JP5226167B2 - テーパ型平面光導波路 - Google Patents
テーパ型平面光導波路 Download PDFInfo
- Publication number
- JP5226167B2 JP5226167B2 JP2001538851A JP2001538851A JP5226167B2 JP 5226167 B2 JP5226167 B2 JP 5226167B2 JP 2001538851 A JP2001538851 A JP 2001538851A JP 2001538851 A JP2001538851 A JP 2001538851A JP 5226167 B2 JP5226167 B2 JP 5226167B2
- Authority
- JP
- Japan
- Prior art keywords
- waveguide
- waveguide segment
- substrate
- grating
- optical device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12102—Lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12083—Constructional arrangements
- G02B2006/12119—Bend
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
- G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/438,886 | 1999-11-12 | ||
| US09/438,886 US6293688B1 (en) | 1999-11-12 | 1999-11-12 | Tapered optical waveguide coupler |
| PCT/US2000/026639 WO2001037018A1 (en) | 1999-11-12 | 2000-09-27 | Tapered planer optical waveguide |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003515253A JP2003515253A (ja) | 2003-04-22 |
| JP2003515253A5 JP2003515253A5 (enExample) | 2005-12-22 |
| JP5226167B2 true JP5226167B2 (ja) | 2013-07-03 |
Family
ID=23742427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001538851A Expired - Fee Related JP5226167B2 (ja) | 1999-11-12 | 2000-09-27 | テーパ型平面光導波路 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6293688B1 (enExample) |
| EP (1) | EP1230570A1 (enExample) |
| JP (1) | JP5226167B2 (enExample) |
| WO (1) | WO2001037018A1 (enExample) |
Families Citing this family (79)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US6952504B2 (en) * | 2001-12-21 | 2005-10-04 | Neophotonics Corporation | Three dimensional engineering of planar optical structures |
| US7106917B2 (en) | 1998-11-13 | 2006-09-12 | Xponent Photonics Inc | Resonant optical modulators |
| US6684019B1 (en) * | 1999-02-23 | 2004-01-27 | E.I. Du Pont De Nemours And Company | Planar polymeric waveguide devices with temperature dependence control features |
| AU2001239794A1 (en) | 2000-02-17 | 2001-08-27 | Cquint Communications Corporation | Resonant optical filters |
| JP3941334B2 (ja) * | 2000-04-20 | 2007-07-04 | 株式会社日立製作所 | 光伝送モジュールおよびそれを用いた光通信システム |
| US6519393B2 (en) * | 2000-08-10 | 2003-02-11 | Bruce Lee Booth | Coupling of optical waveguide to optical waveguide devices |
| US6498873B1 (en) * | 2000-08-31 | 2002-12-24 | Agere Systems Inc. | Photo detector assembly |
| JP3766953B2 (ja) * | 2000-09-13 | 2006-04-19 | 日本電信電話株式会社 | 光回路 |
| ATE527104T1 (de) | 2000-10-26 | 2011-10-15 | Neophotonics Corp | Mehrschichtige optische strukturen |
| US20030032285A1 (en) * | 2001-08-13 | 2003-02-13 | Beguin Alain M.J. | Vertical taper fabrication process of a narrow band wavelength division multiplexer |
| CN102621630B (zh) * | 2001-10-30 | 2015-03-25 | Hoya美国公司 | 使用光学功率横向传送的光学接合设备和方法 |
| US6600847B2 (en) * | 2001-11-05 | 2003-07-29 | Quantum Photonics, Inc | Semiconductor optical device with improved efficiency and output beam characteristics |
| US7023886B2 (en) * | 2001-11-08 | 2006-04-04 | Intel Corporation | Wavelength tunable optical components |
| US20030142388A1 (en) * | 2002-01-31 | 2003-07-31 | Sergey Frolov | Waveguide optical amplifier |
| US6934427B2 (en) * | 2002-03-12 | 2005-08-23 | Enablence Holdings Llc | High density integrated optical chip with low index difference waveguide functions |
| US7378356B2 (en) * | 2002-03-16 | 2008-05-27 | Springworks, Llc | Biased pulse DC reactive sputtering of oxide films |
| US6884327B2 (en) * | 2002-03-16 | 2005-04-26 | Tao Pan | Mode size converter for a planar waveguide |
| GB2388917A (en) * | 2002-05-25 | 2003-11-26 | Bookham Technology Plc | Semiconductor optical waveguide with a varying taper |
| US6813432B2 (en) * | 2002-05-31 | 2004-11-02 | Intel Corporation | Method for producing vertical tapers in optical waveguides by over polishing |
| US6989284B2 (en) * | 2002-05-31 | 2006-01-24 | Intel Corporation | Fabrication of a waveguide taper through ion implantation |
| US6956983B2 (en) * | 2002-05-31 | 2005-10-18 | Intel Corporation | Epitaxial growth for waveguide tapering |
| US6935792B2 (en) * | 2002-10-21 | 2005-08-30 | General Electric Company | Optoelectronic package and fabrication method |
| US7099535B2 (en) * | 2002-12-31 | 2006-08-29 | Corning Incorporated | Small mode-field fiber lens |
| WO2004068542A2 (en) * | 2003-01-24 | 2004-08-12 | Xponent Photonics Inc | Etched-facet semiconductor optical component with integrated end-coupled waveguide and methods of fabrication and use thereof |
| US8728285B2 (en) | 2003-05-23 | 2014-05-20 | Demaray, Llc | Transparent conductive oxides |
| US6931180B2 (en) * | 2004-01-13 | 2005-08-16 | Lucent Technologies Inc. | Method and apparatus for compactly coupling an optical fiber and a planar optical waveguide |
| US20050185893A1 (en) * | 2004-02-20 | 2005-08-25 | Ansheng Liu | Method and apparatus for tapering an optical waveguide |
| US20050265418A1 (en) * | 2004-05-27 | 2005-12-01 | Nikonov Dmitri E | Surface-emitting laser with external cavity formed by a waveguide bragg grating |
| CN101931097B (zh) | 2004-12-08 | 2012-11-21 | 希莫菲克斯公司 | LiCoO2的沉积 |
| TWM286375U (en) * | 2005-08-08 | 2006-01-21 | Inventec Corp | Light guiding structure |
| WO2007044554A2 (en) * | 2005-10-07 | 2007-04-19 | Lee, Michael, J. | Amorphous silicon waveguides on iii/v substrates with a barrier layer |
| US20070110379A1 (en) * | 2005-11-14 | 2007-05-17 | Applied Materials, Inc. Legal Department | Pinch waveguide |
| TW200801616A (en) * | 2005-11-14 | 2008-01-01 | Applied Materials Inc | Pinch waveguide |
| KR100759805B1 (ko) * | 2005-12-07 | 2007-09-20 | 한국전자통신연구원 | 광증폭 듀플렉서 |
| US7680371B2 (en) * | 2007-02-13 | 2010-03-16 | National Research Council Of Canada | Interface device for performing mode transformation in optical waveguides |
| US7551826B2 (en) * | 2007-06-26 | 2009-06-23 | The University Of Connecticut | Integrated circuit employing low loss spot-size converter |
| WO2010078594A2 (en) * | 2009-01-05 | 2010-07-08 | Georgetown University | Direct coupling of optical slot waveguide to another optical waveguide |
| US8189972B2 (en) * | 2009-03-31 | 2012-05-29 | Infinera Corporation | Optical mode coupler |
| JP2013021230A (ja) * | 2011-07-13 | 2013-01-31 | Mitsubishi Electric Corp | 半導体レーザ |
| US9323014B2 (en) | 2012-05-28 | 2016-04-26 | Mellanox Technologies Ltd. | High-speed optical module with flexible printed circuit board |
| US9091827B2 (en) | 2012-07-09 | 2015-07-28 | Luxtera, Inc. | Method and system for grating couplers incorporating perturbed waveguides |
| US9221074B2 (en) | 2012-10-11 | 2015-12-29 | Octrolix Bv | Stress-tuned planar lightwave circuit and method therefor |
| EP2770696A1 (en) | 2013-02-26 | 2014-08-27 | Thomson Licensing | Method of data transfer and corresponding device |
| WO2014164960A1 (en) * | 2013-03-12 | 2014-10-09 | Applied Physical Electronics, Lc | High average power integrated optical waveguide laser |
| US20150010268A1 (en) * | 2013-07-04 | 2015-01-08 | Mellanox Technologies Ltd. | Polymer-based interconnection between silicon photonics devices and optical fibers |
| US10782479B2 (en) | 2013-07-08 | 2020-09-22 | Luxtera Llc | Method and system for mode converters for grating couplers |
| JP6457723B2 (ja) * | 2014-03-28 | 2019-01-23 | 富士通株式会社 | 光導波路結合器及びその製造方法 |
| JP2016024438A (ja) * | 2014-07-24 | 2016-02-08 | 住友電気工業株式会社 | 半導体光素子 |
| US9563018B2 (en) | 2014-10-09 | 2017-02-07 | International Business Machines Corporation | Tapered photonic waveguide to optical fiber proximity coupler |
| US9323012B1 (en) | 2014-10-27 | 2016-04-26 | Laxense Inc. | Hybrid integrated optical device with high alignment tolerance |
| US9746608B1 (en) * | 2014-12-11 | 2017-08-29 | Partow Technologies, Llc. | Integrated optical assembly apparatus and integrated fabrication method for coupling optical energy |
| CN107111064B (zh) * | 2015-01-08 | 2020-09-22 | 阿卡西亚通信有限公司 | 与硅波导水平耦合 |
| US9323011B1 (en) | 2015-06-09 | 2016-04-26 | Laxense Inc. | Hybrid integrated optical device with passively aligned laser chips having submicrometer alignment accuracy |
| US9513435B1 (en) | 2015-10-19 | 2016-12-06 | Laxense Inc. | Hybrid integrated optical device enabling high tolerance optical chip bonding and the method to make the same |
| US20170205580A1 (en) * | 2016-01-17 | 2017-07-20 | Laxense Inc. | Optical waveguide device using vertically stacked de-centered bend structures for high-to-low index optical mode transforming |
| US9671560B1 (en) * | 2016-03-18 | 2017-06-06 | Lumentum Operations Llc | Angled periodic segmented waveguide for spot size conversion with reduced return loss |
| US11320267B2 (en) | 2017-03-23 | 2022-05-03 | Kvh Industries, Inc. | Integrated optic wavemeter and method for fiber optic gyroscopes scale factor stabilization |
| CN110476307B (zh) * | 2017-03-29 | 2021-05-18 | Ipg光子公司 | 啁啾脉冲放大激光器系统 |
| KR101899059B1 (ko) | 2017-04-07 | 2018-09-17 | (주)파이버프로 | 평면 광도파로 및 광 모듈 |
| US10199336B2 (en) * | 2017-05-24 | 2019-02-05 | Advanced Semiconductor Engineering, Inc. | Antenna package device |
| WO2019055663A1 (en) | 2017-09-15 | 2019-03-21 | Kvh Industries, Inc. | METHOD AND APPARATUS FOR CONNECTING TO AUTOMATIC FIBER ALIGNMENT TO PHOTONIC INTEGRATED CIRCUIT WAVEGUIDE |
| CN110954998B (zh) * | 2018-09-27 | 2021-10-01 | 上海新微技术研发中心有限公司 | 激光器与硅光芯片集成结构及其制备方法 |
| US11415419B2 (en) | 2018-10-11 | 2022-08-16 | Kvh Industries, Inc. | Polarizer implemented in a photonic integrated circuit for use in a fiber optic gyroscope |
| KR102849817B1 (ko) | 2018-10-31 | 2025-08-25 | 케이브이에이치 인더스트리즈, 인코포레이티드 | 광 집적 회로의 미광을 제어 및 억제하기 위한 방법 및 장치 |
| CN109655969A (zh) * | 2018-12-29 | 2019-04-19 | 华为技术有限公司 | 波导芯层、模斑转换器、硅光器件及光通信设备 |
| GB2583348A (en) * | 2019-04-24 | 2020-10-28 | Univ Southampton | Photonic chip and method of manufacture |
| US11353655B2 (en) | 2019-05-22 | 2022-06-07 | Kvh Industries, Inc. | Integrated optical polarizer and method of making same |
| US10921682B1 (en) | 2019-08-16 | 2021-02-16 | Kvh Industries, Inc. | Integrated optical phase modulator and method of making same |
| CN110376677B (zh) * | 2019-08-30 | 2024-10-01 | 深圳铱加科技有限公司 | 一种无热阵列波导光栅 |
| US10989876B1 (en) | 2019-12-23 | 2021-04-27 | Globalfoundries U.S. Inc. | Optical fiber coupler having hybrid tapered waveguide segments and metamaterial segments |
| US10955614B1 (en) | 2020-01-14 | 2021-03-23 | Globalfoundries U.S. Inc. | Optical fiber coupler structure having manufacturing variation-sensitive transmission blocking region |
| US11143821B1 (en) * | 2020-03-24 | 2021-10-12 | Mitsubishi Electric Research Laboratories, Inc. | Integrated grating coupler system |
| US12352571B2 (en) | 2021-08-11 | 2025-07-08 | Emcore Corporation | In-situ residual intensity noise measurement method and system |
| CN113540725B (zh) * | 2021-09-16 | 2021-12-17 | 成都雷电微力科技股份有限公司 | 一种具有滤波特性的波导耦合器 |
| US11650382B1 (en) * | 2021-10-26 | 2023-05-16 | Globalfoundries U.S. Inc. | Optical components undercut by a sealed cavity |
| WO2023211518A2 (en) | 2021-11-30 | 2023-11-02 | Emcore Corporation | Multi-axis fiber optic gyroscope photonic integrated circuit for inertial measurement units and inertial navigation systems |
| GB2619260A (en) * | 2022-03-31 | 2023-12-06 | Smart Photonics Holding B V | Semiconductor structure for inhibiting electrical cross-talk |
| US12449596B2 (en) * | 2023-03-28 | 2025-10-21 | Globalfoundries U.S. Inc. | Optical input/output interfaces between photonics chips |
| CN119362145B (zh) * | 2024-12-20 | 2025-04-15 | 苏州长光华芯光电技术股份有限公司 | 模式调控半导体发光结构及其制备方法 |
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| GB569181A (en) * | 1942-11-30 | 1945-05-10 | Ibrahim Bekir Nashashibi | Device for honing blades of safety razors |
| US3978426A (en) | 1975-03-11 | 1976-08-31 | Bell Telephone Laboratories, Incorporated | Heterostructure devices including tapered optical couplers |
| US4262995A (en) * | 1979-03-05 | 1981-04-21 | Hughes Aircraft Company | Planar star coupler device for fiber optics |
| DE3012775C2 (de) | 1980-04-02 | 1982-05-27 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Übergang zwischen zwei Monomodelichtleitern |
| DE3544136A1 (de) | 1985-12-13 | 1987-06-19 | Siemens Ag | Fasertaper, insbesondere zur kopplung einer monomodefaser mit einem halbleiterlaser |
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-
1999
- 1999-11-12 US US09/438,886 patent/US6293688B1/en not_active Expired - Lifetime
-
2000
- 2000-09-27 JP JP2001538851A patent/JP5226167B2/ja not_active Expired - Fee Related
- 2000-09-27 WO PCT/US2000/026639 patent/WO2001037018A1/en not_active Ceased
- 2000-09-27 EP EP00967003A patent/EP1230570A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| US6293688B1 (en) | 2001-09-25 |
| EP1230570A1 (en) | 2002-08-14 |
| JP2003515253A (ja) | 2003-04-22 |
| WO2001037018A1 (en) | 2001-05-25 |
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