JP5343979B2 - 半導体装置、半導体装置の製造方法、半導体装置の製造装置、および半導体装置の評価方法 - Google Patents
半導体装置、半導体装置の製造方法、半導体装置の製造装置、および半導体装置の評価方法 Download PDFInfo
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- JP5343979B2 JP5343979B2 JP2010546521A JP2010546521A JP5343979B2 JP 5343979 B2 JP5343979 B2 JP 5343979B2 JP 2010546521 A JP2010546521 A JP 2010546521A JP 2010546521 A JP2010546521 A JP 2010546521A JP 5343979 B2 JP5343979 B2 JP 5343979B2
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/1026—Compound semiconductors
- H01L2924/1027—IV
- H01L2924/10272—Silicon Carbide [SiC]
Description
(特徴1)ニッケル酸化防止層として金(Au)層を用いている。
(特徴2)アルミニウム含有層としては、アルミニウム−シリコン合金(Al−Si)を用いている。
実施例1では、まずTi層5をスパッタリングによって形成する前に、前処理工程を12時間行った。前処理工程を行った後、スパッタリングチャンバ34に備えられた減圧装置341を用いて、6h減圧(真空引き)を行った。この減圧工程を実施した後のスパッタリングチャンバ34内の酸素分圧は、5×10−6Paであった。実施例1において作製した半導体装置10を35個用いて、クレタリングが発生したサンプルの個数を調べたところ、クレタリングが発生したサンプルは0個であった。
実施例2では、前処理工程を12時間行った後、スパッタリングチャンバ34に備えられた減圧装置341を用いて、9h減圧(真空引き)を行った。この減圧工程を実施した後のスパッタリングチャンバ34内の酸素分圧は、3×10−6Paであった。実施例2において作製した半導体装置10を35個用いて、クレタリングが発生したサンプルの個数を調べたところ、クレタリングが発生したサンプルは0個であった。
比較例では、前処理工程を12時間行った後、スパッタリングチャンバ34に備えられた減圧装置341を用いて、1h減圧(真空引き)を行った。この減圧工程を実施した後のスパッタリングチャンバ34内の酸素分圧は、7×10−6Paであった。比較例において作製した半導体装置10を35個用いて、クレタリングが発生したサンプルの個数を調べたところ、クレタリングが発生したサンプルは6個であった。
Claims (3)
- 半導体基板と、前記半導体基板側からアルミニウム含有層、チタン層、ニッケル層、ニッケル酸化防止層が積層された裏面電極とを備えた半導体装置を製造する装置であって、
スパッタリング装置と、
前記スパッタリング装置のチャンバ内の酸素分圧を検知する検知装置と、
前記チャンバ内の酸素分圧を調整する調整装置と、
前記チタン層をスパッタリングによって成膜するときに、前記検知装置の検知値に基づいて、前記チャンバ内の酸素分圧が3×10 −6 Pa以上かつ5×10−6Pa以下となるように前記調整装置を制御する制御装置と、を備えている製造装置。 - 前記制御装置は、前記検知装置の検知値が、3×10 −6 Pa以上かつ5×10−6Pa以下の範囲で予め設定した閾値以下となった場合に、前記スパッタリング装置がスパッタリングによる前記チタン層の成膜を開始するように制御することを特徴とする請求項1に記載の製造装置。
- 半導体基板と、前記半導体基板側からアルミニウム含有層、チタン層、ニッケル層、ニッケル酸化防止層が積層された裏面電極とを備えた半導体装置の不良判定方法であって、
前記チタン層と前記ニッケル層との界面のチタン層に存在する酸素は、2次イオン質量分析による1秒当りの酸素原子カウント数が2×104以下の範囲で予め設定した閾値以下である場合に、良品と判定することを特徴とする半導体装置の不良判定方法。
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PCT/JP2009/050578 WO2010082342A1 (ja) | 2009-01-16 | 2009-01-16 | 半導体装置、半導体装置の製造方法、半導体装置の製造装置、および半導体装置の評価方法 |
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JPH0521382A (ja) | 1991-07-10 | 1993-01-29 | Sony Corp | スパツタリング装置 |
JP3339552B2 (ja) | 1996-11-27 | 2002-10-28 | 株式会社日立製作所 | 半導体装置及びその製造方法 |
US6106676A (en) * | 1998-04-16 | 2000-08-22 | The Boc Group, Inc. | Method and apparatus for reactive sputtering employing two control loops |
US6362099B1 (en) * | 1999-03-09 | 2002-03-26 | Applied Materials, Inc. | Method for enhancing the adhesion of copper deposited by chemical vapor deposition |
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- 2009-01-16 WO PCT/JP2009/050578 patent/WO2010082342A1/ja active Application Filing
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Patent Citations (8)
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JPS58121674A (ja) * | 1982-01-13 | 1983-07-20 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置の製造方法 |
JPH04226023A (ja) * | 1990-04-16 | 1992-08-14 | Applied Materials Inc | 半導体ウエハにケイ化チタンを形成するための低窒素圧製造方法 |
JPH0737768A (ja) * | 1992-11-26 | 1995-02-07 | Sumitomo Electric Ind Ltd | 半導体ウェハの補強方法及び補強された半導体ウェハ |
JPH09223779A (ja) * | 1996-02-16 | 1997-08-26 | Texas Instr Japan Ltd | 強誘電体キャパシタ、配線、半導体装置及びこれらの製造方法 |
JP2000077359A (ja) * | 1998-09-02 | 2000-03-14 | Matsushita Electronics Industry Corp | 半導体装置及び半導体装置の製造方法 |
JP2002075872A (ja) * | 2000-08-24 | 2002-03-15 | Shibaura Mechatronics Corp | 真空処理装置 |
JP2006156910A (ja) * | 2004-12-01 | 2006-06-15 | Denso Corp | 半導体装置 |
JP2007335431A (ja) * | 2006-06-12 | 2007-12-27 | Toyota Motor Corp | 半導体装置とその製造方法 |
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US20110240846A1 (en) | 2011-10-06 |
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WO2010082342A1 (ja) | 2010-07-22 |
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