JP5232360B2 - 半導体装置及びその製造方法 - Google Patents
半導体装置及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 55
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 239000010408 film Substances 0.000 claims description 122
- 238000000034 method Methods 0.000 claims description 57
- 239000000758 substrate Substances 0.000 claims description 44
- 229910052757 nitrogen Inorganic materials 0.000 claims description 26
- 239000013078 crystal Substances 0.000 claims description 24
- 238000005224 laser annealing Methods 0.000 claims description 21
- 238000000137 annealing Methods 0.000 claims description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- 239000002019 doping agent Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 230000004913 activation Effects 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000009825 accumulation Methods 0.000 claims description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims 1
- 230000000873 masking effect Effects 0.000 claims 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 43
- 229920005591 polysilicon Polymers 0.000 description 43
- 239000012535 impurity Substances 0.000 description 42
- 239000004973 liquid crystal related substance Substances 0.000 description 36
- 238000002425 crystallisation Methods 0.000 description 34
- 230000008025 crystallization Effects 0.000 description 30
- 229910021417 amorphous silicon Inorganic materials 0.000 description 22
- 229910052799 carbon Inorganic materials 0.000 description 21
- 239000002243 precursor Substances 0.000 description 21
- 238000002513 implantation Methods 0.000 description 18
- 230000008569 process Effects 0.000 description 17
- 239000011521 glass Substances 0.000 description 16
- 238000011109 contamination Methods 0.000 description 15
- 239000010410 layer Substances 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 13
- 239000000523 sample Substances 0.000 description 13
- 238000000206 photolithography Methods 0.000 description 11
- 230000001681 protective effect Effects 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 7
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 7
- 238000005468 ion implantation Methods 0.000 description 6
- 238000005499 laser crystallization Methods 0.000 description 6
- 239000013074 reference sample Substances 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000010408 sweeping Methods 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 229910052698 phosphorus Inorganic materials 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000010348 incorporation Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 239000012686 silicon precursor Substances 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000012925 reference material Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 230000003685 thermal hair damage Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
- H01L27/1274—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor
- H01L27/1285—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement using crystallisation of amorphous semiconductor or recrystallisation of crystalline semiconductor using control of the annealing or irradiation parameters, e.g. using different scanning direction or intensity for different transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02683—Continuous wave laser beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02691—Scanning of a beam
Description
国際電子デバイス学会予稿集(2001年)第747頁から第750頁(International Electron Devices Meeting (Washington DC, 2001) PP747-751)
(1)前駆半導体膜中または結晶化過程で取り込まれるC,N,O不純物は、いずれもTFTの移動度を低下させる。
(2)レーザアニールによる溶融と再結晶化の過程では、C,N,O不純物の取り込みと掃き出しが同時に起こっており、各不純物ごとに特徴的な濃度プロファイルのポリシリコン膜になる。すなわち、C不純物では取り込みの効果が大きく、N,O不純物では掃き出しの効果から表面と界面の濃度が高いプロファイルとなる。
(3)ポリシリコンと下地絶縁膜との界面に蓄積したN不純物が、ドーパントの活性化アニールにおける結晶性の回復力を高めることによって、高移動度の低抵抗半導体膜を形成させる。なお、レーザアニール方法として特にCWレーザを用いることは界面にN蓄積させるための効率の良い方法となっている。
UDC・・・下地膜
PCF・・・前駆半導体膜
PSI・・・ポリシリコン膜
POI・・・SiO保護膜
S・・・ソース
D・・・ドレイン
GI・・・ゲート絶縁膜
GT・・・ゲート電極
LI・・・層間絶縁膜
SIN・・・SiN保護膜
Al・・・Al配線
CWD・・・CWレーザ光照射領域
PXD・・・画素領域
GCR・・・ゲート線駆動回路領域
DCR・・・信号線駆動回路領域
ELD・・・端子領域
CUT・・・基板切断位置
DEF・・・偏光板
ITO・・・対向電極
CF・・・カラーフィルタ
SEA・・・シール材
LO・・・配向膜
LIQ・・・液晶
CIR・・・周辺回路群
PXL・・・画素回路
GSR・・・ゲートシフトレジスタ
BKL・・・バックライト
DSR・・・ドレインシフトレジスタ
SHD・・・シールドフレーム
SUBX・・・封止基板
PAR・・・画素領域
DDR・・・ドレイン側駆動回路
GDR・・・ゲート側駆動回路
SUB・・・絶縁体(ガラス)基板
PLB・・・プリント基板
CTL・・・DDR、GDRに搭載できなかった周辺回路
CAS・・・カソード。
Claims (2)
- 基板と、該基板の上に有する下地絶縁膜と、前記下地絶縁膜の上に形成された結晶性を有するシリコンを主成分とした半導体層からなる積層構造を有する画像表示装置の製造方法において、
前記下地絶縁膜との界面近傍に高濃度の窒素が蓄積している前記半導体層に,n型またはp型のドーパントをイオン注入したのち、
活性化のアニールによって低抵抗のn型またはp型の半導体層とし、
前記低抵抗としたn型またはp型の半導体層を、少なくとも薄膜トランジスタのソースとドレインの一部に用い、
前記薄膜トランジスタのソース領域とドレイン領域、またはチャネル領域とソース領域およびドレイン領域の間で、ソース領域とドレイン領域より低いドーパント濃度の領域の、少なくとも一部の領域にはレーザアニール前にイオン注入された窒素が下地絶縁膜との界面に蓄積されており、かつ前記結晶性を有するシリコンを主成分とした半導体結晶層に窒素を注入する前にチャネル領域にマスクをして窒素注入を防ぐことを特徴とする画像表示装置の製造方法。 - 請求項1において、
前記薄膜トランジスタのソース領域とドレイン領域、またはチャネル領域とソース領域イン領域の間で、ソース領域とドレイン領域より低いドーパント濃度の領域の、少なくとも一部の下地界面における窒素の蓄積が、チャネル領域部分の窒素蓄積より高濃度であることを特徴とする画像表示装置の製造方法。
Priority Applications (2)
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JP2006000618A JP5232360B2 (ja) | 2006-01-05 | 2006-01-05 | 半導体装置及びその製造方法 |
US11/620,154 US7902003B2 (en) | 2006-01-05 | 2007-01-05 | Semiconductor device and method for manufacturing the same |
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JP2006000618A JP5232360B2 (ja) | 2006-01-05 | 2006-01-05 | 半導体装置及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007184358A JP2007184358A (ja) | 2007-07-19 |
JP5232360B2 true JP5232360B2 (ja) | 2013-07-10 |
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JP (1) | JP5232360B2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG156537A1 (en) * | 2008-04-09 | 2009-11-26 | Toshiba Matsushita Display Tec | Methods of laser annealing a semiconductor layer and semiconductor devices produced thereby |
KR20110114089A (ko) * | 2010-04-12 | 2011-10-19 | 삼성모바일디스플레이주식회사 | 박막 트랜지스터, 이의 제조 방법 및 이를 포함하는 표시 장치 |
US20120001179A1 (en) * | 2010-07-02 | 2012-01-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
JP2020043103A (ja) * | 2018-09-06 | 2020-03-19 | キオクシア株式会社 | 半導体記憶装置およびその製造方法 |
JP2023131583A (ja) * | 2022-03-09 | 2023-09-22 | 株式会社ブイ・テクノロジー | レーザアニール装置およびレーザアニール方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3103385B2 (ja) * | 1991-01-25 | 2000-10-30 | 株式会社東芝 | ポリシリコン薄膜半導体装置 |
JP3134910B2 (ja) * | 1993-09-07 | 2001-02-13 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法および液晶ディスプレイ用集積回路の作製方法 |
JP3897826B2 (ja) * | 1994-08-19 | 2007-03-28 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型の表示装置 |
JPH09293793A (ja) * | 1996-04-26 | 1997-11-11 | Mitsubishi Electric Corp | 薄膜トランジスタを有する半導体装置およびその製造方法 |
JP2002368009A (ja) * | 2001-06-05 | 2002-12-20 | Matsushita Electric Ind Co Ltd | 薄膜トランジスタおよび液晶表示装置 |
JP4474108B2 (ja) * | 2002-09-02 | 2010-06-02 | 株式会社 日立ディスプレイズ | 表示装置とその製造方法および製造装置 |
JP2006019466A (ja) * | 2004-07-01 | 2006-01-19 | Hitachi Displays Ltd | 薄膜半導体装置とその製造方法、およびこの薄膜半導体装置を用いた画像表示装置 |
TWI287826B (en) * | 2005-06-30 | 2007-10-01 | Chunghwa Picture Tubes Ltd | Method of forming thin film transistor and method of repairing defects in polysilicon layer |
-
2006
- 2006-01-05 JP JP2006000618A patent/JP5232360B2/ja active Active
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- 2007-01-05 US US11/620,154 patent/US7902003B2/en not_active Expired - Fee Related
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Publication number | Publication date |
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US7902003B2 (en) | 2011-03-08 |
JP2007184358A (ja) | 2007-07-19 |
US20070155070A1 (en) | 2007-07-05 |
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