JP5313673B2 - 工作物支持体装置 - Google Patents

工作物支持体装置 Download PDF

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Publication number
JP5313673B2
JP5313673B2 JP2008528310A JP2008528310A JP5313673B2 JP 5313673 B2 JP5313673 B2 JP 5313673B2 JP 2008528310 A JP2008528310 A JP 2008528310A JP 2008528310 A JP2008528310 A JP 2008528310A JP 5313673 B2 JP5313673 B2 JP 5313673B2
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JP
Japan
Prior art keywords
workpiece
drive
workpiece support
support device
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2008528310A
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English (en)
Japanese (ja)
Other versions
JP2009506214A (ja
JP2009506214A5 (enExample
Inventor
エッザー，ステファン
Original Assignee
エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=37037467&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP5313673(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from CH00122/06A external-priority patent/CH698143B1/de
Application filed by エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ filed Critical エルリコン トレーディング アクチェンゲゼルシャフト，トリューブバハ
Publication of JP2009506214A publication Critical patent/JP2009506214A/ja
Publication of JP2009506214A5 publication Critical patent/JP2009506214A5/ja
Application granted granted Critical
Publication of JP5313673B2 publication Critical patent/JP5313673B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M13/00—Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/90—Supporting structure having work holder receiving apertures or projections

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Retarders (AREA)
  • Feeding Of Workpieces (AREA)
  • Physical Vapour Deposition (AREA)
  • Automatic Assembly (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Turning (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Chain Conveyers (AREA)
  • Jigs For Machine Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP2008528310A 2005-08-29 2006-07-24 工作物支持体装置 Expired - Lifetime JP5313673B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102005041016.2 2005-08-29
DE102005041016 2005-08-29
CH122/06 2006-01-25
CH00122/06A CH698143B1 (de) 2006-01-25 2006-01-25 Werkstückträgereinrichtung.
PCT/CH2006/000387 WO2007025397A1 (de) 2005-08-29 2006-07-24 Werkstückträgereinrichtung

Publications (3)

Publication Number Publication Date
JP2009506214A JP2009506214A (ja) 2009-02-12
JP2009506214A5 JP2009506214A5 (enExample) 2009-08-27
JP5313673B2 true JP5313673B2 (ja) 2013-10-09

Family

ID=37037467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008528310A Expired - Lifetime JP5313673B2 (ja) 2005-08-29 2006-07-24 工作物支持体装置

Country Status (15)

Country Link
US (1) US7588640B2 (enExample)
EP (1) EP1917380B9 (enExample)
JP (1) JP5313673B2 (enExample)
KR (1) KR101296928B1 (enExample)
CN (1) CN101253281B (enExample)
AT (1) ATE426691T1 (enExample)
BR (1) BRPI0615301B1 (enExample)
CA (1) CA2620417C (enExample)
DE (1) DE502006003280D1 (enExample)
ES (1) ES2324493T3 (enExample)
MX (1) MX2008002382A (enExample)
PL (1) PL1917380T3 (enExample)
PT (1) PT1917380E (enExample)
SI (1) SI1917380T1 (enExample)
WO (1) WO2007025397A1 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8361290B2 (en) * 2006-09-05 2013-01-29 Oerlikon Trading, Ag, Trubbach Coating removal installation and method of operating it
MX349614B (es) * 2006-10-19 2017-07-26 Nanomech Inc Metodos y aparatos para elaborar recubrimientos utilizando deposicion de rocio ultrasonico.
ES2362016T3 (es) * 2007-10-08 2011-06-27 Oerlikon Trading Ag, Trübbach Dispositivo portapieza.
ITBS20080210A1 (it) * 2008-11-20 2010-05-21 Abl Automazione S P A Struttura di supporto per articoli destinati ad un procedimento di lavorazione, ad esempio una metallizzazione pvd o sputtering
DE102010001218A1 (de) * 2010-01-26 2011-07-28 Esser, Stefan, Dr.-Ing., 52072 Substratteller und Beschichtungsanlage zum Beschichten von Substraten
US9545861B2 (en) * 2010-12-02 2017-01-17 C. Rob. Hammerstein Gmbh & Co. Kg Method and device for producing a locking device and locking device for a longitudinal adjustment mechanism of a vehicle seat
DE102011113563A1 (de) * 2011-09-19 2013-03-21 Oerlikon Trading Ag, Trübbach Karussellschlitten für Vakuumbehandlungsanlage
RU2507306C1 (ru) * 2012-09-04 2014-02-20 Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" Установка для напыления покрытий на прецизионные детали узлов гироприборов
CN105734519B (zh) * 2014-12-09 2018-03-06 宜昌后皇真空科技有限公司 一种刀具pvd镀膜自转转架
MX2019009767A (es) * 2017-02-16 2019-10-14 Oerlikon Surface Solutions Ag Pfaeffikon Elemento de herramientas para multiples etapas de proceso.
USD881242S1 (en) * 2018-01-29 2020-04-14 Oerlikon Surface Solutions Ag, Pfaffikon Tool holder
DE102018126862A1 (de) * 2018-10-26 2020-04-30 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung und Beschichtungsanordnung
DE102019110158A1 (de) * 2019-04-17 2020-10-22 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung
CN110760810B (zh) * 2019-11-27 2022-04-08 中山凯旋真空科技股份有限公司 转架及具有其的镀膜设备
DE102020116888A1 (de) 2020-06-26 2022-01-13 Oerlikon Surface Solutions Ag, Pfäffikon Vereinzelungsvorrichtung zum zuführen und vereinzeln von werkstücken und beladungssystem mit einer vereinzelungsvorrichtung und einer zufuhrvorrichtung
CN114102474B (zh) * 2021-12-02 2024-04-05 重庆恒伟林汽车零部件有限公司 一种可满足不同型号新能源汽车减速器试验用安装装置
CN116443330A (zh) * 2023-02-09 2023-07-18 江苏华曼复合材料科技有限公司 一种聚氨酯smc成品塑膜封装机构

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610954Y2 (ja) * 1988-11-30 1994-03-23 株式会社ジューキ 動力伝達装置
DD287164A7 (de) 1989-02-28 1991-02-21 Veb Hochvakuum Dresden,De Substrathalterung mit planetenbewegung
ATE278249T1 (de) * 1997-12-22 2004-10-15 Unaxis Trading Ag Vakuumbehandlungsanlage
DE19803278C2 (de) * 1998-01-29 2001-02-01 Bosch Gmbh Robert Werkstückträger und dessen Verwendung zur Behandlung und Beschichtung von Werkstücken
EP1153155B1 (de) * 1998-12-15 2005-01-19 Balzers Aktiengesellschaft Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken
JP2001286027A (ja) * 2000-03-31 2001-10-12 Taiton Kk スパイラルチューブ及びそのスパッタリング方法
CN1168085C (zh) * 2000-10-11 2004-09-22 财团法人工业技术研究院 光盘承载装置
DE50205082D1 (de) 2001-05-08 2006-01-05 Unaxis Balzers Ag Werkstückträger
DE102004027989B4 (de) * 2004-06-09 2007-05-10 Esser, Stefan, Dr.-Ing. Werkstückträgervorrichtung zum Halten von Werkstücken

Also Published As

Publication number Publication date
MX2008002382A (es) 2008-03-18
CN101253281A (zh) 2008-08-27
BRPI0615301A2 (pt) 2011-05-17
SI1917380T1 (sl) 2009-10-31
PL1917380T3 (pl) 2009-08-31
EP1917380A1 (de) 2008-05-07
CA2620417C (en) 2014-08-26
JP2009506214A (ja) 2009-02-12
WO2007025397A1 (de) 2007-03-08
CN101253281B (zh) 2010-12-08
EP1917380B9 (de) 2010-02-24
PT1917380E (pt) 2009-06-25
US7588640B2 (en) 2009-09-15
KR101296928B1 (ko) 2013-08-20
DE502006003280D1 (de) 2009-05-07
BRPI0615301B1 (pt) 2019-06-25
EP1917380B1 (de) 2009-03-25
CA2620417A1 (en) 2007-03-08
ES2324493T3 (es) 2009-08-07
KR20080038185A (ko) 2008-05-02
ATE426691T1 (de) 2009-04-15
US20070057138A1 (en) 2007-03-15

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