JP5331322B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5331322B2 JP5331322B2 JP2007243218A JP2007243218A JP5331322B2 JP 5331322 B2 JP5331322 B2 JP 5331322B2 JP 2007243218 A JP2007243218 A JP 2007243218A JP 2007243218 A JP2007243218 A JP 2007243218A JP 5331322 B2 JP5331322 B2 JP 5331322B2
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- semiconductor device
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- semiconductor element
- connection
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Description
(1)部材に半導体素子が搭載された半導体装置であって、前記部材と前記半導体素子とを接続する第一の接続部は、前記部材上に形成された第一のNi系層と、前記第一のNi系層上に形成されたCu−Ni−Sn化合物を主体とする第一の金属間化合物層と、前記第一の金属間化合物層と前記半導体素子との間に形成されたSn系はんだ層と、を有することを特徴とする半導体装置である。
(2)(1)記載の半導体装置であって、前記第一の接続部は、前記部材上に形成された前記第一のNi系層と前記半導体素子とをSn-(1〜10)mass%Cu-(0.05〜0.5)mass%Niはんだで接続してなることを特徴とする半導体装置である。
(3)半導体素子と、前記半導体素子の第一の面と第一の緩衝材を介して接続された支持電極体と、前記半導体素子の第二の面と第二の緩衝材を介して接続されたリード電極と、を有する半導体装置であって、前記半導体素子の第一の面と前記第一の緩衝材とを接続する第一の接続部は、前記半導体素子の第一の面上に形成された第一のNi系層と、前記第一のNi系層上に形成されたCu-Ni-Sn化合物を主体とする第一の金属間化合物層と、前記第一の金属間化合物層と前記第一の緩衝材との間に形成されたSn系はんだ層と、を有することを特徴とする半導体装置である。
(4)(3)記載の半導体装置であって、前記第一の接続部は、前記半導体素子の第一の面上に形成された前記第一のNi系層と前記第一の緩衝材とをSn-(1〜10)mass%Cu-(0.05〜0.5)mass%Niはんだで接続してなることを特徴とする半導体装置である。
(5)(3)又は(4)記載の半導体装置であって、前記支持電極体と前記第一の緩衝材との接続部は、200℃においてCu6Sn5相を含有するSn系はんだで接続してなることを特徴とする半導体装置である。
(6)(1)記載の半導体装置であって、前記部材は、ベース基板であることを特徴とする半導体装置である。
(7)(1)記載の半導体装置であって、前記部材は、前記半導体素子と電気的に接続されたリードフレームであることを特徴とする半導体装置である。
本発明のはんだ接続部2は、図2の通り、被接続部材12上にめっき等により形成されたNi系層11と、Ni系層11上に形成されたCu-Ni-Sn化合物を主体とした化合物層10と、Sn系はんだ層9とを有して構成される。この構造により、Cu-Ni-Sn化合物を主体とした化合物層10がNi系層11とSn系はんだ層9とのバリア層として機能するため、高温下におかれても界面反応を抑制し、接続界面の化合物層の成長およびそれにともなうボイド形成を抑制することができる。これは、例えば、Ni系層が形成された被接続部材12同士の接続にCu−Ni−Sn化合物相を有するはんだ箔17を用いることで形成される。
図3は、各種の鉛フリーはんだ(Sn-3Ag-0.5Cu、Sn、Sn-3Cu、Sn-5Cu、Sn-7Cu)における200℃放置時間とNiめっき消失厚さの関係を示したものであり、Sn−3Ag−0.5Cuについては高温放置によりNiめっき消失が顕著に進んでいるが、Cu濃度が5mass%以上の場合については、200℃において界面反応はほとんど進んでいない。
それゆえ、Niめっき消失厚さの観点からみると、本発明のはんだ接続部を形成するのに最適なはんだ組成としては、Cu濃度が1mass%より多く10mass%より少ない範囲であり、更に好ましくは5mass%より多く10mass%より少ない範囲である。
上記検討の通り、ボイド発生防止の観点からみると、本発明のはんだ接続部を形成するのに最適なはんだ組成としては、Niを含有させることが有効であり、Ni濃度が0.05mass%より多く0.5mass%より少ない範囲が好ましい。
さらに、Sn系はんだ中のCu-Ni-Sn化合物が晶出、析出あるいは移動してバリア層とする本発明においては、バリア層の厚さははんだに含まれる化合物量に依存するため、これを調整することで最適な厚さのバリア層を容易に形成することが可能である。
本発明の第一の実施形態は、図12に記載の通り、車載用交流発電機に適用される半導体装置であり、Niめっきをした支持電極体4の上に、Sn-(1〜10)mass%Cu-(0.05〜0.5)mass%Niはんだ箔、その上に、Niめっきをした熱膨張率緩衝材(Cu-Mo合金もしくはCu/インバー/Cu複合材)5、Sn-(1〜10)mass%Cu-(0.05〜0.5)mass%Niはんだ箔、Ni-Pめっきをした半導体素子1、Sn-(1〜10)mass%Cu-(0.05〜0.5)mass%Niはんだ箔、Niめっきをした熱膨張率差緩衝材(Mo)6、Sn-(1〜10)mass%Cu-(0.05〜0.5)mass%Niはんだ箔、NiめっきをしたCu板付Cuリード電極体7を積み重ね、位置合わせ治具内に置き、熱処理炉にて、窒素に水素50%を混合した還元性雰囲気で、380℃、4分の温度条件で接続し、続いて接続部周辺にシリコーンゴム8を注入後硬化させて、図2で示したはんだ接続部2、3を有する半導体装置が製造される。
このように、半導体素子の接続部には、大電流に対してボイド生成しにくいSn-(1〜10)mass%Cu-(0.05〜0.5)mass%Niはんだを使用し、その他の接続部には、200℃の高温耐熱を有する図3に記載のSn-5CuのようにCu6Sn5相を多く含有するSn系はんだを用いた場合には、大電流のオン/オフにより生じる半導体素子周辺接続部のボイド抑制効果が高く、200℃における高温放置に対して界面反応抑制効果の高い半導体装置が得られる。
また、その他の熱膨張差緩衝材6としては、Cu/インバー合金/Cu複合材、Cu/Cu2O複合材、Cu-Mo合金、Ti、Mo、Wを用いることもできる。この場合、緩衝材の厚さが30μmより薄い場合、応力を充分に緩衝できず、半導体素子および金属間化合物にクラックが発生する場合があるため、30μm以上が好ましい。
なお、いずれの実施形態においても、Ni系層としてNi、Ni-P、Ni-Bのいずれかを用いればよく、その上にAu、Ag、Pdのうちの少なくとも1つの層が更に形成されていても構わない。Au、Ag、Pdについては、はんだ接続時にはんだ内部に全て拡散させるため、Ni系層上の化合物層形成を阻害することなく、ぬれを向上させることができる。
実施例1〜4の全てにおいて、-40℃(30min.)/200℃(30min.)500サイクルの温度サイクル試験後、初期接続強度の80%以上の強度を維持することを確認した。また、200℃1000hの高温放置試験後も、実験例1〜4の全てにおいて初期接続強度の80%以上の強度を維持することを確認した。更に、これらについては、試験前と試験後で熱抵抗変動が10%以内であることも確認した。電流を35A流し、半導体素子を200℃まで発熱させ、電流を切ることで50℃まで冷却する熱疲労試験10000サイクル後も、熱抵抗変動が初期の200%以内を維持することを確認した。
実験例5〜8の全てにおいて、-40℃(30min.)/200℃(30min.)500サイクルの温度サイクル試験後、初期接続強度の80%以上の強度を維持することを確認した。また、200℃1000hの高温放置試験後も、実験例5〜8の全てにおいて初期接続強度の80%以上の強度を維持することを確認した。更に、これらについては、試験前と試験後で熱抵抗変動が10%以内であることも確認した。電流を35A流し、半導体素子を200℃まで発熱させ、電流を切ることで50℃まで冷却する熱疲労試験10000サイクル後も、熱抵抗変動が初期の200%以内を維持することを確認した。
実験例9において、-40℃(30min.)/200℃(30min.)500サイクルの温度サイクル試験後、初期接続強度の80%以上の強度を維持することを確認した。また、200℃1000hの高温放置試験後も、実験例9において初期接続強度の80%以上の強度を維持することを確認した。更に、これらについては、試験前と試験後で熱抵抗変動が10%以内であることも確認した。電流を35A流し、半導体素子を200℃まで発熱させ、電流を切ることで50℃まで冷却する熱疲労試験10000サイクル後も、熱抵抗変動が初期の200%以内を維持することを確認した。
実験例10〜12の全てにおいて、-40℃(30min.)/200℃(30min.)500サイクルの温度サイクル試験後、初期接続強度の80%以上の強度を維持することを確認した。また、200℃1000hの高温放置試験後も、実験例10〜12の全てにおいて初期接続強度の80%以上の強度を維持することを確認した。更に、これらについては、試験前と試験後で熱抵抗変動が10%以内であることも確認した。電流を35A流し、半導体素子を200℃まで発熱させ、電流を切ることで50℃まで冷却する熱疲労試験10000サイクル後も、熱抵抗変動が初期の200%以内を維持することを確認した。
比較例1〜3において、-40℃(30min.)/200℃(30min.)500サイクルの温度サイクル試験後、初期接続強度の80%以上の強度を維持することを確認した。しかしながら、200℃1000hの高温放置試験後では、比較例1、2ともに初期接続強度の80%未満の強度となった。接続断面を観察すると、図19のようなはんだ層と金属間化合物層13との界面でのボイド14,図20のような金属間化合物層13と被接続部材12との界面でのボイド14が、熱膨張率緩衝材(Cu-Mo合金、Cu/インバー/CuのCu)、支持電極体、リード電極体接続界面に形成されていた。高温放置により界面反応が進み、被接続材のNiめっきが消失して下地のCuが食われ、化合物層の成長に伴う体積変化で生じたボイド形成により、接続強度が低下したと考えられる。さらに、図21に、一例としてSn-3Ag-0.5Cuはんだで接続したサンプルを200℃で1000h高温放置したときの接続界面の断面を示す。Cu-Sn化合物のバリア層が形成されないため、SnとNiが反応してNi層が完全に消失し、更に下地のCuまでもSnと反応しCu-Sn化合物層が厚く形成されている。その結果、大きな体積変化が生じボイドが形成され、良好な接続状況を維持することができなくなる。一方、熱疲労試験においては、半導体素子接続部に図1のようなボイドが多数生成したことにより、熱抵抗が大きく変動したと考えられる。
比較例4、5において、-40℃(30min.)/200℃(30min.)500サイクルの温度サイクル試験および200℃1000hの高温放置試験後ともに、初期接続強度の80%以上の強度を維持することを確認した。しかしながら、熱疲労試験10000サイクル後においては、熱抵抗変動が初期の200%より大きくなった。これは、熱疲労試験において、半導体素子接続部に図5のようなボイドが多数生成したことにより、熱抵抗が大きく変動したと考えられる。
比較例6において、-40℃(30min.)/200℃(30min.)500サイクルの温度サイクル試験および200℃1000hの高温放置試験後ともに、初期接続強度の80%以上の強度を維持することを確認した。しかしながら、熱疲労試験10000サイクル後においては、熱抵抗変動が初期の200%より大きくなった。これは、熱疲労試験において、半導体素子接続部に図5のようなボイドが多数生成したことにより、熱抵抗が大きく変動したと考えられる。
101 表面実装部品、102 プリント基板、103 チップ部品、104 挿入実装部品、105 ワイヤ、106 セラミック、107 Cu配線、108 Cu板、109 ベース基板、110 リードフレーム、111 筐体、112 透光性樹脂、113 フレーム、114 リード、115 モールド樹脂、116 はんだバンプ
Claims (14)
- 部材に半導体素子が搭載された半導体装置であって、
前記部材と前記半導体素子とを接続する第一の接続部は、
前記部材上に形成された第一のNi系層と、
前記第一のNi系層上に形成されたCu-Ni-Sn化合物を主体とする第一の金属間化合
物層と、
前記第一の金属間化合物層と前記半導体素子との間に形成されたSn系はんだ層と、
を有し、
前記第一の接続部のうちの第一の金属間化合物層及びSn系はんだ層は、Sn-(5〜10
)mass%Cu-(0.05〜0.5)mass%Niはんだで構成されており、前記部材上に形成され
た前記第一のNi系層と前記半導体素子とを接続していることを特徴とする半導体装置。 - 請求項1記載の半導体装置であって、
前記部材は、支持電極体であることを特徴とする半導体装置。 - 部材に半導体素子が搭載された半導体装置であって、
前記部材と前記半導体素子との間に、Al、Mg、Ag、Zn、Cu、Ni、Cu/インバー合金/
Cu複合材、Cu/セラミック/Cu、Cu/Cu2O複合材、Cu-Mo合金、Ti、Mo、Wのい
ずれかを含む緩衝材を有し、
前記半導体素子の表面と前記緩衝材の表面とは、それぞれNi系層で覆われており、
更に、前記半導体と前記緩衝材との間に、Cu-Ni-Sn化合物を主体とする金属間化合
物層で挟まれたSn系はんだ層を有し、
前記Cu-Ni-Sn化合物を主体とする金属間化合物層で挟まれたSn系はんだ層は、前記
半導体素子と前記緩衝材とをSn-(5〜10)mass%Cu-(0.05〜0.5)mass%Niはん
だで接続することにより形成されることを特徴とする半導体装置。 - 請求項2記載の半導体装置であって、
前記半導体素子の前記支持電極体と接続された面の裏面は、リード電極と接続されており、
前記リード電極と前記半導体素子とを接続する第二の接続部は、
前記リード電極上に形成された第二のNi系層と、
前記第二のNi系層上に形成されたCu-Ni-Sn化合物を主体とする第二の金属間化合
物層と、
前記第二の金属間化合物層と前記半導体素子との間に形成されたSn系はんだ層と、
を有することを特徴とする半導体装置。 - 請求項4記載の半導体装置であって、
前記第二の接続部のうちの第二の金属間化合物層及びSn系はんだ層は、Sn-(5〜10
)mass%Cu-(0.05〜0.5)mass%Niはんだで構成されており、前記リード電極上に形
成された前記第二のNi系層と前記半導体素子とを接続していることを特徴とする半導体
装置。 - 半導体素子と、
前記半導体素子の第一の面と第一の緩衝材を介して接続された支持電極体と、
前記半導体素子の第二の面と第二の緩衝材を介して接続されたリード電極と、
を有する半導体装置であって、
前記半導体素子の第一の面と前記第一の緩衝材とを接続する第一の接続部は、
前記半導体素子の第一の面上に形成された第一のNi系層と、
前記第一のNi系層上に形成されたCu-Ni-Sn化合物を主体とする第一の金属間化合
物層と、
前記第一の金属間化合物層と前記第一の緩衝材との間に形成されたSn系はんだ層と、
を有し、
前記第一の接続部のうちの第一の金属間化合物層及びSn系はんだ層は、Sn-(5〜10
)mass%Cu-(0.05〜0.5)mass%Niはんだで構成されており、前記半導体素子の第一
の面上に形成された前記第一のNi系層と前記第一の緩衝材とを接続していることを特徴
とする半導体装置。 - 請求項6記載の半導体装置であって、
前記半導体素子の第二の面と前記第二の緩衝材とを接続する第二の接続部は、
前記半導体素子の第二の面上に形成された第二のNi系層と、
前記第二のNi系層上に形成されたCu-Ni-Sn化合物を主体とする第二の金属間化合
物層と、
前記第二の金属間化合物層と前記第二の緩衝材との間に形成されたSn系はんだ層と、
を有することを特徴とする半導体装置。 - 請求項7記載の半導体装置であって、
前記第二の接続部のうちの第二の金属間化合物層及びSn系はんだ層は、Sn-(5〜10
)mass%Cu-(0.05〜0.5)mass%Niはんだで構成されており、前記半導体素子の第二
の面上に形成された前記第二のNi系層と前記第二の緩衝材とを接続していることを特徴
とする半導体装置。 - 請求項6乃至8のいずれかに記載の半導体装置であって、
前記支持電極体と前記第一の緩衝材との接続部は、
200℃においてCu6Sn5相を含有するSn系はんだで接続してなることを特徴とす
る半導体装置。 - 請求項6乃至9のいずれかに記載の半導体装置であって、
前記リード電極と前記第二の緩衝材との接続部は、
200℃においてCu6Sn5相を含有するSn系はんだで接続してなることを特徴とす
る半導体装置。 - 請求項1記載の半導体装置であって、
前記部材は、ベース基板であることを特徴とする半導体装置。 - 請求項11記載の半導体装置であって、
前記第一の接続部には緩衝材としてAl、Mg、Ag、Zn、Cu、Ni、Cu/インバ
ー合金/Cu複合材、Cu/セラミック/Cu、Cu/Cu2O複合材、Cu-Mo合金、Ti
、Mo、Wのいずれかが含まれていることを特徴とする半導体装置。 - 請求項1記載の半導体装置であって、
前記部材は、前記半導体素子と電気的に接続されたリードフレームであることを特徴とす
る半導体装置。 - 請求項1乃至13のいずれかに記載の半導体装置であって、
前記第一のNi系層は、Ni、Ni-P、Ni-Bのいずれかであることを特徴とする半導
体装置。
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