JP5219364B2 - 時間間隔調整型の差動容量センサ装置 - Google Patents

時間間隔調整型の差動容量センサ装置 Download PDF

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Publication number
JP5219364B2
JP5219364B2 JP2006345902A JP2006345902A JP5219364B2 JP 5219364 B2 JP5219364 B2 JP 5219364B2 JP 2006345902 A JP2006345902 A JP 2006345902A JP 2006345902 A JP2006345902 A JP 2006345902A JP 5219364 B2 JP5219364 B2 JP 5219364B2
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Prior art keywords
circuit
detector
drive
adjustment circuit
drive signal
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JP2006345902A
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Japanese (ja)
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JP2007171203A (ja
JP2007171203A5 (https=
Inventor
スティーヴン・エイ・フーテ
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Honeywell International Inc
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Honeywell International Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Gyroscopes (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2006345902A 2005-12-22 2006-12-22 時間間隔調整型の差動容量センサ装置 Expired - Fee Related JP5219364B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/317,383 2005-12-22
US11/317,383 US7368923B2 (en) 2005-12-22 2005-12-22 Time interval trimmed differential capacitance sensor

Publications (3)

Publication Number Publication Date
JP2007171203A JP2007171203A (ja) 2007-07-05
JP2007171203A5 JP2007171203A5 (https=) 2009-09-17
JP5219364B2 true JP5219364B2 (ja) 2013-06-26

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JP2006345902A Expired - Fee Related JP5219364B2 (ja) 2005-12-22 2006-12-22 時間間隔調整型の差動容量センサ装置

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US (1) US7368923B2 (https=)
EP (1) EP1855096A3 (https=)
JP (1) JP5219364B2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015135245A (ja) * 2014-01-16 2015-07-27 セイコーエプソン株式会社 物理量検出回路、物理量検出装置、電子機器および移動体
JP2016109465A (ja) * 2014-12-02 2016-06-20 株式会社堀場エステック 静電容量型センサ

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DE602007011031D1 (de) * 2007-02-15 2011-01-20 St Microelectronics Srl Volldifferentieller Demodulator mit variabler Verstärkung und Demodulationsverfahren eines Signals
DE102007048402A1 (de) * 2007-10-09 2009-04-16 Gerd Reime Bedieneinheit und Verfahren zur Auslösung einer Funktion
DE102009000950A1 (de) * 2009-02-02 2010-08-05 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur und Verfahren zum Betreiben eines solchen Mikrofonbauelements
KR20120073264A (ko) 2009-09-03 2012-07-04 코닌클리케 필립스 일렉트로닉스 엔.브이. 터치 감지 출력 장치
JP2011193978A (ja) * 2010-03-18 2011-10-06 Canon Inc 静電容量型電気機械変換装置の駆動装置及び駆動方法
US9529029B2 (en) 2010-06-08 2016-12-27 Iee International Electronics & Engineering S.A. Robust capacitive measurement system
WO2011154467A1 (en) * 2010-06-08 2011-12-15 Iee International Electronics & Engineering S.A. Robust capacitive measurement system
DE102012210004B4 (de) * 2012-06-14 2014-11-06 Robert Bosch Gmbh Balkendetektor mit Regelschaltung
US20150268268A1 (en) * 2013-06-17 2015-09-24 Freescale Semiconductor, Inc. Inertial sensor with trim capacitance and method of trimming offset
US10006930B2 (en) * 2014-06-03 2018-06-26 Northrop Grumman Systems Corporation Performance optimization of a differential capacitance based motion sensor
EP3495826B1 (fr) * 2017-12-07 2020-11-25 EM Microelectronic-Marin SA Dispositif électronique de mesure d'un paramètre physique

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US4890598A (en) 1988-07-29 1990-01-02 Nu-Tech Industries, Inc. High efficiency blower
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JP2004361388A (ja) * 2003-05-15 2004-12-24 Mitsubishi Electric Corp 容量型慣性力検出装置
JP2004364366A (ja) * 2003-06-02 2004-12-24 Seiko Epson Corp Ｐｗｍ制御システム
EP1548409A1 (en) * 2003-12-23 2005-06-29 Dialog Semiconductor GmbH Differential capacitance measurement

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015135245A (ja) * 2014-01-16 2015-07-27 セイコーエプソン株式会社 物理量検出回路、物理量検出装置、電子機器および移動体
JP2016109465A (ja) * 2014-12-02 2016-06-20 株式会社堀場エステック 静電容量型センサ

Also Published As

Publication number Publication date
JP2007171203A (ja) 2007-07-05
EP1855096A2 (en) 2007-11-14
US7368923B2 (en) 2008-05-06
US20070146019A1 (en) 2007-06-28
EP1855096A3 (en) 2008-08-20

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