TW451049B - Device and method for thermally treating substrates - Google Patents

Device and method for thermally treating substrates Download PDF

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Publication number
TW451049B
TW451049B TW089109607A TW89109607A TW451049B TW 451049 B TW451049 B TW 451049B TW 089109607 A TW089109607 A TW 089109607A TW 89109607 A TW89109607 A TW 89109607A TW 451049 B TW451049 B TW 451049B
Authority
TW
Taiwan
Prior art keywords
item
patent application
lamp
scope
substrate
Prior art date
Application number
TW089109607A
Other languages
English (en)
Chinese (zh)
Inventor
Heinrich Walk
Roland Mader
Werner Blersch
Markus Hauf
Original Assignee
Steag Rtp Systems Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Rtp Systems Gmbh filed Critical Steag Rtp Systems Gmbh
Application granted granted Critical
Publication of TW451049B publication Critical patent/TW451049B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing
    • H10P34/422—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing using incoherent radiation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0434—Apparatus for thermal treatment mainly by convection
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Discharge Heating (AREA)
  • Drying Of Semiconductors (AREA)
TW089109607A 1999-05-21 2000-05-18 Device and method for thermally treating substrates TW451049B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19923400A DE19923400A1 (de) 1999-05-21 1999-05-21 Vorrichtung und Verfahren zum thermischen Behandeln von Substraten

Publications (1)

Publication Number Publication Date
TW451049B true TW451049B (en) 2001-08-21

Family

ID=7908776

Family Applications (1)

Application Number Title Priority Date Filing Date
TW089109607A TW451049B (en) 1999-05-21 2000-05-18 Device and method for thermally treating substrates

Country Status (7)

Country Link
US (1) US6614005B1 (https=)
EP (1) EP1179287B1 (https=)
JP (1) JP5322358B2 (https=)
KR (1) KR100699103B1 (https=)
DE (2) DE19923400A1 (https=)
TW (1) TW451049B (https=)
WO (1) WO2000072636A1 (https=)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6771895B2 (en) 1999-01-06 2004-08-03 Mattson Technology, Inc. Heating device for heating semiconductor wafers in thermal processing chambers
US6376806B2 (en) * 2000-05-09 2002-04-23 Woo Sik Yoo Flash anneal
US6970644B2 (en) * 2000-12-21 2005-11-29 Mattson Technology, Inc. Heating configuration for use in thermal processing chambers
US7015422B2 (en) * 2000-12-21 2006-03-21 Mattson Technology, Inc. System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy
EP1393354A1 (de) * 2001-05-23 2004-03-03 Mattson Thermal Products GmbH Verfahren und vorrichtung zum thermischen behandeln von substraten
DE50212070D1 (de) * 2001-05-28 2008-05-21 Barbara Gerstendoerfer-Hart Vorrichtung zur erwärmung von substraten mit seitenblenden und sekundären reflektoren
JP2004031557A (ja) * 2002-06-25 2004-01-29 Ushio Inc 光加熱装置
US6918965B2 (en) * 2002-08-28 2005-07-19 Micron Technology, Inc. Single substrate annealing of magnetoresistive structure
JP4272418B2 (ja) * 2002-12-16 2009-06-03 大日本スクリーン製造株式会社 熱処理装置
DE102004039443B4 (de) 2004-08-13 2023-05-25 Beijing E-Town Semiconductor Technology, Co., Ltd. Verfahren zum thermischen Behandeln von scheibenförmigen Substraten
DE102004060188B4 (de) * 2004-12-14 2011-06-16 Infineon Technologies Ag Prozess-Heizkammer und Verwendung derselben
DE102005010005A1 (de) * 2005-03-04 2006-12-28 Nunner, Dieter Vorrichtung und Verfahren zur Beschichtung von Kleinteilen
US20060291833A1 (en) * 2005-06-01 2006-12-28 Mattson Techonology, Inc. Switchable reflector wall concept
US7335864B2 (en) * 2005-06-01 2008-02-26 Mrl Industries, Inc. Magnetic field reduction resistive heating elements
JP2007095889A (ja) * 2005-09-28 2007-04-12 Ushio Inc 光照射式加熱方法
JP2007274007A (ja) * 2007-06-18 2007-10-18 Toshiba Corp 半導体装置の製造方法
JP5559656B2 (ja) * 2010-10-14 2014-07-23 大日本スクリーン製造株式会社 熱処理装置および熱処理方法
DE102011087885B3 (de) * 2011-12-07 2013-02-28 Von Ardenne Anlagentechnik Gmbh Blitzlampenanordnung
KR101439380B1 (ko) 2012-10-31 2014-09-11 주식회사 사파이어테크놀로지 사파이어 단결정 열처리 방법 및 장치
JP6184697B2 (ja) 2013-01-24 2017-08-23 株式会社Ｓｃｒｅｅｎホールディングス 熱処理装置および熱処理方法
KR102227596B1 (ko) * 2019-09-24 2021-03-15 (주) 예스티 열처리 공정이 가능한 기판 처리 장치
CN118435335A (zh) * 2021-12-31 2024-08-02 华为技术有限公司 一种加热装置和外延生长设备

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Publication number Priority date Publication date Assignee Title
DE295950C (https=)
JPS56100426A (en) * 1980-01-14 1981-08-12 Ushio Inc Device and method for annealing
US4550684A (en) * 1983-08-11 1985-11-05 Genus, Inc. Cooled optical window for semiconductor wafer heating
US4698486A (en) * 1984-02-28 1987-10-06 Tamarack Scientific Co., Inc. Method of heating semiconductor wafers in order to achieve annealing, silicide formation, reflow of glass passivation layers, etc.
US4654509A (en) 1985-10-07 1987-03-31 Epsilon Limited Partnership Method and apparatus for substrate heating in an axially symmetric epitaxial deposition apparatus
US4820906A (en) * 1987-03-13 1989-04-11 Peak Systems, Inc. Long arc lamp for semiconductor heating
JPH0325928A (ja) * 1989-06-23 1991-02-04 Nec Corp 半導体ウェハーのランプ式熱処理装置
JPH0482215A (ja) 1990-07-25 1992-03-16 Sumitomo Electric Ind Ltd ランプアニール装置
DD295950A5 (de) * 1990-09-17 1991-11-14 Technische Hochschule Ilmenau,De Vorrichtung zur durchfuehrung schneller thermischer prozesse mit uv-anregung
US5180226A (en) * 1991-10-30 1993-01-19 Texas Instruments Incorporated Method and apparatus for precise temperature measurement
US5336641A (en) * 1992-03-17 1994-08-09 Aktis Corporation Rapid thermal annealing using thermally conductive overcoat
US5452396A (en) * 1994-02-07 1995-09-19 Midwest Research Institute Optical processing furnace with quartz muffle and diffuser plate
US5861609A (en) * 1995-10-02 1999-01-19 Kaltenbrunner; Guenter Method and apparatus for rapid thermal processing
US5971565A (en) * 1995-10-20 1999-10-26 Regents Of The University Of California Lamp system with conditioned water coolant and diffuse reflector of polytetrafluorethylene(PTFE)
JPH09270390A (ja) * 1996-03-29 1997-10-14 Dainippon Screen Mfg Co Ltd 基板の光照射式熱処理装置
JPH10229050A (ja) * 1997-02-14 1998-08-25 Ricoh Co Ltd 半導体製造装置
JPH113868A (ja) * 1997-06-12 1999-01-06 Nec Yamagata Ltd ランプアニール装置およびランプアニール方法
JP3911071B2 (ja) * 1997-06-13 2007-05-09 サイエンステクノロジー株式会社 高速ランプ加熱処理装置及び高速ランプ加熱処理方法
US6210484B1 (en) * 1998-09-09 2001-04-03 Steag Rtp Systems, Inc. Heating device containing a multi-lamp cone for heating semiconductor wafers
US6122440A (en) * 1999-01-27 2000-09-19 Regents Of The University Of Minnesota Optical heating device for rapid thermal processing (RTP) system

Also Published As

Publication number Publication date
JP2003500844A (ja) 2003-01-07
DE50008426D1 (de) 2004-12-02
KR100699103B1 (ko) 2007-03-21
EP1179287A1 (de) 2002-02-13
US6614005B1 (en) 2003-09-02
JP5322358B2 (ja) 2013-10-23
EP1179287B1 (de) 2004-10-27
DE19923400A1 (de) 2000-11-30
WO2000072636A1 (de) 2000-11-30
KR20010112501A (ko) 2001-12-20

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