JP5362016B2 - 太陽電池およびその製造方法 - Google Patents
太陽電池およびその製造方法 Download PDFInfo
- Publication number
- JP5362016B2 JP5362016B2 JP2011529749A JP2011529749A JP5362016B2 JP 5362016 B2 JP5362016 B2 JP 5362016B2 JP 2011529749 A JP2011529749 A JP 2011529749A JP 2011529749 A JP2011529749 A JP 2011529749A JP 5362016 B2 JP5362016 B2 JP 5362016B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- photoelectric conversion
- nitrogen
- solar cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 48
- 238000000034 method Methods 0.000 title claims description 33
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 338
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 171
- 238000006243 chemical reaction Methods 0.000 claims abstract description 70
- 229910052751 metal Inorganic materials 0.000 claims abstract description 38
- 239000002184 metal Substances 0.000 claims abstract description 38
- 229910052709 silver Inorganic materials 0.000 claims abstract description 27
- 239000004332 silver Substances 0.000 claims abstract description 26
- 230000005611 electricity Effects 0.000 claims abstract description 6
- 238000000137 annealing Methods 0.000 claims description 44
- 239000007789 gas Substances 0.000 claims description 36
- 239000000654 additive Substances 0.000 claims description 33
- 230000000996 additive effect Effects 0.000 claims description 33
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 25
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 21
- 229910052750 molybdenum Inorganic materials 0.000 claims description 21
- 239000010949 copper Substances 0.000 claims description 19
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 18
- 238000004544 sputter deposition Methods 0.000 claims description 18
- 229910052802 copper Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 14
- 239000010936 titanium Substances 0.000 claims description 14
- 239000011651 chromium Substances 0.000 claims description 12
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 12
- 239000011777 magnesium Substances 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 9
- 229910052737 gold Inorganic materials 0.000 claims description 9
- 229910052763 palladium Inorganic materials 0.000 claims description 9
- 229910052719 titanium Inorganic materials 0.000 claims description 8
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 229910052749 magnesium Inorganic materials 0.000 claims description 7
- 229910052697 platinum Inorganic materials 0.000 claims description 7
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 6
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
- 239000011733 molybdenum Substances 0.000 claims description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 2
- 238000005260 corrosion Methods 0.000 abstract description 19
- 230000007797 corrosion Effects 0.000 abstract description 19
- 230000003287 optical effect Effects 0.000 abstract description 15
- 239000010408 film Substances 0.000 description 348
- 239000010410 layer Substances 0.000 description 262
- 229910001316 Ag alloy Inorganic materials 0.000 description 123
- 239000000758 substrate Substances 0.000 description 116
- 229910045601 alloy Inorganic materials 0.000 description 50
- 239000000956 alloy Substances 0.000 description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 46
- 229910052710 silicon Inorganic materials 0.000 description 46
- 239000010703 silicon Substances 0.000 description 46
- 239000004065 semiconductor Substances 0.000 description 42
- 230000000052 comparative effect Effects 0.000 description 41
- 239000000203 mixture Substances 0.000 description 35
- 229910001199 N alloy Inorganic materials 0.000 description 32
- 230000000694 effects Effects 0.000 description 30
- 230000007423 decrease Effects 0.000 description 28
- 229910052760 oxygen Inorganic materials 0.000 description 28
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 26
- 239000001301 oxygen Substances 0.000 description 26
- 238000012360 testing method Methods 0.000 description 24
- 238000010438 heat treatment Methods 0.000 description 21
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 21
- 239000010409 thin film Substances 0.000 description 21
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 18
- 238000007254 oxidation reaction Methods 0.000 description 18
- 230000015572 biosynthetic process Effects 0.000 description 16
- 238000009792 diffusion process Methods 0.000 description 15
- 230000003647 oxidation Effects 0.000 description 15
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 14
- 238000002310 reflectometry Methods 0.000 description 14
- 239000012535 impurity Substances 0.000 description 13
- 239000011521 glass Substances 0.000 description 12
- 125000004433 nitrogen atom Chemical group N* 0.000 description 9
- 229910001182 Mo alloy Inorganic materials 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 7
- 150000002736 metal compounds Chemical class 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 229910006404 SnO 2 Inorganic materials 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000006872 improvement Effects 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000002356 single layer Substances 0.000 description 6
- 230000003595 spectral effect Effects 0.000 description 6
- 239000011787 zinc oxide Substances 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229910017299 Mo—O Inorganic materials 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- 238000010030 laminating Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000007740 vapor deposition Methods 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 239000005360 phosphosilicate glass Substances 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 229910001887 tin oxide Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 239000013081 microcrystal Substances 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229920000298 Cellophane Polymers 0.000 description 1
- 229910052684 Cerium Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910000979 O alloy Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- OMSFUHVZHUZHAW-UHFFFAOYSA-N [Ag].[Mo] Chemical compound [Ag].[Mo] OMSFUHVZHUZHAW-UHFFFAOYSA-N 0.000 description 1
- GBUDZRWJHAVIQX-UHFFFAOYSA-N [N].[Mo].[Ag] Chemical compound [N].[Mo].[Ag] GBUDZRWJHAVIQX-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 239000002003 electrode paste Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 235000020280 flat white Nutrition 0.000 description 1
- -1 for example Chemical compound 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000002087 whitening effect Effects 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
- H01L31/02245—Electrode arrangements specially adapted for back-contact solar cells for metallisation wrap-through [MWT] type solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03921—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate including only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0463—PV modules composed of a plurality of thin film solar cells deposited on the same substrate characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
- H01L31/0465—PV modules composed of a plurality of thin film solar cells deposited on the same substrate comprising particular structures for the electrical interconnection of adjacent PV cells in the module
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/054—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means
- H01L31/056—Optical elements directly associated or integrated with the PV cell, e.g. light-reflecting means or light-concentrating means the light-reflecting means being of the back surface reflector [BSR] type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/52—PV systems with concentrators
Landscapes
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Photovoltaic Devices (AREA)
Description
図1−1は、本発明の実施の形態1にかかる薄膜太陽電池である薄膜太陽電池モジュール(以下、モジュールと呼ぶ)10の概略構成を示す平面図である。図1−2は、モジュール10を構成する薄膜太陽電池セル(以下、セルと呼ぶ場合がある)1の短手向における断面構造を説明するための図であり、図1−1の線分A−A’方向における要部断面図である。
Ag−1.5at%Mo組成の合金ターゲットを用い、不活性ガスであるアルゴン(Ar)ガスに窒素(N2)ガスを分圧比で1.5%以上12%以下まで振り分けて添加した混合ガスのプラズマ雰囲気下でスパッタリングを実施し、窒素を含有するAg−Mo−N合金膜を200nmの膜厚で成膜作製した。作製したサンプルの組成を、誘導結合プラズマ(Induced Coupled Plasma;略称:ICP)発光分析法およびX線光電子分光(X−ray Photoelectron Spectroscopy;略称:XPS)法で分析したところ、いずれのサンプルでもモリブデン組成比は1.5at%Moであった。窒素組成比は、混合ガスの窒素(N2)ガス分圧比に対応して、1.3at%以上5.5at%以下の間で変化していた。また窒素原子は、膜中にほぼ均一の濃度で存在していた。
以下の実施例では、特に言及しない限り、前述の製造例と同様にして、種々の添加元素を含む合金ターゲットを用いて、窒素含有率を変化させて窒素を含有するAg合金膜を形成した。また比較例では、ターゲットおよび雰囲気ガスを変更すること以外は、前述の製造例と同様にして、Ag膜およびAg合金膜を形成した。
本試験例では、Ag膜ならびにAg合金膜について、成膜後に、大気中において、種々のアニール温度で30分間保持するアニール処理を実施し、膜表面の反射率値とアニール温度との関係を評価した。
本試験例では、窒素含有率が異なる各種のAg−Mo−N合金膜について、250℃で30分間アニール処理した後の可視光領域における分光反射率を測定した。ここで、「可視光領域」とは、波長が350nm以上850nm以下の領域をいい、太陽光のスペクトル中に多く含まれる波長の領域である。太陽電池の反射電極は、これらの波長での反射率が高いことが望ましい。本試験例では、Ag膜、および窒素に代えて酸素を添加したAg−Mo−O合金膜についても同様にして分光反射率を測定した。
本試験例では、Ag合金膜中の窒素組成比、すなわち窒素含有率を変化させて、各窒素含有率のAg合金膜について、反射率を測定し、窒素含有率と反射率との関係を評価した。本試験例では、窒素に代えて酸素を添加したAg−Mo−O合金膜についても同様にして評価した。
本試験例では、Ag合金膜中の窒素組成比、すなわち窒素含有率を変化させて、各窒素含有率のAg合金膜について、比抵抗値を測定し、窒素含有率と比抵抗との関係を評価した。本試験例では、窒素に代えて酸素を添加したAg−Mo−O合金膜についても同様にして評価した。
本試験例では、Ag膜ならびにAg合金膜について、成膜後に大気中において種々のアニール温度で30分間保持するアニール処理を実施し、比抵抗値とアニール温度との関係を評価した。
本試験例では、上述した実施例および比較例の膜について、ガラス基板との密着性を評価した。まず、表面が平滑な透明性ガラス基板に、ArガスとN2ガスとの混合ガスを用いたスパッタリング法によって、Ag−1.5Mo−N合金膜を200nmの膜厚で成膜した。得られた膜表面に、約18mm×18mmの大きさのセロハンテープ(ニチバン株式会社製)を貼り、それを引き剥がすという実験(テープ引き剥がし試験)を5回試行した。膜の剥離が認められなかった場合を密着性が「良好」と判定し、一度でも膜の剥離が認められた場合を密着性が「不良」と判定した。表4に評価結果を示す。表4では、密着性が「良好」と判定された場合を「○」で示し、密着性が「不良」と判定された場合を「×」で示す。
本実施の形態では、単結晶シリコン基板あるいは多結晶シリコン基板表面を加工することにより得られる太陽電池(以下、シリコン基板型太陽電池と呼ぶ)に本発明を適用した場合について説明する。すなわち、シリコン基板からなる光電変換層を有し、当該光電変換層を通り抜けた光を再度光電変換層に反射するための反射層部分に本発明の技術を適用した例について説明する。
2 透光性絶縁基板(ガラス基板)
3 透明電極層
3a 凹凸
4 光電変換層
5 裏面電極層
5a 透明導電性金属化合物層
5b 反射電極層
6 アンダーコート層
10 モジュール
D1 第1の溝
D2 第2の溝(接続溝)
D3 第3の溝(分離溝)
20 シリコン基板型太陽電池
21 半導体基板
22 p型(第1の導電型)シリコン層
22a テクスチャー構造
23 n型(第2の導電型)不純物拡散層
24 反射防止膜
25 受光面側電極
25a 銀ペースト
27 p+層
Claims (10)
- 光を電気に変換する光電変換層と、前記光電変換層における光入射側と反対側に設けられて前記光電変換層を通過した光を前記光電変換層側に反射させる反射電極と、を備えた太陽電池であって、
前記反射電極は、銀を主成分として窒素を含有してなる金属層を前記光電変換層側に有し、
前記金属層における窒素の含有率が、2.5at%以上、5at%以下であること、
を特徴とする太陽電池。 - 前記金属層は、前記反射電極における前記光電変換層側に50nm以上の厚みで形成されていること、
を特徴とする請求項1に記載の太陽電池。 - 前記金属層における窒素の含有率が、2.5at%以上、3.5at%以下であること、
を特徴とする請求項1または2に記載の太陽電池。 - 前記金属層は、添加成分としてマグネシウム、チタン、クロム、銅、モリブデン、パラジウム、白金および金から選ばれる1種類以上の元素を含むこと、
を特徴とする請求項1〜3のいずれか1つに記載の太陽電池。 - 光を電気に変換する光電変換層と、前記光電変換層における光入射側と反対側に設けられて前記光電変換層を通過した光を前記光電変換層側に反射させる反射電極と、を備えた太陽電池の製造方法であって、
前記光電変換層を形成する光電変換層工程と、
前記光電変換層における光入射側と反対側に、銀を主成分として窒素を含有してなる金属層を前記光電変換層側に有する反射電極を形成する反射電極形成工程と、
を含み、
前記金属層における窒素の含有率が、2.5at%以上、5at%以下であること、
を特徴とする太陽電池の製造方法。 - 前記反射電極形成工程では、前記金属層を前記反射電極における前記光電変換層側に50nm以上の厚みで形成すること、
を特徴とする請求項5に記載の太陽電池の製造方法。 - 前記反射電極形成工程は、窒素ガスのプラズマ雰囲気下において前記光電変換層上に銀(Ag)を堆積して前記金属層を形成する金属層形成工程を有すること、
を特徴とする請求項5または6に記載の太陽電池の製造方法。 - 前記金属層形成工程では、窒素ガスを含有するガスを供給しながら銀(Ag)を主成分とするターゲットを用いたスパッタリング法により前記金属層を形成すること、
を特徴とする請求項7に記載の太陽電池の製造方法。 - 前記金属層をアニールする工程を有すること、
を特徴とする請求項5〜8のいずれか1つに記載の太陽電池の製造方法。 - 前記金属層を200℃〜300℃の温度でアニールすること、
を特徴とする請求項9に記載の太陽電池の製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2009/065500 WO2011027459A1 (ja) | 2009-09-04 | 2009-09-04 | 太陽電池およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011027459A1 JPWO2011027459A1 (ja) | 2013-01-31 |
JP5362016B2 true JP5362016B2 (ja) | 2013-12-11 |
Family
ID=43649021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011529749A Expired - Fee Related JP5362016B2 (ja) | 2009-09-04 | 2009-09-04 | 太陽電池およびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8841541B2 (ja) |
JP (1) | JP5362016B2 (ja) |
CN (1) | CN102484149B (ja) |
WO (1) | WO2011027459A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10272010B2 (en) | 2015-03-20 | 2019-04-30 | Zoll Medical Corporation | Systems and methods for testing a medical device |
US11709747B2 (en) | 2016-01-08 | 2023-07-25 | Zoll Medical Corporation | Patient assurance system and method |
US11617538B2 (en) | 2016-03-14 | 2023-04-04 | Zoll Medical Corporation | Proximity based processing systems and methods |
US10426342B2 (en) | 2016-03-31 | 2019-10-01 | Zoll Medical Corporation | Remote access for ambulatory medical device |
JP7147669B2 (ja) * | 2019-04-09 | 2022-10-05 | 日本電信電話株式会社 | 半導体受光素子 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0677510A (ja) * | 1992-08-24 | 1994-03-18 | Canon Inc | 光起電力素子 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2999867B2 (ja) | 1991-11-07 | 2000-01-17 | シャープ株式会社 | 太陽電池およびその製造方法 |
JPH09162430A (ja) | 1995-12-12 | 1997-06-20 | Mitsui Toatsu Chem Inc | 導電性光反射体 |
US6172296B1 (en) * | 1996-05-17 | 2001-01-09 | Canon Kabushiki Kaisha | Photovoltaic cell |
JPH10133597A (ja) | 1996-07-26 | 1998-05-22 | Canon Inc | 配線基板、該配線基板の製造方法、該配線基板を備えた液晶素子及び該液晶素子の製造方法 |
JPH1126787A (ja) | 1997-07-08 | 1999-01-29 | Kanegafuchi Chem Ind Co Ltd | 薄膜太陽電池 |
JPH11158613A (ja) | 1997-12-01 | 1999-06-15 | Canon Inc | 電極基板、及び該電極基板の製造方法 |
JP2002110678A (ja) | 2000-09-29 | 2002-04-12 | Matsushita Electric Ind Co Ltd | Ag系合金とAg系合金薄膜、およびそれを用いた薄膜トランジスタ、薄膜トランジスタアレイとそれらの製造方法 |
JP3656898B2 (ja) | 2001-01-31 | 2005-06-08 | 日立金属株式会社 | 平面表示装置用Ag合金系反射膜 |
JP4646415B2 (ja) | 2001-02-08 | 2011-03-09 | 株式会社倉元製作所 | Ag系薄膜 |
DE10248927C5 (de) * | 2002-10-15 | 2013-10-31 | Zentrum für Sonnenenergie- und Wasserstoff-Forschung Baden-Württemberg | Dünnschichtsolarzelle mit elektrischer Molybdän-Kontaktschicht und Herstellungsverfahren |
CN1941426A (zh) * | 2005-09-26 | 2007-04-04 | 中芯国际集成电路制造(上海)有限公司 | N-型硅片上制造太阳能电池的方法 |
US9147778B2 (en) * | 2006-11-07 | 2015-09-29 | First Solar, Inc. | Photovoltaic devices including nitrogen-containing metal contact |
CN101236997A (zh) * | 2007-01-29 | 2008-08-06 | 北京行者多媒体科技有限公司 | 薄膜硅太阳能电池的背接触层 |
-
2009
- 2009-09-04 US US13/394,023 patent/US8841541B2/en not_active Expired - Fee Related
- 2009-09-04 CN CN200980161223.3A patent/CN102484149B/zh not_active Expired - Fee Related
- 2009-09-04 JP JP2011529749A patent/JP5362016B2/ja not_active Expired - Fee Related
- 2009-09-04 WO PCT/JP2009/065500 patent/WO2011027459A1/ja active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0677510A (ja) * | 1992-08-24 | 1994-03-18 | Canon Inc | 光起電力素子 |
Also Published As
Publication number | Publication date |
---|---|
CN102484149B (zh) | 2015-06-10 |
CN102484149A (zh) | 2012-05-30 |
WO2011027459A1 (ja) | 2011-03-10 |
US8841541B2 (en) | 2014-09-23 |
JPWO2011027459A1 (ja) | 2013-01-31 |
US20120160319A1 (en) | 2012-06-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10090428B2 (en) | Solar cell and method for manufacturing the same | |
RU2435251C2 (ru) | Передний электрод со слоем тонкой металлической пленки и буферным слоем с высокой работой выхода для применения в фотоэлектрическом приборе и способ получения таковых | |
CN103907205B (zh) | 光电变换装置及其制造方法、以及光电变换模块 | |
WO2010119512A1 (ja) | 光起電力装置とその製造方法 | |
TW201203588A (en) | Solar cell including sputtered reflective layer and method of manufacture thereof | |
US8987587B2 (en) | Metal barrier-doped metal contact layer | |
EP3474333B1 (en) | Solar cell and production method therefor, and solar cell module | |
AU2012203184A1 (en) | Refractive index matching of thin film layers for photovoltaic devices and methods of their manufacture | |
JP5362016B2 (ja) | 太陽電池およびその製造方法 | |
KR20130033348A (ko) | 광기전력 전지 | |
JP5425224B2 (ja) | 太陽電池およびその製造方法 | |
JP2008270562A (ja) | 多接合型太陽電池 | |
US9184320B2 (en) | Photoelectric conversion device | |
US20140238478A1 (en) | Back junction solar cell with enhanced emitter layer | |
TWI415280B (zh) | Light power device and manufacturing method thereof | |
JP2001203376A (ja) | 太陽電池 | |
EP2293344A1 (en) | Solar cell and method for manufacturing the same | |
JP2011119480A (ja) | 薄膜太陽電池の製造方法 | |
JP2007273635A (ja) | 光電変換装置 | |
JP6143520B2 (ja) | 結晶シリコン系太陽電池およびその製造方法 | |
JP5056651B2 (ja) | 薄膜太陽電池及び薄膜太陽電池用表面電極 | |
JP5501549B2 (ja) | 光電変換素子、およびそれから構成される光電変換モジュール | |
WO2010087312A1 (ja) | 薄膜光電変換装置およびその製造方法 | |
TWI493742B (zh) | 利用單步摻雜製程之射極穿透式背電極太陽電池之製造方法 | |
JP2009194386A (ja) | 光起電モジュールおよびその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20121120 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130118 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130806 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130903 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |