JP5372102B2 - 光電変換装置および撮像システム - Google Patents
光電変換装置および撮像システム Download PDFInfo
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- JP5372102B2 JP5372102B2 JP2011223303A JP2011223303A JP5372102B2 JP 5372102 B2 JP5372102 B2 JP 5372102B2 JP 2011223303 A JP2011223303 A JP 2011223303A JP 2011223303 A JP2011223303 A JP 2011223303A JP 5372102 B2 JP5372102 B2 JP 5372102B2
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- Prior art keywords
- light receiving
- refractive index
- lens
- receiving element
- photoelectric conversion
- Prior art date
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8067—Reflectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/805—Coatings
- H10F39/8057—Optical shielding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/806—Optical elements or arrangements associated with the image sensors
- H10F39/8063—Microlenses
Landscapes
- Solid State Image Pick-Up Elements (AREA)
- Light Receiving Elements (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011223303A JP5372102B2 (ja) | 2011-02-09 | 2011-10-07 | 光電変換装置および撮像システム |
| US13/364,230 US9293493B2 (en) | 2011-02-09 | 2012-02-01 | Photoelectric conversion apparatus and image sensing system |
| CN201210027705.3A CN102637704B (zh) | 2011-02-09 | 2012-02-09 | 光电转换装置和图像感测系统 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011026345 | 2011-02-09 | ||
| JP2011026345 | 2011-02-09 | ||
| JP2011223303A JP5372102B2 (ja) | 2011-02-09 | 2011-10-07 | 光電変換装置および撮像システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012182432A JP2012182432A (ja) | 2012-09-20 |
| JP2012182432A5 JP2012182432A5 (enExample) | 2013-03-28 |
| JP5372102B2 true JP5372102B2 (ja) | 2013-12-18 |
Family
ID=46600406
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011223303A Active JP5372102B2 (ja) | 2011-02-09 | 2011-10-07 | 光電変換装置および撮像システム |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9293493B2 (enExample) |
| JP (1) | JP5372102B2 (enExample) |
| CN (1) | CN102637704B (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014036092A (ja) * | 2012-08-08 | 2014-02-24 | Canon Inc | 光電変換装置 |
| US9123839B2 (en) * | 2013-03-13 | 2015-09-01 | Taiwan Semiconductor Manufacturing Company Limited | Image sensor with stacked grid structure |
| US20140375852A1 (en) * | 2013-06-20 | 2014-12-25 | Canon Kabushiki Kaisha | Solid-state imaging apparatus, method of manufacturing the same, camera, imaging device, and imaging apparatus |
| JP2015060855A (ja) * | 2013-09-17 | 2015-03-30 | ソニー株式会社 | 固体撮像装置およびその製造方法、並びに電子機器 |
| JP6166640B2 (ja) * | 2013-10-22 | 2017-07-19 | キヤノン株式会社 | 固体撮像装置、その製造方法及びカメラ |
| US9386203B2 (en) * | 2013-10-28 | 2016-07-05 | Omnivision Technologies, Inc. | Compact spacer in multi-lens array module |
| JP6173259B2 (ja) | 2014-06-02 | 2017-08-02 | キヤノン株式会社 | 光電変換装置および撮像システム |
| JP6444066B2 (ja) | 2014-06-02 | 2018-12-26 | キヤノン株式会社 | 光電変換装置および撮像システム |
| KR102327503B1 (ko) * | 2014-09-04 | 2021-11-18 | 에스케이하이닉스 주식회사 | 이미지 센서, 그 제조방법 및 이를 구비한 전자장치 |
| WO2016103430A1 (ja) * | 2014-12-25 | 2016-06-30 | キヤノン株式会社 | ラインセンサ、画像読取装置、画像形成装置 |
| JP2016149417A (ja) * | 2015-02-10 | 2016-08-18 | キヤノン株式会社 | 固体撮像装置、固体撮像装置の製造方法及び撮像システム |
| JP7071055B2 (ja) * | 2017-02-24 | 2022-05-18 | キヤノン株式会社 | 撮像素子および撮像装置 |
| KR102666282B1 (ko) * | 2017-12-12 | 2024-05-14 | 르파운드리 에스.알.엘. | 가시광선 및 자외선 검출을 위한 반도체 광학 센서 및 그 제조 공정 |
| KR102632442B1 (ko) * | 2018-05-09 | 2024-01-31 | 삼성전자주식회사 | 이미지 센서 및 전자 장치 |
| JP2020113573A (ja) * | 2019-01-08 | 2020-07-27 | キヤノン株式会社 | 光電変換装置 |
| CN114041208A (zh) | 2019-09-30 | 2022-02-11 | Oppo广东移动通信有限公司 | 图像传感器、摄像头组件及移动终端 |
| CN110649057B (zh) * | 2019-09-30 | 2021-03-05 | Oppo广东移动通信有限公司 | 图像传感器、摄像头组件及移动终端 |
| CN114008782A (zh) | 2019-09-30 | 2022-02-01 | Oppo广东移动通信有限公司 | 图像传感器、摄像头组件及移动终端 |
| CN112824956A (zh) * | 2019-11-21 | 2021-05-21 | 三赢科技(深圳)有限公司 | 透光薄片、激光投射模组、深度相机以及电子装置 |
| WO2022050897A2 (en) * | 2020-08-27 | 2022-03-10 | Compoundtek Pte. Ltd. | Semiconductor device and fabricating method therefor |
| TWI807248B (zh) * | 2021-01-22 | 2023-07-01 | 財團法人國家實驗研究院 | 具有增強感光效果之聚光結構 |
| WO2022168523A1 (ja) * | 2021-02-02 | 2022-08-11 | 株式会社ジャパンディスプレイ | 検出装置及び検出装置の製造方法 |
| EP4318590A4 (en) * | 2021-03-31 | 2025-03-05 | Sony Semiconductor Solutions Corporation | SOLID-STATE IMAGING DEVICE AND ELECTRONIC DEVICE |
| CN112885859A (zh) * | 2021-03-31 | 2021-06-01 | 华虹半导体(无锡)有限公司 | Cmos图像传感器 |
| CN115224055A (zh) * | 2021-04-21 | 2022-10-21 | 谢远达 | 具有增强感光效果的聚光结构 |
| US11594647B2 (en) * | 2021-04-21 | 2023-02-28 | National Applied Research Laboratories | Light-concentrating structure with photosensitivity enhancing effect |
| CN115825927A (zh) * | 2022-03-29 | 2023-03-21 | 神盾股份有限公司 | 距离感测模块 |
| JPWO2024038856A1 (enExample) * | 2022-08-19 | 2024-02-22 | ||
| KR20240133030A (ko) * | 2023-02-28 | 2024-09-04 | 주식회사 디비하이텍 | 이미지 센서 및 제조방법 |
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| JP3452828B2 (ja) * | 1999-03-01 | 2003-10-06 | 松下電器産業株式会社 | 固体撮像装置およびその製造方法 |
| JP3789365B2 (ja) | 2002-01-31 | 2006-06-21 | シャープ株式会社 | 層内レンズ付き半導体装置およびその製造方法 |
| JP4383959B2 (ja) * | 2003-05-28 | 2009-12-16 | キヤノン株式会社 | 光電変換装置およびその製造方法 |
| JP4548702B2 (ja) | 2003-10-02 | 2010-09-22 | キヤノン株式会社 | 撮像装置および撮像システム |
| JP2005252391A (ja) * | 2004-03-01 | 2005-09-15 | Canon Inc | 撮像装置 |
| US7119319B2 (en) * | 2004-04-08 | 2006-10-10 | Canon Kabushiki Kaisha | Solid-state image sensing element and its design support method, and image sensing device |
| JP2006049825A (ja) | 2004-07-08 | 2006-02-16 | Matsushita Electric Ind Co Ltd | 固体撮像素子およびその製造方法 |
| US7768088B2 (en) | 2004-09-24 | 2010-08-03 | Fujifilm Corporation | Solid-state imaging device that efficiently guides light to a light-receiving part |
| JP2006121065A (ja) | 2004-09-24 | 2006-05-11 | Fuji Photo Film Co Ltd | 固体撮像素子 |
| JP4500667B2 (ja) | 2004-12-24 | 2010-07-14 | 富士フイルム株式会社 | 固体撮像素子およびその製造方法 |
| JP2006351759A (ja) * | 2005-06-15 | 2006-12-28 | Fujifilm Holdings Corp | 固体撮像素子およびその製造方法 |
| JP2007201091A (ja) | 2006-01-25 | 2007-08-09 | Fujifilm Corp | 固体撮像素子の製造方法 |
| JP4826362B2 (ja) | 2006-06-28 | 2011-11-30 | 東京エレクトロン株式会社 | マイクロレンズの形成方法 |
| JP2008052004A (ja) | 2006-08-24 | 2008-03-06 | Sony Corp | レンズアレイ及び固体撮像素子の製造方法 |
| JP2008058794A (ja) | 2006-09-01 | 2008-03-13 | Fujifilm Corp | カラーフィルタ用材料、カラーフィルタ、その製造方法、これを用いた固体撮像素子およびその製造方法 |
| JP4968893B2 (ja) * | 2006-09-14 | 2012-07-04 | キヤノン株式会社 | 撮像素子及び撮像システム |
| JP2008104079A (ja) | 2006-10-20 | 2008-05-01 | Fujifilm Corp | 多板式カラー固体撮像装置 |
| JP4349456B2 (ja) * | 2006-10-23 | 2009-10-21 | ソニー株式会社 | 固体撮像素子 |
| JP2008166677A (ja) | 2006-12-08 | 2008-07-17 | Sony Corp | 固体撮像装置とその製造方法並びにカメラ |
| JP2008192951A (ja) | 2007-02-07 | 2008-08-21 | Matsushita Electric Ind Co Ltd | 固体撮像装置およびその製造方法 |
| JP2008258203A (ja) * | 2007-03-30 | 2008-10-23 | Fujifilm Corp | 固体撮像素子及び固体撮像素子の製造方法 |
| JP4264465B2 (ja) * | 2007-08-06 | 2009-05-20 | パナソニック株式会社 | 撮像用光検出装置 |
| JP2009170562A (ja) * | 2008-01-15 | 2009-07-30 | Panasonic Corp | 固体撮像装置及び固体撮像装置の製造方法 |
| JP5288823B2 (ja) | 2008-02-18 | 2013-09-11 | キヤノン株式会社 | 光電変換装置、及び光電変換装置の製造方法 |
| JP5235565B2 (ja) * | 2008-08-27 | 2013-07-10 | キヤノン株式会社 | 撮像センサ及び撮像装置 |
| JP5428400B2 (ja) | 2009-03-04 | 2014-02-26 | ソニー株式会社 | 固体撮像装置、および、その製造方法、電子機器 |
| JP5434252B2 (ja) | 2009-05-14 | 2014-03-05 | ソニー株式会社 | 固体撮像装置、および、その製造方法、電子機器 |
| US8330840B2 (en) * | 2009-08-06 | 2012-12-11 | Aptina Imaging Corporation | Image sensor with multilayer interference filters |
-
2011
- 2011-10-07 JP JP2011223303A patent/JP5372102B2/ja active Active
-
2012
- 2012-02-01 US US13/364,230 patent/US9293493B2/en active Active
- 2012-02-09 CN CN201210027705.3A patent/CN102637704B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20120200728A1 (en) | 2012-08-09 |
| US9293493B2 (en) | 2016-03-22 |
| JP2012182432A (ja) | 2012-09-20 |
| CN102637704B (zh) | 2015-04-29 |
| CN102637704A (zh) | 2012-08-15 |
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