JP5315405B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5315405B2 JP5315405B2 JP2011275802A JP2011275802A JP5315405B2 JP 5315405 B2 JP5315405 B2 JP 5315405B2 JP 2011275802 A JP2011275802 A JP 2011275802A JP 2011275802 A JP2011275802 A JP 2011275802A JP 5315405 B2 JP5315405 B2 JP 5315405B2
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
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- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49175—Parallel arrangements
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- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
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- H—ELECTRICITY
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- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Description
図1は本発明の実施の形態1の半導体装置の構造の一例を封止体を透過して示す部分平面図、図2は図1に示す半導体装置の構造の一例を示す断面図、図3は図1に示す半導体装置のシステムの一例を示すブロック構成図、図4は図1に示す半導体装置の組み立てに用いられるリードフレームの構造の一例を示す断面図、図5はダイボンディング完了時の構造の一例を示す断面図、図6はワイヤボンディング完了時の構造の一例を示す断面図、図7は樹脂封止完了時の構造の一例を示す断面図、図8はワイヤボンディングにおけるボンディング前の構造の一例を示す拡大部分平面図、図9はワイヤボンディングにおけるチップ間接続後の構造の一例を示す拡大部分平面図、図10はワイヤボンディングにおける第2のチップ−リード間接続後の構造の一例を示す拡大部分平面図、図11はワイヤボンディングにおける第1のチップ−リード間接続後の構造の一例を示す拡大部分平面図、図12はワイヤボンディングにおけるボンディング順の一例を示すフロー図と断面図、図13はワイヤボンディングにおける変形例のボンディング順を示すフロー図と断面図、図14は図1に示す半導体装置におけるチップ配置レイアウトの一例を示す平面図、図15および図16はそれぞれ実施の形態1の半導体装置の組み立てに用いられるリードフレームの変形例の構造を示す平面図、図17は本発明の実施の形態1の変形例の半導体装置の構造を示す断面図、図18は本発明の実施の形態1の変形例の半導体装置の組み立てにおけるワイヤボンディング時の構造を示す断面図である。
図19は本発明の実施の形態2の半導体装置の構造の一例を示す断面図、図20は図19に示す半導体装置の構造の一例を示す裏面図、図21は図19に示す半導体装置におけるリード配列と外部端子配列の関係の一例を示す部分平面図である。
Flat Non−leaded Package)型にしたことである。
図22は本発明の実施の形態3の半導体装置の全体構成を示す概念図、図23は本実施の形態3の半導体装置において、ASICとSDRAMのパッケージ内の配置を示す概念図である。
Memory Built In Self Test)109などを含むASIC(Application Specific Integrated Circuit)100と、SDRAM(Synchronous Dynamic Random Access Memory)101などから構成される。ASIC100内のIO部107は、複数の制御信号入力付き入出力バッファ110とその他のバッファなどから構成されている。
2 SDRAM(第2の半導体チップ)
2a 主面
2b 裏面
2c パッド(電極)
3 マイコンチップ(第1の半導体チップ)
3a 主面
3b 裏面
3c パッド(電極)
3d CPU
3e ロジック
3f アナログ
3g 内部メモリ
3h BIST回路(テスト回路)
3i メモリ接続用入出力回路
3j 外部接続用入出力回路
4 銀ペースト
5 リードフレーム
5a インナリード(リード)
5b アウタリード(リード)
5c タブ(チップ搭載部)
5d 第1のチップ搭載部
5e 第2のチップ搭載部
5f スリット
5g 吊りリード
5h 小タブ(第1のチップ搭載部)
5i リード部(リード)
5j 突出部
6a 第1のワイヤ
6b 第2のワイヤ
6c 第3のワイヤ
7 封止体
7a 裏面
8 金バンプ
9 ヒートステージ(加熱治具)
9a 平坦面
9b 凹部
9c 凸部
9d 排気口
10,11 SIP(半導体装置)
12 バンプ電極
13 補強用端子
100 ASIC(第1半導体チップ)
101 SDRAM(第2半導体チップ)
102 SIP
103 アナログ
104 内部メモリ
105 CPU
106 ロジック部
107 IO部
108 MBIST
109 SDRAMBIST
110 制御信号入力付き入出力バッファ
111 データ信号
112 アドレス信号
113 制御信号
114 クロック信号
115 端子(第1端子)
116 端子(第2端子)
117,123,127 出力バッファ
118,128 入力バッファ
119 プルアップ回路
120 スイッチ
121 FF
124 テスト回路
125,126 ピン
129 GND
130 イネーブルB/SR(バウンダリスキャンレジスタ)
131 アウトプットB/SR
132 インプットB/SR
Claims (6)
- チップ搭載部と、
前記チップ搭載部上に搭載され、第1辺、複数のパッドが配置された表面、および演算処理機能を備えた第1半導体チップと、
前記チップ搭載部上に搭載され、第2辺、複数のパッドが配置された表面、およびメモリ回路を有する第2半導体チップと、
前記チップ搭載部の周囲に配置された複数のリードと、
前記第1半導体チップの前記複数のパッドの一部と前記第2半導体チップの前記複数のパッドの一部とを電気的に接続する第1ワイヤと、
前記第1半導体チップの前記複数のパッドの一部と前記複数のリードの一部とを電気的に接続する複数の第2ワイヤと、
前記第2半導体チップの前記複数のパッドの一部と前記複数のリードの一部とを電気的に接続する複数の第3ワイヤと、
前記チップ搭載部、前記第1半導体チップ、前記第2半導体チップ、前記複数のリードの一部、前記第1ワイヤ、前記複数の第2ワイヤ、および前記複数の第3ワイヤを封止する封止体と、を有する半導体装置であって、
前記第1半導体チップは、メモリ接続用入出力回路を有し、
前記第1半導体チップの前記複数のパッドの内、前記メモリ接続用入出力回路と電気的に接続された第1パッドは前記第1辺に沿って配置され、
前記第2半導体チップの前記複数のパッドの内、前記第1半導体チップの前記メモリ接続用入出力回路と接続される第2パッドは前記第2辺に沿って配置され、
前記第1および第2半導体チップは、それぞれの前記第1辺と前記第2辺とが対向するように前記チップ搭載部上に隣接して並んで配置され、前記第1半導体チップの前記第1パッドと前記第2半導体チップの前記第2パッドとは、前記第1ワイヤにより電気的に接続され、
前記第1半導体チップはロジック回路を有し、前記ロジック回路には、前記第2半導体チップをテスト可能なBIST回路が備えられ、
前記第1半導体チップは、CPU、アナログ回路、および内部メモリをさらに有する半導体装置。 - 請求項1に記載の半導体装置において、
前記第1半導体チップは、外部接続用入出力回路を有し、
前記第1半導体チップの前記複数のパッドの内、前記外部接続用入出力回路と電気的に接続された第3パッドは前記第1辺以外の辺に沿って配置され、前記第2ワイヤを介して前記複数のリードの一部と電気的に接続されている半導体装置。 - 請求項1に記載の半導体装置において、
前記第1および第2半導体チップは、前記第1ワイヤを介してアドレス、データ、コマンド、およびクロックの信号伝達を行う半導体装置。 - 請求項1に記載の半導体装置において、
前記第2半導体チップの前記第3ワイヤと接続されているパッドは、電源パッドである半導体装置。 - 請求項1に記載の半導体装置において、
前記第2半導体チップの前記第3ワイヤと接続されているパッドは、GND用パッドである半導体装置。 - 請求項1に記載の半導体装置において、
前記第1パッドの一部は、前記BIST回路と電気的に接続されている半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2011275802A JP5315405B2 (ja) | 2011-12-16 | 2011-12-16 | 半導体装置 |
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JP2011275802A JP5315405B2 (ja) | 2011-12-16 | 2011-12-16 | 半導体装置 |
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Application Number | Title | Priority Date | Filing Date |
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JP2009153458A Division JP5167203B2 (ja) | 2009-06-29 | 2009-06-29 | 半導体装置 |
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JP2012080118A JP2012080118A (ja) | 2012-04-19 |
JP5315405B2 true JP5315405B2 (ja) | 2013-10-16 |
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JP6420617B2 (ja) | 2014-09-30 | 2018-11-07 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
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JP3938617B2 (ja) * | 1997-09-09 | 2007-06-27 | 富士通株式会社 | 半導体装置及び半導体システム |
JP2000223657A (ja) * | 1999-02-03 | 2000-08-11 | Rohm Co Ltd | 半導体装置およびそれに用いる半導体チップ |
JP2000349226A (ja) * | 1999-06-07 | 2000-12-15 | Hitachi Ltd | 半導体装置 |
JP4441974B2 (ja) * | 2000-03-24 | 2010-03-31 | ソニー株式会社 | 半導体装置の製造方法 |
JP2002076267A (ja) * | 2000-08-22 | 2002-03-15 | Hitachi Ltd | 無線送受信装置 |
JP2004085526A (ja) * | 2001-12-05 | 2004-03-18 | Renesas Technology Corp | 半導体装置 |
JP2004053276A (ja) * | 2002-07-16 | 2004-02-19 | Fujitsu Ltd | 半導体装置および半導体集積回路 |
JP3867639B2 (ja) * | 2002-07-31 | 2007-01-10 | 株式会社デンソー | 混成集積回路装置 |
JP2004079571A (ja) * | 2002-08-09 | 2004-03-11 | Renesas Technology Corp | 半導体集積回路装置 |
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