WO2009069807A1 - 光学装置、封止用基板および光学装置の製造方法 - Google Patents

光学装置、封止用基板および光学装置の製造方法 Download PDF

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Publication number
WO2009069807A1
WO2009069807A1 PCT/JP2008/071829 JP2008071829W WO2009069807A1 WO 2009069807 A1 WO2009069807 A1 WO 2009069807A1 JP 2008071829 W JP2008071829 W JP 2008071829W WO 2009069807 A1 WO2009069807 A1 WO 2009069807A1
Authority
WO
WIPO (PCT)
Prior art keywords
optical device
optical element
wiring board
sealing board
board
Prior art date
Application number
PCT/JP2008/071829
Other languages
English (en)
French (fr)
Inventor
Toshihiko Maeda
Original Assignee
Kyocera Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corporation filed Critical Kyocera Corporation
Priority to EP08853336.9A priority Critical patent/EP2239619A4/en
Priority to US12/745,634 priority patent/US8204352B2/en
Priority to JP2009543901A priority patent/JP5292307B2/ja
Publication of WO2009069807A1 publication Critical patent/WO2009069807A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/007—Interconnections between the MEMS and external electrical signals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00317—Packaging optical devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10—Bump connectors; Manufacturing methods related thereto
    • H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161—Disposition
    • H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00011—Not relevant to the scope of the group, the symbol of which is combined with the symbol of this group
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/146—Mixed devices
    • H01L2924/1461—MEMS

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Light Receiving Elements (AREA)
  • Led Device Packages (AREA)

Abstract

　光学装置は、表面に光学素子２が設けられた素子基板３と、光学素子２に対向して配置された配線基板４と、素子基板３と配線基板４との間に設けられた封止部材５および導電性部材６を有する。封止部材５は、光学素子２を取り囲んで気密封止する。導電性部材６は、光学素子２と配線基板４とを電気的に接続する。配線基板４は、光学素子２に対して光を透過する光透過領域を有する。
PCT/JP2008/071829 2007-11-29 2008-12-01 光学装置、封止用基板および光学装置の製造方法 WO2009069807A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08853336.9A EP2239619A4 (en) 2007-11-29 2008-12-01 OPTICAL ARRANGEMENT, SEAL PLATE AND METHOD FOR PRODUCING AN OPTICAL ARRANGEMENT
US12/745,634 US8204352B2 (en) 2007-11-29 2008-12-01 Optical apparatus, sealing substrate, and method of manufacturing optical apparatus
JP2009543901A JP5292307B2 (ja) 2007-11-29 2008-12-01 光学装置、封止用基板および光学装置の製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-308274 2007-11-29
JP2007308274 2007-11-29

Publications (1)

Publication Number Publication Date
WO2009069807A1 true WO2009069807A1 (ja) 2009-06-04

Family

ID=40678694

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071829 WO2009069807A1 (ja) 2007-11-29 2008-12-01 光学装置、封止用基板および光学装置の製造方法

Country Status (4)

Country Link
US (1) US8204352B2 (ja)
EP (1) EP2239619A4 (ja)
JP (2) JP5349024B2 (ja)
WO (1) WO2009069807A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015046552A (ja) * 2013-08-29 2015-03-12 京セラ株式会社 電子装置、多数個取り枠体および多数個取り電子装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013217146A1 (de) * 2013-08-28 2015-03-05 Carl Zeiss Smt Gmbh Optisches Bauelement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0799214A (ja) * 1993-05-28 1995-04-11 Toshiba Corp 光電変換素子の実装装置及びその製造方法
JP2002141430A (ja) * 2000-10-31 2002-05-17 Kyocera Corp デジタルマイクロミラーデバイス収納用パッケージ
JP2007528591A (ja) 2003-05-22 2007-10-11 リフレクティヴィティー， インク． 微細構造および半導体デバイスのための新規なパッケージ方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0630056B1 (en) 1993-05-28 1998-02-18 Toshiba Ave Co., Ltd Use of anisotropically conductive film for connecting leads of wiring board with electrode pads of photoelectric converting device and mounting method of the device
US6507082B2 (en) * 2000-02-22 2003-01-14 Texas Instruments Incorporated Flip-chip assembly of protected micromechanical devices
US6661084B1 (en) * 2000-05-16 2003-12-09 Sandia Corporation Single level microelectronic device package with an integral window
JP2002076313A (ja) * 2000-08-28 2002-03-15 Canon Inc 固体撮像装置
JP4342174B2 (ja) * 2002-12-27 2009-10-14 新光電気工業株式会社 電子デバイス及びその製造方法
JP4505189B2 (ja) * 2003-03-24 2010-07-21 富士フイルム株式会社 透過型光変調装置及びその実装方法
JP4170950B2 (ja) * 2003-10-10 2008-10-22 松下電器産業株式会社 光学デバイスおよびその製造方法
JP4686134B2 (ja) * 2004-04-26 2011-05-18 パナソニック株式会社 光学デバイスおよびその製造方法
KR100815350B1 (ko) * 2005-04-01 2008-03-19 삼성전기주식회사 광변조기 모듈 패키지 구조
JP2006301153A (ja) * 2005-04-19 2006-11-02 Sony Corp 回折格子−光変調装置組立体
US8008739B2 (en) * 2005-12-26 2011-08-30 Kyocera Corporation Microelectromechanical apparatus and method for producing the same
US8138588B2 (en) * 2006-12-21 2012-03-20 Texas Instruments Incorporated Package stiffener and a packaged device using the same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0799214A (ja) * 1993-05-28 1995-04-11 Toshiba Corp 光電変換素子の実装装置及びその製造方法
JP2002141430A (ja) * 2000-10-31 2002-05-17 Kyocera Corp デジタルマイクロミラーデバイス収納用パッケージ
JP2007528591A (ja) 2003-05-22 2007-10-11 リフレクティヴィティー， インク． 微細構造および半導体デバイスのための新規なパッケージ方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015046552A (ja) * 2013-08-29 2015-03-12 京セラ株式会社 電子装置、多数個取り枠体および多数個取り電子装置

Also Published As

Publication number Publication date
JP2009151297A (ja) 2009-07-09
EP2239619A4 (en) 2013-04-24
JP5292307B2 (ja) 2013-09-18
US20100310216A1 (en) 2010-12-09
JP5349024B2 (ja) 2013-11-20
EP2239619A1 (en) 2010-10-13
US8204352B2 (en) 2012-06-19
JPWO2009069807A1 (ja) 2011-04-21

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