JP5349024B2 - 光学装置および光学装置の製造方法 - Google Patents
光学装置および光学装置の製造方法 Download PDFInfo
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- JP5349024B2 JP5349024B2 JP2008305984A JP2008305984A JP5349024B2 JP 5349024 B2 JP5349024 B2 JP 5349024B2 JP 2008305984 A JP2008305984 A JP 2008305984A JP 2008305984 A JP2008305984 A JP 2008305984A JP 5349024 B2 JP5349024 B2 JP 5349024B2
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- 239000004020 conductor Substances 0.000 claims description 25
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- 239000002241 glass-ceramic Substances 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 20
- 239000000843 powder Substances 0.000 description 18
- 238000000034 method Methods 0.000 description 15
- 239000000919 ceramic Substances 0.000 description 10
- 239000002131 composite material Substances 0.000 description 9
- 238000010304 firing Methods 0.000 description 6
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- 229910000679 solder Inorganic materials 0.000 description 6
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- 229910052878 cordierite Inorganic materials 0.000 description 4
- JSKIRARMQDRGJZ-UHFFFAOYSA-N dimagnesium dioxido-bis[(1-oxido-3-oxo-2,4,6,8,9-pentaoxa-1,3-disila-5,7-dialuminabicyclo[3.3.1]nonan-7-yl)oxy]silane Chemical compound [Mg++].[Mg++].[O-][Si]([O-])(O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2)O[Al]1O[Al]2O[Si](=O)O[Si]([O-])(O1)O2 JSKIRARMQDRGJZ-UHFFFAOYSA-N 0.000 description 4
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- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- 229910020220 Pb—Sn Inorganic materials 0.000 description 2
- CNLWCVNCHLKFHK-UHFFFAOYSA-N aluminum;lithium;dioxido(oxo)silane Chemical compound [Li+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O CNLWCVNCHLKFHK-UHFFFAOYSA-N 0.000 description 2
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- 125000006850 spacer group Chemical group 0.000 description 2
- 229910000500 β-quartz Inorganic materials 0.000 description 2
- 229910052644 β-spodumene Inorganic materials 0.000 description 2
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- 229910007637 SnAg Inorganic materials 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical class O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/007—Interconnections between the MEMS and external electrical signals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00317—Packaging optical devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
Description
図4は、光学装置1の構成例を示す図であり、(a)は平面透視図、(b)は、(a)のA−A線における断面図である。図4に示すように、本発明の実施の形態による光学装置1は、表面に光MEMS2が設けられた素子基板3と、素子基板3の光MEMS2が設けられた表面に接続され、光MEMS2に対応する位置に貫通孔4を有する配線基板5と、貫通孔4を覆うように配線基板5に接続された光透過性部材6とを有する。ここで、光透過性部材6は、配線基板5に封止部材7を介して接続される。これにより、光MEMS2は、気密封止される。素子基板3は、例えば半導体基板であり、その表面に、マイクロマシニング技術を用いることにより光MEMS2が形成されている。
2 光MEMS
3 素子基板
4 貫通孔
5 配線基板
6 透光性部材
7 封止部材
8 外部接続端子
9 絶縁基板
10 配線導体
Claims (2)
- 表面に光MEMS素子が設けられた素子基板と、
前記素子基板の前記光MEMS素子が設けられた表面に接続され、前記光MEMS素子に対応する位置に貫通孔を有する配線基板と、
前記貫通孔を覆うように封止部材によって前記配線基板の表面に接続された光透過性部材と、
前記光透過性部材が接続された前記配線基板の前記表面に設けられており、前記配線基板に電気的に接続された外部接続端子とを備えており、
前記配線基板が前記表面に段差を有しており、前記配線基板の前記表面のうち前記外部接続端子が設けられた部分から前記素子基板までの距離が、前記配線基板の前記表面のうち前記封止部材が設けられた部分から前記素子基板までの距離よりも小さいことを特徴とする光学装置。 - 前記配線基板は、絶縁層が積層されてなる積層体と、前記積層体の内部に設けられた配線導体とを有する請求項1に記載の光学装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008305984A JP5349024B2 (ja) | 2007-11-29 | 2008-12-01 | 光学装置および光学装置の製造方法 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007308274 | 2007-11-29 | ||
JP2007308274 | 2007-11-29 | ||
JP2008305984A JP5349024B2 (ja) | 2007-11-29 | 2008-12-01 | 光学装置および光学装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009151297A JP2009151297A (ja) | 2009-07-09 |
JP5349024B2 true JP5349024B2 (ja) | 2013-11-20 |
Family
ID=40678694
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009543901A Expired - Fee Related JP5292307B2 (ja) | 2007-11-29 | 2008-12-01 | 光学装置、封止用基板および光学装置の製造方法 |
JP2008305984A Expired - Fee Related JP5349024B2 (ja) | 2007-11-29 | 2008-12-01 | 光学装置および光学装置の製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009543901A Expired - Fee Related JP5292307B2 (ja) | 2007-11-29 | 2008-12-01 | 光学装置、封止用基板および光学装置の製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8204352B2 (ja) |
EP (1) | EP2239619A4 (ja) |
JP (2) | JP5292307B2 (ja) |
WO (1) | WO2009069807A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013217146A1 (de) * | 2013-08-28 | 2015-03-05 | Carl Zeiss Smt Gmbh | Optisches Bauelement |
JP6279857B2 (ja) * | 2013-08-29 | 2018-02-14 | 京セラ株式会社 | 電子装置、多数個取り枠体および多数個取り電子装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3207319B2 (ja) * | 1993-05-28 | 2001-09-10 | 株式会社東芝 | 光電変換装置及びその製造方法 |
EP0630056B1 (en) * | 1993-05-28 | 1998-02-18 | Toshiba Ave Co., Ltd | Use of anisotropically conductive film for connecting leads of wiring board with electrode pads of photoelectric converting device and mounting method of the device |
US6507082B2 (en) * | 2000-02-22 | 2003-01-14 | Texas Instruments Incorporated | Flip-chip assembly of protected micromechanical devices |
US6661084B1 (en) * | 2000-05-16 | 2003-12-09 | Sandia Corporation | Single level microelectronic device package with an integral window |
JP2002076313A (ja) * | 2000-08-28 | 2002-03-15 | Canon Inc | 固体撮像装置 |
JP2002141430A (ja) * | 2000-10-31 | 2002-05-17 | Kyocera Corp | デジタルマイクロミラーデバイス収納用パッケージ |
JP4342174B2 (ja) * | 2002-12-27 | 2009-10-14 | 新光電気工業株式会社 | 電子デバイス及びその製造方法 |
JP4505189B2 (ja) * | 2003-03-24 | 2010-07-21 | 富士フイルム株式会社 | 透過型光変調装置及びその実装方法 |
US20040232535A1 (en) | 2003-05-22 | 2004-11-25 | Terry Tarn | Microelectromechanical device packages with integral heaters |
JP4170950B2 (ja) * | 2003-10-10 | 2008-10-22 | 松下電器産業株式会社 | 光学デバイスおよびその製造方法 |
JP4686134B2 (ja) * | 2004-04-26 | 2011-05-18 | パナソニック株式会社 | 光学デバイスおよびその製造方法 |
KR100815350B1 (ko) * | 2005-04-01 | 2008-03-19 | 삼성전기주식회사 | 광변조기 모듈 패키지 구조 |
JP2006301153A (ja) * | 2005-04-19 | 2006-11-02 | Sony Corp | 回折格子−光変調装置組立体 |
US8008739B2 (en) * | 2005-12-26 | 2011-08-30 | Kyocera Corporation | Microelectromechanical apparatus and method for producing the same |
US8138588B2 (en) * | 2006-12-21 | 2012-03-20 | Texas Instruments Incorporated | Package stiffener and a packaged device using the same |
-
2008
- 2008-12-01 JP JP2009543901A patent/JP5292307B2/ja not_active Expired - Fee Related
- 2008-12-01 JP JP2008305984A patent/JP5349024B2/ja not_active Expired - Fee Related
- 2008-12-01 EP EP08853336.9A patent/EP2239619A4/en not_active Withdrawn
- 2008-12-01 WO PCT/JP2008/071829 patent/WO2009069807A1/ja active Application Filing
- 2008-12-01 US US12/745,634 patent/US8204352B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP5292307B2 (ja) | 2013-09-18 |
JP2009151297A (ja) | 2009-07-09 |
EP2239619A1 (en) | 2010-10-13 |
US20100310216A1 (en) | 2010-12-09 |
JPWO2009069807A1 (ja) | 2011-04-21 |
US8204352B2 (en) | 2012-06-19 |
WO2009069807A1 (ja) | 2009-06-04 |
EP2239619A4 (en) | 2013-04-24 |
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