JP5320068B2 - 共振器用中空体の製造方法 - Google Patents
共振器用中空体の製造方法 Download PDFInfo
- Publication number
- JP5320068B2 JP5320068B2 JP2008542660A JP2008542660A JP5320068B2 JP 5320068 B2 JP5320068 B2 JP 5320068B2 JP 2008542660 A JP2008542660 A JP 2008542660A JP 2008542660 A JP2008542660 A JP 2008542660A JP 5320068 B2 JP5320068 B2 JP 5320068B2
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- JP
- Japan
- Prior art keywords
- substrate
- cells
- resonator
- wafer
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
- H05H7/18—Cavities; Resonators
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P11/00—Apparatus or processes specially adapted for manufacturing waveguides or resonators, lines, or other devices of the waveguide type
- H01P11/008—Manufacturing resonators
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Manufacturing & Machinery (AREA)
- Particle Accelerators (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102005058398.9 | 2005-12-02 | ||
| DE102005058398 | 2005-12-02 | ||
| DE102006021111A DE102006021111B3 (de) | 2005-12-02 | 2006-05-05 | Verfahren zur Herstellung von Hohlkörpern von Resonatoren |
| DE102006021111.1 | 2006-05-05 | ||
| PCT/EP2006/011464 WO2007062829A1 (de) | 2005-12-02 | 2006-11-29 | Verfahren zur herstellung von hohlkörpern für resonatoren |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2009517817A JP2009517817A (ja) | 2009-04-30 |
| JP2009517817A5 JP2009517817A5 (enExample) | 2012-11-29 |
| JP5320068B2 true JP5320068B2 (ja) | 2013-10-23 |
Family
ID=37671243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008542660A Active JP5320068B2 (ja) | 2005-12-02 | 2006-11-29 | 共振器用中空体の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8088714B2 (enExample) |
| EP (1) | EP1955404B1 (enExample) |
| JP (1) | JP5320068B2 (enExample) |
| AT (1) | ATE426255T1 (enExample) |
| DE (2) | DE102006021111B3 (enExample) |
| WO (1) | WO2007062829A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5632924B2 (ja) * | 2009-11-03 | 2014-11-26 | ザ セクレタリー,デパートメント オブ アトミック エナジー,ガヴァメント,オブ インディア | レーザ溶接によって結合されたニオブ部品を備えるニオブベース超伝導無線周波(scrf)キャビティおよびその製造方法並びに製造装置 |
| JP5804840B2 (ja) * | 2011-08-11 | 2015-11-04 | 三菱重工業株式会社 | 加工装置及び加工方法 |
| US11071194B2 (en) | 2016-07-21 | 2021-07-20 | Fermi Research Alliance, Llc | Longitudinally joined superconducting resonating cavities |
| EP3346017B1 (de) * | 2017-01-10 | 2021-09-15 | Heraeus Deutschland GmbH & Co. KG | Verfahren zum schneiden von refraktärmetallen |
| US10856402B2 (en) | 2018-05-18 | 2020-12-01 | Ii-Vi Delaware, Inc. | Superconducting resonating cavity with laser welded seam and method of formation thereof |
| US10847860B2 (en) | 2018-05-18 | 2020-11-24 | Ii-Vi Delaware, Inc. | Superconducting resonating cavity and method of production thereof |
| US11464102B2 (en) * | 2018-10-06 | 2022-10-04 | Fermi Research Alliance, Llc | Methods and systems for treatment of superconducting materials to improve low field performance |
| US12225656B2 (en) | 2018-12-28 | 2025-02-11 | Shanghai United Imaging Healthcare Co., Ltd. | Accelerating apparatus for a radiation device |
| CN109462932B (zh) * | 2018-12-28 | 2021-04-06 | 上海联影医疗科技股份有限公司 | 一种驻波加速管 |
| CN113355671B (zh) * | 2021-06-10 | 2022-12-13 | 兰州荣翔轨道交通科技有限公司 | 基于数控车床的纯铌超导腔表面铜铌改性层制备方法 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3608160A1 (de) * | 1986-03-12 | 1987-09-24 | Kernforschungsz Karlsruhe | Verfahren zur herstellung supraleitender hohlraumresonatoren |
| DE3722745A1 (de) * | 1987-07-09 | 1989-01-19 | Interatom | Herstellungsverfahren fuer hohlkoerper aus beschichteten blechen und apparat, insbesondere supraleitender hochfrequenz-resonator |
| JPH03135000A (ja) | 1989-10-20 | 1991-06-07 | Furukawa Electric Co Ltd:The | 超伝導加速管 |
| JPH03147299A (ja) | 1989-11-01 | 1991-06-24 | Furukawa Electric Co Ltd:The | 超伝導加速空洞の製造方法 |
| US5239157A (en) | 1990-10-31 | 1993-08-24 | The Furukawa Electric Co., Ltd. | Superconducting accelerating tube and a method for manufacturing the same |
| WO1992013434A1 (fr) * | 1991-01-24 | 1992-08-06 | The Furukawa Electric Co., Ltd. | Conduit d'acceleration supraconducteur |
| JP3089085B2 (ja) | 1992-03-23 | 2000-09-18 | 三菱重工業株式会社 | 電子ビーム用超伝導加速空洞の製造方法 |
| DE69310722T2 (de) * | 1993-06-14 | 1997-09-11 | Istituto Nazionale Di Fisica N | Herstellungsverfahren von nahtloser Radiofrequenz-Resonanzholräumen und dadurch erhaltenes Produkt |
| US7746192B2 (en) * | 2005-06-20 | 2010-06-29 | The Texas A&M University System | Polyhedral contoured microwave cavities |
-
2006
- 2006-05-05 DE DE102006021111A patent/DE102006021111B3/de not_active Expired - Fee Related
- 2006-11-29 US US12/095,901 patent/US8088714B2/en active Active
- 2006-11-29 EP EP06818910A patent/EP1955404B1/de active Active
- 2006-11-29 AT AT06818910T patent/ATE426255T1/de not_active IP Right Cessation
- 2006-11-29 WO PCT/EP2006/011464 patent/WO2007062829A1/de not_active Ceased
- 2006-11-29 DE DE502006003219T patent/DE502006003219D1/de active Active
- 2006-11-29 JP JP2008542660A patent/JP5320068B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| ATE426255T1 (de) | 2009-04-15 |
| DE502006003219D1 (de) | 2009-04-30 |
| WO2007062829A1 (de) | 2007-06-07 |
| JP2009517817A (ja) | 2009-04-30 |
| EP1955404A1 (de) | 2008-08-13 |
| US20090215631A1 (en) | 2009-08-27 |
| US8088714B2 (en) | 2012-01-03 |
| EP1955404B1 (de) | 2009-03-18 |
| DE102006021111B3 (de) | 2007-08-02 |
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