JP5247439B2 - 半導体構造および半導体構造を製造する方法 - Google Patents
半導体構造および半導体構造を製造する方法 Download PDFInfo
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- JP5247439B2 JP5247439B2 JP2008518877A JP2008518877A JP5247439B2 JP 5247439 B2 JP5247439 B2 JP 5247439B2 JP 2008518877 A JP2008518877 A JP 2008518877A JP 2008518877 A JP2008518877 A JP 2008518877A JP 5247439 B2 JP5247439 B2 JP 5247439B2
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- 239000004065 semiconductor Substances 0.000 title claims description 37
- 238000000034 method Methods 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000009792 diffusion process Methods 0.000 claims description 115
- 238000005253 cladding Methods 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 26
- 239000013078 crystal Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 150000004767 nitrides Chemical class 0.000 claims description 15
- 239000002244 precipitate Substances 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 7
- 239000012808 vapor phase Substances 0.000 claims description 7
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 7
- 230000001902 propagating effect Effects 0.000 claims description 5
- 239000013598 vector Substances 0.000 claims description 5
- 238000009825 accumulation Methods 0.000 claims description 4
- 238000000137 annealing Methods 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 230000008021 deposition Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 141
- 238000000605 extraction Methods 0.000 description 7
- 238000011065 in-situ storage Methods 0.000 description 7
- 238000011066 ex-situ storage Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
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- 230000006911 nucleation Effects 0.000 description 4
- 238000010899 nucleation Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000010287 polarization Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
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- 238000000926 separation method Methods 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
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- 230000000593 degrading effect Effects 0.000 description 1
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- 238000001953 recrystallisation Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
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- 230000008719 thickening Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Semiconductor Lasers (AREA)
Description
Claims (8)
- ウルツ鉱結晶構造を有し、(0001)配向の半導体基板(2,3)上で気相成長させるIII族金属窒化物で形成され、
下部クラッド層(4)と、
前記下部クラッド層より上方に成長させた上部平面(9)を有し、格子定数が前記下部クラッド層と同じである上部クラッド層(5)と、
半導体構造(1)内に伝播する光を拡散する、下部クラッド層(4)と上部クラッド層(5)との間に位置し、光を発生しない拡散領域(6,7)と、
前記上部クラッド層(5)上に成長させた発光層と、を含み、
前記拡散領域は、前記拡散領域と前記下部クラッド層及び前記上部クラッド層との間に光拡散界面を形成するために、前記下部クラッド層及び前記上部クラッド層とは異なる屈折率と、非平面とを有する半導体構造(1)であって、
前記拡散領域は、拡散領域内の歪みを誘発転位部の形成を防ぐように、組成および厚みが選択されている複数の拡散層(6,7)と、拡散効率を更に高めるために屈折率が異なる隣接する拡散層(6,7)とを含み、
前記下部クラッド層および上部クラッド層は、同じ材料であり、
前記拡散層(6,7)は、前記下部クラッド層および上部クラッド層(4,5)に格子不整合であり、前記各拡散層の厚みは、Matthews−Blakeslee臨界厚みより小さく、拡散層内での歪み蓄積を防ぐために、2つの隣接する拡散層のうちの一方は、クラッド層(4,5)との正の格子不整合であり、他方は、クラッド層との負の格子不整合であり、
前記臨界厚みは、前記拡散層内の貫通転位/ミスフィット転位構成のエネルギーを考慮することによって算出され、
臨界厚みh c ≒b/ε m =a 2 /Δaで表され、
bは、バーガースベクトルの大きさであり、ε m は、ミスフィットパラメータであり、aは、面内格子定数であり、Δaは、層の面内格子定数の差である、半導体構造(1)。 - 前記III族金属窒化物は、AlxGa1−x−yInyNの形であり、式中、0≦x≦1、0≦y≦1である、請求項1に記載の半導体構造(1)。
- 前記下部クラッド層および前記拡散層は、結晶の面指数が(0001)以外であり、方向指数が{1−100}であるファセットを有する上面を有する、請求項1又は2に記載の半導体構造(1)。
- ウルツ鉱結晶構造を有し、(0001)配向の半導体基板上で気相成長させるIII族金属窒化物で形成され、
下部クラッド層(4)を気相成長させるステップと、
前記下部クラッド層とは異なる屈折率と、非平面とを有し、半導体構造(1)内に伝播する光を拡散し、光を発生しない拡散領域(6,7)を下部クラッド層より上方に気相で成長させるステップと、
上部平面(9)と、拡散領域とは異なる屈折率と、下部クラッド層と同じ格子定数とを有する上部クラッド層を、拡散領域より上方に気相成長させるステップとを含む半導体構造(1)を製造する方法であって、
前記拡散領域を成長させるステップは、拡散効率を更に高めるために、層界面での歪みを誘発する転位部の形成を防ぐように組成および厚みが選択されている複数の拡散層(6,7)と、屈折率が異なる隣接する拡散層とを成長させるステップを含み、
前記下部クラッド層および上部クラッド層は、同じ材料であり、
前記拡散層は成長し、各々が、クラッド層(4,5)と異なる格子定数およびMatthews−Blakesleeより小さい臨界厚みを有し、前記拡散層内での歪み蓄積を防ぐために、2つの隣接する拡散層(6,7)のうちの一方は、クラッド層(4,5)より大きい格子定数を有し、他方は、クラッド層より小さい格子定数を有し、
前記上部クラッド層上には発光層が成長され、
前記臨界厚みは、前記拡散層内の貫通転位/ミスフィット転位構成のエネルギーを考慮することによって算出され、
臨界厚みh c ≒b/ε m =a 2 /Δaで表され、
bは、バーガースベクトルの大きさであり、ε m は、ミスフィットパラメータであり、aは、面内格子定数であり、Δaは、層の面内格子定数の差である、ことを特徴とする方法。 - 前記III族金属窒化物は、AlxGa1−x−yInyNの形であり、式中、0≦x≦1、0≦y≦1であることを特徴とする、請求項4に記載の方法。
- 前記下部クラッド層および前記拡散層は成長し、結晶の面指数が(0001)以外であり、方向指数が{1−100}であるファセットを有する上面を有することを特徴とする、請求項4又は5に記載の方法。
- 前記下部クラッド層の成長は、(0001)配向面上で、0.1〜1.5μmの高さおよび107〜108cm−2の表面密度を有する沈殿物(14)を形成するステップを含むことを特徴とする、請求項4に記載の方法。
- 前記沈殿物(14)は、450〜700℃の温度で実施される一連の短い低温蒸着することと、その後の900〜1150℃の温度で高温層をアニールすることを含む処理で形成されることを特徴とする、請求項7に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20050707A FI118196B (fi) | 2005-07-01 | 2005-07-01 | Puolijohderakenne ja puolijohderakenteen valmistusmenetelmä |
FI20050707 | 2005-07-01 | ||
PCT/FI2006/000220 WO2007003684A1 (en) | 2005-07-01 | 2006-06-20 | Semiconductor structure and method of manufacturing a semiconductor structure |
Publications (3)
Publication Number | Publication Date |
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JP2008545261A JP2008545261A (ja) | 2008-12-11 |
JP2008545261A5 JP2008545261A5 (ja) | 2012-05-17 |
JP5247439B2 true JP5247439B2 (ja) | 2013-07-24 |
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JP2008518877A Expired - Fee Related JP5247439B2 (ja) | 2005-07-01 | 2006-06-20 | 半導体構造および半導体構造を製造する方法 |
Country Status (10)
Country | Link |
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US (2) | US7763904B2 (ja) |
EP (1) | EP1908122A4 (ja) |
JP (1) | JP5247439B2 (ja) |
KR (1) | KR101238310B1 (ja) |
CN (1) | CN100568560C (ja) |
FI (1) | FI118196B (ja) |
HK (1) | HK1124172A1 (ja) |
RU (1) | RU2391746C2 (ja) |
TW (1) | TWI390724B (ja) |
WO (1) | WO2007003684A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008182069A (ja) * | 2007-01-25 | 2008-08-07 | Toshiba Corp | 半導体発光素子 |
TWI321366B (en) * | 2007-02-09 | 2010-03-01 | Huga Optotech Inc | Epi-structure with uneven multi-quantum well and the method thereof |
DE102008035784A1 (de) * | 2008-07-31 | 2010-02-11 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip und Verfahren zu dessen Herstellung |
US8129205B2 (en) * | 2010-01-25 | 2012-03-06 | Micron Technology, Inc. | Solid state lighting devices and associated methods of manufacturing |
DE102011012925A1 (de) * | 2011-03-03 | 2012-09-06 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines optoelektronischen Halbleiterchips |
RU2485630C2 (ru) * | 2011-08-04 | 2013-06-20 | Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования Томский государственный университет систем управления и радиоэлектроники | Способ изготовления светодиода |
US9269858B2 (en) * | 2011-08-31 | 2016-02-23 | Micron Technology, Inc. | Engineered substrates for semiconductor devices and associated systems and methods |
JP7094082B2 (ja) * | 2017-06-14 | 2022-07-01 | 日本ルメンタム株式会社 | 光半導体素子、光サブアセンブリ、及び光モジュール |
CN109143764A (zh) * | 2018-11-05 | 2019-01-04 | 成都菲斯特科技有限公司 | 成像结构、投影屏幕及投影系统 |
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DE19629920B4 (de) * | 1995-08-10 | 2006-02-02 | LumiLeds Lighting, U.S., LLC, San Jose | Licht-emittierende Diode mit einem nicht-absorbierenden verteilten Braggreflektor |
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JP2001102690A (ja) * | 1999-09-29 | 2001-04-13 | Toshiba Corp | 窒化物系半導体レーザ装置 |
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DE10033496A1 (de) * | 2000-07-10 | 2002-01-31 | Osram Opto Semiconductors Gmbh | Halbleiterchip für die Optoelektronik |
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2005
- 2005-07-01 FI FI20050707A patent/FI118196B/fi not_active IP Right Cessation
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2006
- 2006-06-20 EP EP06764446A patent/EP1908122A4/en not_active Withdrawn
- 2006-06-20 CN CNB200680023943XA patent/CN100568560C/zh not_active Expired - Fee Related
- 2006-06-20 KR KR1020087002038A patent/KR101238310B1/ko not_active IP Right Cessation
- 2006-06-20 WO PCT/FI2006/000220 patent/WO2007003684A1/en active Application Filing
- 2006-06-20 JP JP2008518877A patent/JP5247439B2/ja not_active Expired - Fee Related
- 2006-06-20 US US11/988,055 patent/US7763904B2/en not_active Expired - Fee Related
- 2006-06-20 RU RU2008102874/28A patent/RU2391746C2/ru not_active IP Right Cessation
- 2006-06-26 TW TW095122874A patent/TWI390724B/zh not_active IP Right Cessation
-
2008
- 2008-12-10 HK HK08113431.2A patent/HK1124172A1/xx unknown
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2010
- 2010-07-02 US US12/829,466 patent/US8062913B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FI20050707A (fi) | 2007-01-02 |
US20100314662A1 (en) | 2010-12-16 |
EP1908122A4 (en) | 2013-03-27 |
CN100568560C (zh) | 2009-12-09 |
US20090127574A1 (en) | 2009-05-21 |
WO2007003684A1 (en) | 2007-01-11 |
RU2391746C2 (ru) | 2010-06-10 |
EP1908122A1 (en) | 2008-04-09 |
US8062913B2 (en) | 2011-11-22 |
TW200705657A (en) | 2007-02-01 |
RU2008102874A (ru) | 2009-08-10 |
JP2008545261A (ja) | 2008-12-11 |
HK1124172A1 (en) | 2009-07-03 |
CN101213676A (zh) | 2008-07-02 |
TWI390724B (zh) | 2013-03-21 |
US7763904B2 (en) | 2010-07-27 |
FI20050707A0 (fi) | 2005-07-01 |
FI118196B (fi) | 2007-08-15 |
KR101238310B1 (ko) | 2013-02-28 |
KR20080034441A (ko) | 2008-04-21 |
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