JP5229270B2 - Iii族窒化物半導体発光素子の製造方法 - Google Patents
Iii族窒化物半導体発光素子の製造方法 Download PDFInfo
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- JP5229270B2 JP5229270B2 JP2010111947A JP2010111947A JP5229270B2 JP 5229270 B2 JP5229270 B2 JP 5229270B2 JP 2010111947 A JP2010111947 A JP 2010111947A JP 2010111947 A JP2010111947 A JP 2010111947A JP 5229270 B2 JP5229270 B2 JP 5229270B2
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
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- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/38—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape
- H01L33/382—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes with a particular shape the electrode extending partially in or entirely through the semiconductor body
Description
102、202:n型層
103、203:発光層
104、204:p型層
105、205:n電極
106、206:p電極
107、207:透明電極
208:マスク
Claims (7)
- III 族窒化物半導体からなるn型層表面にストライプ状の凹凸形状を有し、その凹凸形状を有するn型層表面上に、前記凹凸形状に沿ってうねった形状のIII 族窒化物半導体からなる発光層をMOCVD法によって形成するIII 族窒化物半導体発光素子の製造方法において、
発光層は、原料ガスをストライプ方向に平行な方向に流しながら形成する、
ことを特徴とするIII 族窒化物半導体発光素子の製造方法。 - 前記MOCVD法は、減圧MOCVD法である、ことを特徴とする請求項1に記載のIII 族窒化物半導体発光素子の製造方法。
- 前記凹凸形状は、ストライプ方向に垂直な方向における断面がノコギリ歯状である、ことを特徴とする請求項1または請求項2に記載のIII 族窒化物半導体発光素子の製造方法。
- 前記ノコギリ歯状を構成する面は、すべて(11−22)面である、ことを特徴とする請求項3に記載のIII 族窒化物半導体発光素子の製造方法。
- 前記n型層は、ストライプ状の凹凸形状を有した基板上に、その凹凸形状に沿ってうねった形状に形成する、ことを特徴とする請求項1ないし請求項4のいずれか1項に記載のIII 族窒化物半導体発光素子の製造方法。
- 前記基板はSi基板であり、
そのSi基板表面にストライプ状のマスクを形成し、その後、Si基板表面を異方性ウェットエッチングすることで前記凹凸形状を形成する、ことを特徴とする請求項5に記載のIII 族窒化物半導体発光素子の製造方法。 - 前記n型層は、第1のn型層と第2のn型層で構成され、
基板上に前記第1のn型層を形成し、その第1のn型層上にストライプ状のマスクを形成し、その後、前記第1のn型層上に前記マスクを用いて前記第2のn型層を選択成長させることで、表面に前記凹凸形状を有する前記第2のn型層を形成する、ことを特徴とする請求項1ないし請求項4のいずれか1項に記載のIII 族窒化物半導体発光素子の製造方法。
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JP2010111947A JP5229270B2 (ja) | 2010-05-14 | 2010-05-14 | Iii族窒化物半導体発光素子の製造方法 |
US13/067,142 US8389304B2 (en) | 2010-05-14 | 2011-05-11 | Method for producing group III nitride semiconductor light-emitting device |
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JP2010111947A JP5229270B2 (ja) | 2010-05-14 | 2010-05-14 | Iii族窒化物半導体発光素子の製造方法 |
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JP5229270B2 true JP5229270B2 (ja) | 2013-07-03 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019197857A (ja) * | 2018-05-11 | 2019-11-14 | パナソニックIpマネジメント株式会社 | 発光ダイオード素子、及び発光ダイオード素子の製造方法 |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5533791B2 (ja) * | 2011-06-20 | 2014-06-25 | 豊田合成株式会社 | Iii族窒化物半導体発光素子の製造方法 |
CN103137803B (zh) | 2011-12-03 | 2015-08-26 | 清华大学 | 发光二极管 |
CN103137804B (zh) | 2011-12-03 | 2015-09-30 | 清华大学 | 发光二极管 |
JP5980668B2 (ja) * | 2011-12-03 | 2016-08-31 | ツィンファ ユニバーシティ | 発光ダイオード |
JP5980669B2 (ja) * | 2011-12-03 | 2016-08-31 | ツィンファ ユニバーシティ | 発光ダイオード |
CN103137811B (zh) | 2011-12-03 | 2015-11-25 | 清华大学 | 发光二极管 |
CN103137816B (zh) * | 2011-12-03 | 2015-09-30 | 清华大学 | 发光二极管 |
JP5980667B2 (ja) * | 2011-12-03 | 2016-08-31 | ツィンファ ユニバーシティ | 発光ダイオード |
CN103137812B (zh) | 2011-12-03 | 2015-11-25 | 清华大学 | 发光二极管 |
JP2013232478A (ja) * | 2012-04-27 | 2013-11-14 | Toshiba Corp | 半導体発光装置及びその製造方法 |
CN102842659B (zh) * | 2012-08-17 | 2015-12-09 | 圆融光电科技有限公司 | 一种氮化镓系半导体发光器件外延片的制作方法 |
CN102842660B (zh) * | 2012-08-17 | 2015-11-11 | 圆融光电科技有限公司 | 一种氮化镓基发光二极管外延片结构及其制备方法 |
JP2014060198A (ja) * | 2012-09-14 | 2014-04-03 | Oki Electric Ind Co Ltd | 窒化物半導体発光ダイオードの製造方法、及び窒化物半導体発光ダイオード |
JP6486726B2 (ja) * | 2015-03-10 | 2019-03-20 | シチズン時計株式会社 | 発光モジュール |
GB2540385B (en) * | 2015-07-15 | 2017-10-11 | C4 Carbides Ltd | Improvements in or relating to tool blades and their manufacture |
CN105489724B (zh) * | 2016-01-18 | 2018-11-20 | 厦门市三安光电科技有限公司 | 一种半极性led外延结构及其制备方法 |
CN110571311B (zh) * | 2019-07-30 | 2021-12-14 | 中国科学技术大学 | 一种多量子阱结构、光电器件外延片及光电器件 |
CN114141920B (zh) * | 2021-11-19 | 2023-08-11 | 厦门市三安光电科技有限公司 | 发光二极管及其制备方法 |
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JPH1023846A (ja) * | 1996-07-09 | 1998-01-27 | Sachie Suzuki | 釣り針の糸端色付き |
JPH11340153A (ja) * | 1998-05-28 | 1999-12-10 | Toyoda Gosei Co Ltd | 化合物半導体の気相成長装置 |
JP2000208874A (ja) * | 1999-01-12 | 2000-07-28 | Sony Corp | 窒化物半導体と、窒化物半導体発光装置と、窒化物半導体の製造方法と、半導体発光装置の製造方法 |
JP3705142B2 (ja) * | 2001-03-27 | 2005-10-12 | ソニー株式会社 | 窒化物半導体素子及びその作製方法 |
JP2003092426A (ja) | 2001-09-18 | 2003-03-28 | Nichia Chem Ind Ltd | 窒化物系化合物半導体発光素子およびその製造方法 |
JP2005011944A (ja) * | 2003-06-18 | 2005-01-13 | Sumitomo Electric Ind Ltd | 発光装置 |
JP2007081368A (ja) * | 2004-06-14 | 2007-03-29 | Mitsubishi Cable Ind Ltd | 窒化物系半導体発光素子 |
WO2007098215A2 (en) * | 2006-02-17 | 2007-08-30 | The Regents Of The University Of California | Method for growth of semipolar (al,in,ga,b)n optoelectronic devices |
JP2007266577A (ja) * | 2006-03-03 | 2007-10-11 | Matsushita Electric Ind Co Ltd | 窒化物半導体装置及びその製造方法 |
JP2008130606A (ja) | 2006-11-16 | 2008-06-05 | Sony Corp | 半導体発光素子、半導体発光素子の製造方法、光源セルユニット、バックライト、照明装置、ディスプレイ、電子機器、半導体素子および半導体素子の製造方法 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2019197857A (ja) * | 2018-05-11 | 2019-11-14 | パナソニックIpマネジメント株式会社 | 発光ダイオード素子、及び発光ダイオード素子の製造方法 |
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JP2011243616A (ja) | 2011-12-01 |
US8389304B2 (en) | 2013-03-05 |
US20110281381A1 (en) | 2011-11-17 |
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