JP5361114B2 - 基板導通を利用した積重ねダイ式の構成をもつ集積回路 - Google Patents

基板導通を利用した積重ねダイ式の構成をもつ集積回路 Download PDF

Info

Publication number
JP5361114B2
JP5361114B2 JP2005358376A JP2005358376A JP5361114B2 JP 5361114 B2 JP5361114 B2 JP 5361114B2 JP 2005358376 A JP2005358376 A JP 2005358376A JP 2005358376 A JP2005358376 A JP 2005358376A JP 5361114 B2 JP5361114 B2 JP 5361114B2
Authority
JP
Japan
Prior art keywords
integrated circuit
substrate
die
power supply
stacked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005358376A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006173615A5 (https=
JP2006173615A (ja
Inventor
ジョン ガバラ ザデウス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agere Systems LLC
Original Assignee
Agere Systems LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agere Systems LLC filed Critical Agere Systems LLC
Publication of JP2006173615A publication Critical patent/JP2006173615A/ja
Publication of JP2006173615A5 publication Critical patent/JP2006173615A5/ja
Application granted granted Critical
Publication of JP5361114B2 publication Critical patent/JP5361114B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/59Bond pads specially adapted therefor
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/879Bump connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/851Dispositions of multiple connectors or interconnections
    • H10W72/874On different surfaces
    • H10W72/884Die-attach connectors and bond wires
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/921Structures or relative sizes of bond pads
    • H10W72/926Multiple bond pads having different sizes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/10Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/15Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/20Configurations of stacked chips
    • H10W90/24Configurations of stacked chips at least one of the stacked chips being laterally offset from a neighbouring stacked chip, e.g. chip stacks having a staircase shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/722Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/732Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/754Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
JP2005358376A 2004-12-13 2005-12-13 基板導通を利用した積重ねダイ式の構成をもつ集積回路 Expired - Fee Related JP5361114B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/010,721 US7400047B2 (en) 2004-12-13 2004-12-13 Integrated circuit with stacked-die configuration utilizing substrate conduction
US11/010,721 2004-12-13

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012207994A Division JP2013033981A (ja) 2004-12-13 2012-09-21 基板導通を利用した積重ねダイ式の構成をもつ集積回路

Publications (3)

Publication Number Publication Date
JP2006173615A JP2006173615A (ja) 2006-06-29
JP2006173615A5 JP2006173615A5 (https=) 2008-10-02
JP5361114B2 true JP5361114B2 (ja) 2013-12-04

Family

ID=36582845

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2005358376A Expired - Fee Related JP5361114B2 (ja) 2004-12-13 2005-12-13 基板導通を利用した積重ねダイ式の構成をもつ集積回路
JP2012207994A Pending JP2013033981A (ja) 2004-12-13 2012-09-21 基板導通を利用した積重ねダイ式の構成をもつ集積回路

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012207994A Pending JP2013033981A (ja) 2004-12-13 2012-09-21 基板導通を利用した積重ねダイ式の構成をもつ集積回路

Country Status (2)

Country Link
US (1) US7400047B2 (https=)
JP (2) JP5361114B2 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7623365B2 (en) 2007-08-29 2009-11-24 Micron Technology, Inc. Memory device interface methods, apparatus, and systems
US8106520B2 (en) 2008-09-11 2012-01-31 Micron Technology, Inc. Signal delivery in stacked device
US8063491B2 (en) * 2008-09-30 2011-11-22 Micron Technology, Inc. Stacked device conductive path connectivity
CN202758883U (zh) 2009-05-26 2013-02-27 拉姆伯斯公司 堆叠的半导体器件组件
KR102526614B1 (ko) * 2017-10-31 2023-04-27 엘지디스플레이 주식회사 게이트 드라이버와 이를 포함한 전계 발광 표시장치

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5655067A (en) * 1979-10-11 1981-05-15 Matsushita Electric Ind Co Ltd Semiconductor integrated circuit device
DE3786314D1 (de) * 1986-09-23 1993-07-29 Siemens Ag Halbleiterbauelemente mit leistungs-mosfet und steuerschaltung.
US4947228A (en) * 1988-09-20 1990-08-07 At&T Bell Laboratories Integrated circuit power supply contact
JPH03120052U (https=) * 1990-03-23 1991-12-10
JPH0586216A (ja) * 1991-09-27 1993-04-06 Tonen Chem Corp 多孔性プラスチツクフイルムの製造方法
US5532512A (en) * 1994-10-03 1996-07-02 General Electric Company Direct stacked and flip chip power semiconductor device structures
US5731709A (en) * 1996-01-26 1998-03-24 Motorola, Inc. Method for testing a ball grid array semiconductor device and a device for such testing
US5973396A (en) * 1996-02-16 1999-10-26 Micron Technology, Inc. Surface mount IC using silicon vias in an area array format or same size as die array
DE19635582C1 (de) * 1996-09-02 1998-02-19 Siemens Ag Leistungs-Halbleiterbauelement für Brückenschaltungen mit High- bzw. Low-Side-Schaltern
JPH10223835A (ja) * 1997-02-05 1998-08-21 Hitachi Ltd 半導体装置とその製造方法
US6184585B1 (en) * 1997-11-13 2001-02-06 International Rectifier Corp. Co-packaged MOS-gated device and control integrated circuit
JP3563604B2 (ja) * 1998-07-29 2004-09-08 株式会社東芝 マルチチップ半導体装置及びメモリカード
US6122187A (en) * 1998-11-23 2000-09-19 Micron Technology, Inc. Stacked integrated circuits
KR20000057810A (ko) * 1999-01-28 2000-09-25 가나이 쓰토무 반도체 장치
US6586266B1 (en) * 1999-03-01 2003-07-01 Megic Corporation High performance sub-system design and assembly
JP3779524B2 (ja) * 2000-04-20 2006-05-31 株式会社東芝 マルチチップ半導体装置及びメモリカード
US6444576B1 (en) * 2000-06-16 2002-09-03 Chartered Semiconductor Manufacturing, Ltd. Three dimensional IC package module
US6594153B1 (en) * 2000-06-27 2003-07-15 Intel Corporation Circuit package for electronic systems
US20020074637A1 (en) * 2000-12-19 2002-06-20 Intel Corporation Stacked flip chip assemblies
US6635970B2 (en) * 2002-02-06 2003-10-21 International Business Machines Corporation Power distribution design method for stacked flip-chip packages
JP2005011986A (ja) * 2003-06-19 2005-01-13 Sanyo Electric Co Ltd 半導体装置
TW200522293A (en) 2003-10-01 2005-07-01 Koninkl Philips Electronics Nv Electrical shielding in stacked dies by using conductive die attach adhesive
US7422930B2 (en) 2004-03-02 2008-09-09 Infineon Technologies Ag Integrated circuit with re-route layer and stacked die assembly
US7129572B2 (en) * 2004-08-18 2006-10-31 Chung-Cheng Wang Submember mounted on a chip of electrical device for electrical connection

Also Published As

Publication number Publication date
JP2006173615A (ja) 2006-06-29
US20060125069A1 (en) 2006-06-15
JP2013033981A (ja) 2013-02-14
US7400047B2 (en) 2008-07-15

Similar Documents

Publication Publication Date Title
CN112771655B (zh) 半导体集成电路装置以及半导体封装件构造
CN203882995U (zh) 半导体组件
KR102592640B1 (ko) 반도체 패키지 및 반도체 패키지의 제조 방법
CN101582403B (zh) 以夹在金属层之间的倒装管芯为特征的半导体封装
KR101968396B1 (ko) 여분의 전기 커넥터들을 갖는 상호연결 구조 및 관련 시스템들 및 방법들
JP4970979B2 (ja) 半導体装置
CN212230426U (zh) 集成电路装置
US9997513B1 (en) Package including a plurality of stacked semiconductor devices having area efficient ESD protection
CN104350595A (zh) 克服分划板区域限制的大型硅中介板
JP2004207723A (ja) フリップチップfet素子
TWI356480B (en) Semiconductor package substrate
JP2009527120A (ja) 集積回路における静電放電保護回路及び方法
CN103295990A (zh) 半导体器件和制造半导体器件的方法
JP2006210777A (ja) 半導体装置
JP2013033981A (ja) 基板導通を利用した積重ねダイ式の構成をもつ集積回路
TWI566366B (zh) 晶片的電源/接地佈局
JPH0575017A (ja) 直接式マイクロ回路の減結合装置
WO2005086216A1 (ja) 半導体素子及び半導体素子の製造方法
JP4776861B2 (ja) 半導体装置
KR101355274B1 (ko) 집적 회로 및 그 형성 방법
TWI663696B (zh) 於半導體裝置中形成為金屬線互連之凸塊連結
US10014267B2 (en) Semiconductor device and method of manufacturing the same
US9721928B1 (en) Integrated circuit package having two substrates
CN103794599A (zh) 半导体装置
JP7730046B2 (ja) 半導体集積回路装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080818

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080818

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111024

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111027

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20120124

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20120127

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120424

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20120521

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130709

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20130903

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees