JP5322358B2 - 基板を熱処理する装置及び方法 - Google Patents

基板を熱処理する装置及び方法 Download PDF

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Publication number
JP5322358B2
JP5322358B2 JP2000619972A JP2000619972A JP5322358B2 JP 5322358 B2 JP5322358 B2 JP 5322358B2 JP 2000619972 A JP2000619972 A JP 2000619972A JP 2000619972 A JP2000619972 A JP 2000619972A JP 5322358 B2 JP5322358 B2 JP 5322358B2
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Japan
Prior art keywords
wafer
heating device
processing chamber
lamp
arc lamps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2000619972A
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English (en)
Japanese (ja)
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JP2003500844A (ja
JP2003500844A5 (https=
Inventor
ヴァルク ハインリッヒ
マーダー ローラント
ブレルシュ ヴェルナー
ハウフ マルクス
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Steag RTP Systems GmbH
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Steag RTP Systems GmbH
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Publication of JP2003500844A5 publication Critical patent/JP2003500844A5/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing
    • H10P34/422—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing using incoherent radiation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Discharge Heating (AREA)
  • Drying Of Semiconductors (AREA)
JP2000619972A 1999-05-21 2000-04-22 基板を熱処理する装置及び方法 Expired - Fee Related JP5322358B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19923400A DE19923400A1 (de) 1999-05-21 1999-05-21 Vorrichtung und Verfahren zum thermischen Behandeln von Substraten
DE19923400.0 1999-05-21
PCT/EP2000/003665 WO2000072636A1 (de) 1999-05-21 2000-04-22 Vorrichtung und verfahren zum thermischen behandeln von substraten

Publications (3)

Publication Number Publication Date
JP2003500844A JP2003500844A (ja) 2003-01-07
JP2003500844A5 JP2003500844A5 (https=) 2007-06-14
JP5322358B2 true JP5322358B2 (ja) 2013-10-23

Family

ID=7908776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000619972A Expired - Fee Related JP5322358B2 (ja) 1999-05-21 2000-04-22 基板を熱処理する装置及び方法

Country Status (7)

Country Link
US (1) US6614005B1 (https=)
EP (1) EP1179287B1 (https=)
JP (1) JP5322358B2 (https=)
KR (1) KR100699103B1 (https=)
DE (2) DE19923400A1 (https=)
TW (1) TW451049B (https=)
WO (1) WO2000072636A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102227596B1 (ko) * 2019-09-24 2021-03-15 (주) 예스티 열처리 공정이 가능한 기판 처리 장치

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* Cited by examiner, † Cited by third party
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US6771895B2 (en) 1999-01-06 2004-08-03 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers
US6376806B2 (en) * 2000-05-09 2002-04-23 Woo Sik Yoo Flash anneal
US6970644B2 (en) * 2000-12-21 2005-11-29 Mattson Technology, Inc. Heating configuration for use in thermal processing chambers
US7015422B2 (en) * 2000-12-21 2006-03-21 Mattson Technology, Inc. System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
EP1393354A1 (de) * 2001-05-23 2004-03-03 Mattson Thermal Products GmbH Verfahren und vorrichtung zum thermischen behandeln von substraten
DE50212070D1 (de) * 2001-05-28 2008-05-21 Barbara Gerstendoerfer-Hart Vorrichtung zur erwärmung von substraten mit seitenblenden und sekundären reflektoren
JP2004031557A (ja) * 2002-06-25 2004-01-29 Ushio Inc 光加熱装置
US6918965B2 (en) * 2002-08-28 2005-07-19 Micron Technology, Inc. Single substrate annealing of magnetoresistive structure
JP4272418B2 (ja) * 2002-12-16 2009-06-03 大日本スクリーン製造株式会社 熱処理装置
DE102004039443B4 (de) 2004-08-13 2023-05-25 Beijing E-Town Semiconductor Technology, Co., Ltd. Verfahren zum thermischen Behandeln von scheibenförmigen Substraten
DE102004060188B4 (de) * 2004-12-14 2011-06-16 Infineon Technologies Ag Prozess-Heizkammer und Verwendung derselben
DE102005010005A1 (de) * 2005-03-04 2006-12-28 Nunner, Dieter Vorrichtung und Verfahren zur Beschichtung von Kleinteilen
US20060291833A1 (en) * 2005-06-01 2006-12-28 Mattson Techonology, Inc. Switchable reflector wall concept
US7335864B2 (en) * 2005-06-01 2008-02-26 Mrl Industries, Inc. Magnetic field reduction resistive heating elements
JP2007095889A (ja) * 2005-09-28 2007-04-12 Ushio Inc 光照射式加熱方法
JP2007274007A (ja) * 2007-06-18 2007-10-18 Toshiba Corp 半導体装置の製造方法
JP5559656B2 (ja) * 2010-10-14 2014-07-23 大日本スクリーン製造株式会社 熱処理装置および熱処理方法
DE102011087885B3 (de) * 2011-12-07 2013-02-28 Von Ardenne Anlagentechnik Gmbh Blitzlampenanordnung
KR101439380B1 (ko) 2012-10-31 2014-09-11 주식회사 사파이어테크놀로지 사파이어 단결정 열처리 방법 및 장치
JP6184697B2 (ja) 2013-01-24 2017-08-23 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置および熱処理方法
CN118435335A (zh) * 2021-12-31 2024-08-02 华为技术有限公司 一种加热装置和外延生长设备

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE295950C (https=)
JPS56100426A (en) * 1980-01-14 1981-08-12 Ushio Inc Device and method for annealing
US4550684A (en) * 1983-08-11 1985-11-05 Genus, Inc. Cooled optical window for semiconductor wafer heating
US4698486A (en) * 1984-02-28 1987-10-06 Tamarack Scientific Co., Inc. Method of heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc.
US4654509A (en) 1985-10-07 1987-03-31 Epsilon Limited Partnership Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus
US4820906A (en) * 1987-03-13 1989-04-11 Peak Systems, Inc. Long arc lamp for semiconductor heating
JPH0325928A (ja) * 1989-06-23 1991-02-04 Nec Corp 半導体ウェハーのランプ式熱処理装置
JPH0482215A (ja) 1990-07-25 1992-03-16 Sumitomo Electric Ind Ltd ランプアニール装置
DD295950A5 (de) * 1990-09-17 1991-11-14 Technische Hochschule Ilmenau,De Vorrichtung zur durchfuehrung schneller thermischer prozesse mit uv-anregung
US5180226A (en) * 1991-10-30 1993-01-19 Texas Instruments Incorporated Method and apparatus for precise temperature measurement
US5336641A (en) * 1992-03-17 1994-08-09 Aktis Corporation Rapid thermal annealing using thermally conductive overcoat
US5452396A (en) * 1994-02-07 1995-09-19 Midwest Research Institute Optical processing furnace with quartz muffle and diffuser plate
US5861609A (en) * 1995-10-02 1999-01-19 Kaltenbrunner; Guenter Method and apparatus for rapid thermal processing
US5971565A (en) * 1995-10-20 1999-10-26 Regents Of The University Of California Lamp system with conditioned water coolant and diffuse reflector of polytetrafluorethylene(PTFE)
JPH09270390A (ja) * 1996-03-29 1997-10-14 Dainippon Screen Mfg Co Ltd 基板の光照射式熱処理装置
JPH10229050A (ja) * 1997-02-14 1998-08-25 Ricoh Co Ltd 半導体製造装置
JPH113868A (ja) * 1997-06-12 1999-01-06 Nec Yamagata Ltd ランプアニール装置およびランプアニール方法
JP3911071B2 (ja) * 1997-06-13 2007-05-09 サイエンステクノロジー株式会社 高速ランプ加熱処理装置及び高速ランプ加熱処理方法
US6210484B1 (en) * 1998-09-09 2001-04-03 Steag Rtp Systems, Inc. Heating device containing a multi-lamp cone for heating semiconductor wafers
US6122440A (en) * 1999-01-27 2000-09-19 Regents Of The University Of Minnesota Optical heating device for rapid thermal processing (RTP) system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102227596B1 (ko) * 2019-09-24 2021-03-15 (주) 예스티 열처리 공정이 가능한 기판 처리 장치

Also Published As

Publication number Publication date
JP2003500844A (ja) 2003-01-07
DE50008426D1 (de) 2004-12-02
KR100699103B1 (ko) 2007-03-21
EP1179287A1 (de) 2002-02-13
US6614005B1 (en) 2003-09-02
TW451049B (en) 2001-08-21
EP1179287B1 (de) 2004-10-27
DE19923400A1 (de) 2000-11-30
WO2000072636A1 (de) 2000-11-30
KR20010112501A (ko) 2001-12-20

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