JP5214345B2 - レーザーリフロー方法および装置 - Google Patents
レーザーリフロー方法および装置 Download PDFInfo
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- JP5214345B2 JP5214345B2 JP2008164518A JP2008164518A JP5214345B2 JP 5214345 B2 JP5214345 B2 JP 5214345B2 JP 2008164518 A JP2008164518 A JP 2008164518A JP 2008164518 A JP2008164518 A JP 2008164518A JP 5214345 B2 JP5214345 B2 JP 5214345B2
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- 238000000034 method Methods 0.000 title claims description 15
- 239000000758 substrate Substances 0.000 claims description 57
- 229910000679 solder Inorganic materials 0.000 claims description 56
- 239000000463 material Substances 0.000 claims description 36
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 229910052710 silicon Inorganic materials 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/102—Material of the semiconductor or solid state bodies
- H01L2924/1025—Semiconducting materials
- H01L2924/10251—Elemental semiconductors, i.e. Group IV
- H01L2924/10253—Silicon [Si]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/35—Mechanical effects
- H01L2924/351—Thermal stress
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Wire Bonding (AREA)
Description
近赤外線レーザーの波長=900nm
(条件2)
近赤外線レーザーの波長=1060nm
なお、これら条件1,2において、レーザー光の照射範囲は、ともにICパッケージ70の上面の略全域とした。
10 レーザー光源
20 レーザー照射ヘッド
21 拡散レンズ
70 ICパッケージ
72 ICチップ
P 基板
S ハンダボール(接合材)
T クリームハンダ(接合材)
Claims (3)
- 最上面に配置されたシリコン製のICチップとその下面に配置されたインターポーザとを含むICパッケージが搭載された基板に対し、上記ICパッケージの上方からレーザー光を照射することにより、上記ICパッケージの下面と基板との間に配置されたハンダボールを含む導電性の接合材を加熱して溶融させ、この接合材を介して上記ICパッケージを基板に接合するレーザーリフロー方法であって、
上記レーザー光として、1060nm以上4000nm以下の波長を有する近赤外線レーザーを用いることを特徴とするレーザーリフロー方法。 - 最上面に配置されたシリコン製のICチップとその下面に配置されたインターポーザとを含むICパッケージが搭載された基板に対し、レーザー照射ヘッドから発せられたレーザー光を上記ICパッケージの上方から照射することにより、上記ICパッケージの下面と基板との間に配置されたハンダボールを含む導電性の接合材を加熱して溶融させ、この接合材を介して上記ICパッケージを基板に接合するレーザーリフロー装置であって、
上記レーザー照射ヘッドから照射されるレーザー光が、1060nm以上4000nm以下の波長を有する近赤外線レーザーであることを特徴とするレーザーリフロー装置。 - 請求項2記載のレーザーリフロー装置において、
上記レーザー照射ヘッドが、所定のレーザー光源から発せられた上記近赤外線レーザーを拡散させる拡散レンズを備えたことを特徴とするレーザーリフロー装置。
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JP2008164518A JP5214345B2 (ja) | 2008-06-24 | 2008-06-24 | レーザーリフロー方法および装置 |
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JP2008164518A JP5214345B2 (ja) | 2008-06-24 | 2008-06-24 | レーザーリフロー方法および装置 |
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JP2010010196A JP2010010196A (ja) | 2010-01-14 |
JP5214345B2 true JP5214345B2 (ja) | 2013-06-19 |
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JP2008164518A Active JP5214345B2 (ja) | 2008-06-24 | 2008-06-24 | レーザーリフロー方法および装置 |
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Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013132673A (ja) * | 2011-12-27 | 2013-07-08 | Nihon Superior Co Ltd | 近赤外線を利用した接合に用いる接合材及び接合方法 |
JP5966953B2 (ja) * | 2013-01-31 | 2016-08-10 | 株式会社デンソー | 半導体装置の製造方法 |
KR101470386B1 (ko) * | 2013-07-19 | 2014-12-09 | 한국광기술원 | 엘이디 칩 접착용 경화 장치 |
KR101484672B1 (ko) | 2013-08-29 | 2015-01-20 | 와이지에프 주식회사 | 근적외선 히터를 적용한 가죽 라미네이팅 장치 |
DE102016123180A1 (de) * | 2016-11-30 | 2018-05-30 | Gottfried Wilhelm Leibniz Universität Hannover | Verfahren zum Verbinden eines Halbleiterbauelements mit einem Gegenstück sowie Anordnung mit einem Halbleiterbauelement |
JP2020520410A (ja) * | 2017-05-12 | 2020-07-09 | ヘレウス ドイチェラント ゲーエムベーハー ウント カンパニー カーゲー | 金属ペーストの手段によりコンポーネントを接続する方法 |
KR101937360B1 (ko) | 2017-07-17 | 2019-01-11 | 크루셜머신즈 주식회사 | 레이저 리플로우 장치 |
TWI734956B (zh) * | 2019-01-31 | 2021-08-01 | 惠特科技股份有限公司 | 半導體元件雷射焊接裝置及方法 |
CN116160081B (zh) * | 2023-04-18 | 2023-07-14 | 深圳市诺盛豪自动化有限公司 | 落地式点锡激光焊锡机 |
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Publication number | Priority date | Publication date | Assignee | Title |
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US4278867A (en) * | 1978-12-29 | 1981-07-14 | International Business Machines Corporation | System for chip joining by short wavelength radiation |
JPH02104119A (ja) * | 1988-10-13 | 1990-04-17 | Japan Radio Co Ltd | 表面弾性波素子の実装方法 |
JPH0671135B2 (ja) * | 1989-01-26 | 1994-09-07 | 富士電機株式会社 | Icチップのはんだ付け方法 |
JP2001148403A (ja) * | 1999-11-18 | 2001-05-29 | Seiko Epson Corp | 半導体チップの実装方法および装置 |
KR100777575B1 (ko) * | 2006-03-20 | 2007-11-16 | 주식회사 젯텍 | 레이저를 이용한 전자부품의 접속 방법 및 장치 |
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