JP5307528B2 - 測定方法及び測定装置 - Google Patents

測定方法及び測定装置 Download PDF

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Publication number
JP5307528B2
JP5307528B2 JP2008321476A JP2008321476A JP5307528B2 JP 5307528 B2 JP5307528 B2 JP 5307528B2 JP 2008321476 A JP2008321476 A JP 2008321476A JP 2008321476 A JP2008321476 A JP 2008321476A JP 5307528 B2 JP5307528 B2 JP 5307528B2
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Japan
Prior art keywords
test surface
positions
light beam
test
distance
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Expired - Fee Related
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JP2008321476A
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Japanese (ja)
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JP2010145184A5 (enExample
JP2010145184A (ja
Inventor
章博 中内
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Canon Inc
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Canon Inc
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Priority to JP2008321476A priority Critical patent/JP5307528B2/ja
Priority to US12/633,107 priority patent/US8345263B2/en
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Publication of JP2010145184A5 publication Critical patent/JP2010145184A5/ja
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  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP2008321476A 2008-12-17 2008-12-17 測定方法及び測定装置 Expired - Fee Related JP5307528B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2008321476A JP5307528B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置
US12/633,107 US8345263B2 (en) 2008-12-17 2009-12-08 Measurement method and measurement apparatus that measure a surface figure of an aspheric surface based on an interference pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008321476A JP5307528B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置

Publications (3)

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JP2010145184A JP2010145184A (ja) 2010-07-01
JP2010145184A5 JP2010145184A5 (enExample) 2012-02-02
JP5307528B2 true JP5307528B2 (ja) 2013-10-02

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JP2008321476A Expired - Fee Related JP5307528B2 (ja) 2008-12-17 2008-12-17 測定方法及び測定装置

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JP (1) JP5307528B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5618727B2 (ja) * 2010-09-21 2014-11-05 キヤノン株式会社 形状測定法及び形状計測装置
CN114076670B (zh) * 2022-01-19 2022-07-08 中国科学院西安光学精密机械研究所 一种拼接主镜共相误差检测方法、系统及储存介质
CN115183697B (zh) * 2022-07-18 2024-07-16 西安交通大学 一种基于干涉光强信息的相位提取方法及系统
CN119246023B (zh) * 2024-12-04 2025-08-15 季华实验室 非球面反射镜的光轴检测装置及方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126305A (ja) * 1985-11-27 1987-06-08 Kyocera Corp 表面形状測定方法および装置
JPH03156305A (ja) * 1989-11-14 1991-07-04 Matsushita Electric Works Ltd 非球面形状測定装置
JPH03243804A (ja) * 1990-02-21 1991-10-30 Kyocera Corp 非球面の形状測定方法
JPH0448201A (ja) * 1990-06-15 1992-02-18 Olympus Optical Co Ltd 干渉測定装置
JP2000097650A (ja) * 1998-09-21 2000-04-07 Nikon Corp 非球面形状測定装置
JP2000097663A (ja) * 1998-09-21 2000-04-07 Nikon Corp 干渉計
JP2002181517A (ja) * 2000-12-11 2002-06-26 Ricoh Co Ltd 曲面形状測定方法及び装置
US6781700B2 (en) * 2001-06-20 2004-08-24 Kuechel Michael Scanning interferometer for aspheric surfaces and wavefronts
JP4312602B2 (ja) * 2001-11-16 2009-08-12 ザイゴ コーポレイション 非球面表面および波面の走査干渉計
US7218403B2 (en) * 2002-06-26 2007-05-15 Zygo Corporation Scanning interferometer for aspheric surfaces and wavefronts
JP2004045168A (ja) * 2002-07-11 2004-02-12 Nikon Corp 非球面形状計測方法
US7495773B2 (en) * 2006-02-24 2009-02-24 Zygo Corporation In situ determination of pixel mapping in interferometry

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Publication number Publication date
JP2010145184A (ja) 2010-07-01

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