JP2003156337A5 - - Google Patents

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Publication number
JP2003156337A5
JP2003156337A5 JP2002075634A JP2002075634A JP2003156337A5 JP 2003156337 A5 JP2003156337 A5 JP 2003156337A5 JP 2002075634 A JP2002075634 A JP 2002075634A JP 2002075634 A JP2002075634 A JP 2002075634A JP 2003156337 A5 JP2003156337 A5 JP 2003156337A5
Authority
JP
Japan
Prior art keywords
leg
width
vibrating gyroscope
vibrator
gyroscope according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002075634A
Other languages
English (en)
Japanese (ja)
Other versions
JP4068370B2 (ja
JP2003156337A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002075634A priority Critical patent/JP4068370B2/ja
Priority claimed from JP2002075634A external-priority patent/JP4068370B2/ja
Priority to US10/235,958 priority patent/US6675651B2/en
Publication of JP2003156337A publication Critical patent/JP2003156337A/ja
Publication of JP2003156337A5 publication Critical patent/JP2003156337A5/ja
Application granted granted Critical
Publication of JP4068370B2 publication Critical patent/JP4068370B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2002075634A 2001-09-07 2002-03-19 振動ジャイロ Expired - Fee Related JP4068370B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2002075634A JP4068370B2 (ja) 2001-09-07 2002-03-19 振動ジャイロ
US10/235,958 US6675651B2 (en) 2001-09-07 2002-09-06 Vibration gyro

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2001271132 2001-09-07
JP2001-271132 2001-09-07
JP2002075634A JP4068370B2 (ja) 2001-09-07 2002-03-19 振動ジャイロ

Publications (3)

Publication Number Publication Date
JP2003156337A JP2003156337A (ja) 2003-05-30
JP2003156337A5 true JP2003156337A5 (enExample) 2005-08-18
JP4068370B2 JP4068370B2 (ja) 2008-03-26

Family

ID=26621798

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002075634A Expired - Fee Related JP4068370B2 (ja) 2001-09-07 2002-03-19 振動ジャイロ

Country Status (2)

Country Link
US (1) US6675651B2 (enExample)
JP (1) JP4068370B2 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6791243B2 (en) * 2002-03-06 2004-09-14 Piedek Technical Laboratory Quartz crystal unit and its manufacturing method
WO2004079296A1 (ja) * 2003-03-06 2004-09-16 Nec Corporation 六脚型圧電振動ジャイロスコープ
JP4049017B2 (ja) * 2003-05-16 2008-02-20 セイコーエプソン株式会社 圧電振動子
US11563406B2 (en) 2003-06-30 2023-01-24 Piedek Technical Laboratory Quartz crystal resonator, quartz crystal unit, and quartz crystal oscillator
US10199556B2 (en) 2003-06-30 2019-02-05 Piedek Technical Laboratory Unit, oscillator and electronic apparatus
US8358053B2 (en) * 2003-06-30 2013-01-22 Piedek Technical Laboratory Unit, oscillator having unit and electronic apparatus having oscillator
EP1695046B1 (de) * 2003-12-18 2011-10-12 Endress + Hauser GmbH + Co. KG Messvorrichtung mit mechanisch schwingfähiger einheit sowie verfahren und vorrichtung zu deren herstellung
CA2498115A1 (en) * 2004-03-03 2005-09-03 Northrop Grumman Corporation Oscillation of vibrating beam in a first direction for a first time period and a second direction for a second time period to sense angular rate of the vibrating beam
WO2005096493A1 (ja) * 2004-03-30 2005-10-13 Citizen Watch Co., Ltd. 水晶振動子の製造方法及び水晶振動子
JP4668739B2 (ja) * 2005-08-29 2011-04-13 シチズンホールディングス株式会社 振動ジャイロ
JP5008424B2 (ja) 2006-03-14 2012-08-22 シチズンホールディングス株式会社 振動子の製造方法
JP4395171B2 (ja) * 2007-02-23 2010-01-06 多摩川精機株式会社 角速度センサおよびその製造方法
US20100116052A1 (en) * 2007-03-20 2010-05-13 Citizen Holdings Co., Ltd. Piezoelectric vibrator, and vibration gyro
JP4533908B2 (ja) 2007-04-10 2010-09-01 シャープ株式会社 画像形成装置
JP4600692B2 (ja) * 2007-12-28 2010-12-15 エプソントヨコム株式会社 水晶振動片、水晶デバイス、および水晶振動片の製造方法
WO2009143492A1 (en) 2008-05-23 2009-11-26 Statek Corporation Piezoelectric resonator
JP5360361B2 (ja) 2008-07-17 2013-12-04 セイコーエプソン株式会社 角速度検出装置用回路、角速度検出装置及び故障判定システム
JP5360362B2 (ja) * 2008-07-17 2013-12-04 セイコーエプソン株式会社 角速度検出装置用回路、角速度検出装置及び故障判定システム
US8082790B2 (en) * 2008-08-15 2011-12-27 Sural C.A. Solid-state inertial sensor on chip
JP5703731B2 (ja) * 2010-12-14 2015-04-22 セイコーエプソン株式会社 電子機器
US8304968B2 (en) 2010-03-17 2012-11-06 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
JP6155897B2 (ja) * 2013-06-24 2017-07-05 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器及び移動体
WO2016043205A1 (ja) * 2014-09-19 2016-03-24 株式会社村田製作所 共振子及び共振装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0783671A (ja) * 1993-07-22 1995-03-28 Yoshiro Tomikawa 振動型ジャイロスコープ
JP3029001B2 (ja) * 1993-10-28 2000-04-04 トヨタ自動車株式会社 振動子
JPH0894362A (ja) * 1994-09-20 1996-04-12 Yoshiro Tomikawa 振動型ジャイロスコープ
US6257058B1 (en) * 1998-04-27 2001-07-10 Alps Electric Co., Ltd. Silicon gyroscope and method of driving the same

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