01-12 株式会社村田製作所 振動ジャイロ
JP2540256B2 (ja) * 1991-08-27 1996-10-02 赤井電機株式会社 振動ジャイロの使用方法
JP2532779B2 (ja) * 1991-10-08 1996-09-11 赤井電機株式会社 振動子の支持構造
EP0578519B1 (en) * 1992-06-11 1997-03-12 Sagem Sa Vibrating beam gyroscopic measuring apparatus
FR2705147B1 (fr) 1993-05-10 1995-08-11 Sagem Dispositif gyrometrique a poutres vibrantes.
JP3312260B2 (ja) * 1993-03-12 2002-08-05 エヌイーシートーキン株式会社 圧電振動ジャイロ
JPH07208998A (ja) * 1994-01-21 1995-08-11 Murata Mfg Co Ltd 振動ジャイロ
JP3656544B2 (ja) * 2000-11-10 2005-06-08 株式会社村田製作所 複合振動子及びそれを用いた振動ジャイロ、及び複合振動子の製造方法
GB0227084D0 (en) * 2002-11-20 2002-12-24 Bae Systems Plc Method and apparatus for measuring scalefactor variation in a vibrating structure gyroscope
US7091451B2 (en) * 2003-06-20 2006-08-15 Northrop Grumman Corporation Heating element induction of time-varying thermal gradient in elongated beam to cause one or more elongated beam oscillations
FR2856789B1 (fr) * 2003-06-27 2005-08-26 Thales Sa Gyrometre a masse vibrante
US7174785B2 (en) * 2004-03-03 2007-02-13 Northrop Grumman Corporation Oscillation of vibrating beam in a first direction for a first time period and a second direction for a second time period to sense angular rate of the vibrating beam
CA2498115A1 (en) 2004-03-03 2005-09-03 Northrop Grumman Corporation Oscillation of vibrating beam in a first direction for a first time period and a second direction for a second time period to sense angular rate of the vibrating beam

Similar Documents

Publication Publication Date Title
JP5161440B2 (ja) 振動梁ジャイロスコープ、振動梁ジャイロスコープの駆動方法
JP2007052012A5 (enExample)
JP5554930B2 (ja) 自己較正を備えた容量性バルク弾性波ディスク・ジャイロスコープ
JP2007047166A5 (enExample)
JP5161441B2 (ja) 振動ジャイロスコープ
CN113959423A (zh) 一种mems陀螺仪及电子设备
CN114964306B (zh) 一种半球谐振陀螺标定因数和零偏自标定方法
US8561466B2 (en) Vibratory gyro bias error cancellation using mode reversal
EP3751232A1 (en) In-plane non-degenerate coriolis vibratory gyroscope
JP4995427B2 (ja) 振動ビームを含むエレクトロメカニカル・システム
US12222203B2 (en) Fully decoupled three-axis MEMS gyroscope
US7174785B2 (en) Oscillation of vibrating beam in a first direction for a first time period and a second direction for a second time period to sense angular rate of the vibrating beam
JPH10307028A (ja) 振動ジャイロ
JP4591787B2 (ja) 振動子および角速度測定装置
JP4995426B2 (ja) 振動梁を含む電気機械システム
JP5016652B2 (ja) 音叉型振動ジャイロ
JP2000213942A (ja) 振動ジャイロ
JPH04324311A (ja) 振動式ジャイロ
JPH07174570A (ja) 振動ジャイロ
JPH03214017A (ja) 角速度センサ
Apostolyuk et al. Investigation of micromechanical inertial devices
JP2006125917A (ja) 角速度センサ
Poreddy et al. Design Compensation for Fabrication Imperfections of Microgyroscopes
Shah et al. Research Article Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope
JPH0843106A (ja) 振動ジャイロ