JP5233535B2 - 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 - Google Patents
撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 Download PDFInfo
- Publication number
- JP5233535B2 JP5233535B2 JP2008233948A JP2008233948A JP5233535B2 JP 5233535 B2 JP5233535 B2 JP 5233535B2 JP 2008233948 A JP2008233948 A JP 2008233948A JP 2008233948 A JP2008233948 A JP 2008233948A JP 5233535 B2 JP5233535 B2 JP 5233535B2
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- Prior art keywords
- light
- layer
- light receiving
- imaging
- concentration distribution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
- H10F39/021—Manufacture or treatment of image sensors covered by group H10F39/12 of image sensors having active layers comprising only Group III-V materials, e.g. GaAs, AlGaAs or InP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/10—Integrated devices
- H10F39/12—Image sensors
- H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F39/184—Infrared image sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/10—Semiconductor bodies
- H10F77/14—Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
- H10F77/146—Superlattices; Multiple quantum well structures
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Light Receiving Elements (AREA)
- Traffic Control Systems (AREA)
- Alarm Systems (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008233948A JP5233535B2 (ja) | 2008-09-11 | 2008-09-11 | 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 |
| PCT/JP2009/063246 WO2010029813A1 (ja) | 2008-09-11 | 2009-07-24 | 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 |
| US13/063,444 US8243139B2 (en) | 2008-09-11 | 2009-07-24 | Image pickup device, visibility support apparatus, night vision device, navigation support apparatus, and monitoring device |
| EP09812961.2A EP2328187B1 (en) | 2008-09-11 | 2009-07-24 | Image pickup device, visibility support apparatus, night vision device, navigation support apparatus, and monitoring device |
| US13/548,668 US8564666B2 (en) | 2008-09-11 | 2012-07-13 | Image pickup device, visibility support apparatus, night vision device, navigation support apparatus, and monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008233948A JP5233535B2 (ja) | 2008-09-11 | 2008-09-11 | 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011011131A Division JP4706805B2 (ja) | 2011-01-21 | 2011-01-21 | 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010067861A JP2010067861A (ja) | 2010-03-25 |
| JP2010067861A5 JP2010067861A5 (https=) | 2011-10-20 |
| JP5233535B2 true JP5233535B2 (ja) | 2013-07-10 |
Family
ID=42005074
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008233948A Expired - Fee Related JP5233535B2 (ja) | 2008-09-11 | 2008-09-11 | 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US8243139B2 (https=) |
| EP (1) | EP2328187B1 (https=) |
| JP (1) | JP5233535B2 (https=) |
| WO (1) | WO2010029813A1 (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4662188B2 (ja) | 2008-02-01 | 2011-03-30 | 住友電気工業株式会社 | 受光素子、受光素子アレイおよびそれらの製造方法 |
| JP5498662B2 (ja) * | 2008-03-26 | 2014-05-21 | 国立大学法人 東京大学 | 半導体装置および半導体装置の製造方法 |
| JP4743453B2 (ja) * | 2008-12-25 | 2011-08-10 | 住友電気工業株式会社 | 気体モニタリング装置、燃焼状態モニタリング装置、経年変化モニタリング装置、および不純物濃度モニタリング装置 |
| WO2010146903A1 (ja) * | 2009-06-15 | 2010-12-23 | シャープ株式会社 | 発光モジュール、照明装置、表示装置、およびテレビ受像装置 |
| JP5218476B2 (ja) * | 2010-06-03 | 2013-06-26 | 住友電気工業株式会社 | 半導体素子、光学センサ装置および半導体素子の製造方法 |
| JP2012015170A (ja) * | 2010-06-29 | 2012-01-19 | Sumitomo Electric Ind Ltd | 受光素子およびその製造方法 |
| JP5748176B2 (ja) * | 2011-11-01 | 2015-07-15 | 住友電気工業株式会社 | 受光素子、エピタキシャルウエハおよびその製造方法 |
| EP2713409B1 (en) * | 2012-09-27 | 2020-08-26 | ams AG | Photodiode with a field electrode for reducing the space charge region |
| US20140217540A1 (en) * | 2013-02-04 | 2014-08-07 | Teledyne Scientific & Imaging, Llc | Fully depleted diode passivation active passivation architecture |
| JP6454981B2 (ja) * | 2014-04-24 | 2019-01-23 | 住友電気工業株式会社 | 半導体積層体および受光素子 |
| JP6877815B2 (ja) * | 2014-10-17 | 2021-05-26 | 日本無線株式会社 | 画像生成装置 |
| US10126582B2 (en) * | 2015-07-07 | 2018-11-13 | B. G. Negev Technologies and Applications, Ltd., at Ben-Gurion University | SWIR to visible up-conversion optical system |
| JP2018190798A (ja) * | 2017-04-28 | 2018-11-29 | 住友電気工業株式会社 | 赤外線検知半導体デバイス |
| US10461118B2 (en) | 2017-12-15 | 2019-10-29 | Atomera Incorporated | Method for making CMOS image sensor including photodiodes with overlying superlattices to reduce crosstalk |
| US10276625B1 (en) * | 2017-12-15 | 2019-04-30 | Atomera Incorporated | CMOS image sensor including superlattice to enhance infrared light absorption |
| US10396223B2 (en) | 2017-12-15 | 2019-08-27 | Atomera Incorporated | Method for making CMOS image sensor with buried superlattice layer to reduce crosstalk |
| US10304881B1 (en) | 2017-12-15 | 2019-05-28 | Atomera Incorporated | CMOS image sensor with buried superlattice layer to reduce crosstalk |
| US10361243B2 (en) | 2017-12-15 | 2019-07-23 | Atomera Incorporated | Method for making CMOS image sensor including superlattice to enhance infrared light absorption |
| US10355151B2 (en) | 2017-12-15 | 2019-07-16 | Atomera Incorporated | CMOS image sensor including photodiodes with overlying superlattices to reduce crosstalk |
| US11101119B2 (en) * | 2018-12-20 | 2021-08-24 | Elbit Systems Of America, Llc | Usage and temperature compensation of performance parameters for night vision device |
| US11641003B2 (en) * | 2019-12-03 | 2023-05-02 | Northwestern University | Methods of fabricating planar infrared photodetectors |
| TWI832715B (zh) * | 2023-03-02 | 2024-02-11 | 聯亞光電工業股份有限公司 | 半導體元件 |
| US12334321B1 (en) * | 2024-08-07 | 2025-06-17 | L3Harris Technologies, Inc. | And manufacturing methods of SWIR I2TUBE via heterogeneous wafer integration |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2708409B2 (ja) * | 1986-06-20 | 1998-02-04 | 株式会社日立製作所 | 半導体受光素子およびその製造方法 |
| JPH0338887A (ja) * | 1989-07-06 | 1991-02-19 | Fujitsu Ltd | 半導体受光素子 |
| JPH05160426A (ja) * | 1991-12-06 | 1993-06-25 | Nec Corp | 半導体受光素子 |
| JPH05160429A (ja) * | 1991-12-09 | 1993-06-25 | Nec Corp | 赤外線検知器 |
| JPH07302928A (ja) | 1994-05-09 | 1995-11-14 | Mitsubishi Electric Corp | 半導体受光素子ならびに半導体受光素子アレイおよび画像処理装置ならびに画像処理方法 |
| JP4019182B2 (ja) | 1995-07-19 | 2007-12-12 | 本田技研工業株式会社 | 視覚装置 |
| JPH09219563A (ja) | 1996-02-09 | 1997-08-19 | Hitachi Ltd | 半導体光素子とそれを用いた応用システム |
| JP2001144278A (ja) | 1999-11-12 | 2001-05-25 | Nippon Sheet Glass Co Ltd | 受光素子アレイ |
| JP4688196B2 (ja) | 2001-03-23 | 2011-05-25 | スタンレー電気株式会社 | 自動車用暗視システム |
| JP2004350228A (ja) | 2003-05-26 | 2004-12-09 | Denso Corp | 車両用夜間後方視界支援システム |
| JP5008874B2 (ja) * | 2005-02-23 | 2012-08-22 | 住友電気工業株式会社 | 受光素子と受光素子を用いた光通信用受信モジュールおよび受光素子を用いた計測器 |
| JP4956944B2 (ja) * | 2005-09-12 | 2012-06-20 | 三菱電機株式会社 | アバランシェフォトダイオード |
| JP2007201432A (ja) * | 2005-12-28 | 2007-08-09 | Sumitomo Electric Ind Ltd | 撮像装置、視界支援装置、暗視装置、航海支援装置および監視装置 |
| US7679059B2 (en) | 2006-04-19 | 2010-03-16 | Spectrasensors, Inc. | Measuring water vapor in hydrocarbons |
| JP2007324572A (ja) | 2006-05-02 | 2007-12-13 | Sumitomo Electric Ind Ltd | 受光素子アレイ、その製造方法、および光計測システム |
| US7608825B2 (en) * | 2006-12-14 | 2009-10-27 | Sumitomo Electric Industries, Ltd. | Image pickup device, vision enhancement apparatus, night-vision apparatus, navigation support apparatus, and monitoring apparatus |
| JP2008153311A (ja) * | 2006-12-14 | 2008-07-03 | Sumitomo Electric Ind Ltd | 半導体受光素子、視界支援装置および生体医療装置 |
| JP2008171885A (ja) * | 2007-01-09 | 2008-07-24 | Sumitomo Electric Ind Ltd | 半導体受光素子およびその製造方法 |
| JP2008205001A (ja) * | 2007-02-16 | 2008-09-04 | Sumitomo Electric Ind Ltd | 受光素子、センサおよび撮像装置 |
| JP5515162B2 (ja) * | 2007-03-23 | 2014-06-11 | 住友電気工業株式会社 | 半導体ウエハの製造方法 |
| JP2008288293A (ja) | 2007-05-16 | 2008-11-27 | Nippon Telegr & Teleph Corp <Ntt> | 半導体受光素子 |
| JP5195172B2 (ja) * | 2008-08-29 | 2013-05-08 | 住友電気工業株式会社 | 水分検出装置、生体中水分検出装置、自然産物中水分検出装置、および製品・材料中水分検出装置 |
| JP5233549B2 (ja) * | 2008-09-22 | 2013-07-10 | 住友電気工業株式会社 | 食品品質検査装置、食品成分検査装置、異物成分検査装置、食味検査装置および変移状態検査装置 |
-
2008
- 2008-09-11 JP JP2008233948A patent/JP5233535B2/ja not_active Expired - Fee Related
-
2009
- 2009-07-24 US US13/063,444 patent/US8243139B2/en active Active
- 2009-07-24 EP EP09812961.2A patent/EP2328187B1/en not_active Not-in-force
- 2009-07-24 WO PCT/JP2009/063246 patent/WO2010029813A1/ja not_active Ceased
-
2012
- 2012-07-13 US US13/548,668 patent/US8564666B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20110164136A1 (en) | 2011-07-07 |
| WO2010029813A1 (ja) | 2010-03-18 |
| EP2328187A1 (en) | 2011-06-01 |
| EP2328187B1 (en) | 2016-11-16 |
| US8564666B2 (en) | 2013-10-22 |
| JP2010067861A (ja) | 2010-03-25 |
| US20120274771A1 (en) | 2012-11-01 |
| US8243139B2 (en) | 2012-08-14 |
| EP2328187A4 (en) | 2014-08-06 |
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