JP5196869B2 - 投影光学系、露光装置及びデバイス製造方法 - Google Patents

投影光学系、露光装置及びデバイス製造方法

Info

Publication number
JP5196869B2
JP5196869B2 JP2007129797A JP2007129797A JP5196869B2 JP 5196869 B2 JP5196869 B2 JP 5196869B2 JP 2007129797 A JP2007129797 A JP 2007129797A JP 2007129797 A JP2007129797 A JP 2007129797A JP 5196869 B2 JP5196869 B2 JP 5196869B2
Authority
JP
Japan
Prior art keywords
optical system
concave
projection optical
reflecting surface
lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007129797A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008286888A (ja
JP2008286888A5 (enExample
Inventor
亮介 福岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007129797A priority Critical patent/JP5196869B2/ja
Priority to TW097116652A priority patent/TWI440988B/zh
Priority to KR1020080044230A priority patent/KR100966190B1/ko
Publication of JP2008286888A publication Critical patent/JP2008286888A/ja
Publication of JP2008286888A5 publication Critical patent/JP2008286888A5/ja
Application granted granted Critical
Publication of JP5196869B2 publication Critical patent/JP5196869B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70325—Resolution enhancement techniques not otherwise provided for, e.g. darkfield imaging, interfering beams, spatial frequency multiplication, nearfield lenses or solid immersion lenses
    • G03F7/70333—Focus drilling, i.e. increase in depth of focus for exposure by modulating focus during exposure [FLEX]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2007129797A 2007-05-15 2007-05-15 投影光学系、露光装置及びデバイス製造方法 Expired - Fee Related JP5196869B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007129797A JP5196869B2 (ja) 2007-05-15 2007-05-15 投影光学系、露光装置及びデバイス製造方法
TW097116652A TWI440988B (zh) 2007-05-15 2008-05-06 Projection optical systems and exposure devices
KR1020080044230A KR100966190B1 (ko) 2007-05-15 2008-05-14 투영 광학계 및 노광장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007129797A JP5196869B2 (ja) 2007-05-15 2007-05-15 投影光学系、露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008286888A JP2008286888A (ja) 2008-11-27
JP2008286888A5 JP2008286888A5 (enExample) 2010-07-15
JP5196869B2 true JP5196869B2 (ja) 2013-05-15

Family

ID=40146698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007129797A Expired - Fee Related JP5196869B2 (ja) 2007-05-15 2007-05-15 投影光学系、露光装置及びデバイス製造方法

Country Status (3)

Country Link
JP (1) JP5196869B2 (enExample)
KR (1) KR100966190B1 (enExample)
TW (1) TWI440988B (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6635904B2 (ja) 2016-10-14 2020-01-29 キヤノン株式会社 投影光学系、露光装置及び物品の製造方法
JP6882053B2 (ja) * 2016-12-05 2021-06-02 キヤノン株式会社 カタディオプトリック光学系、照明光学系、露光装置および物品製造方法
JP7167417B2 (ja) * 2017-03-30 2022-11-09 株式会社ニデック 眼底撮影装置および眼科装置
JP7357488B2 (ja) * 2019-09-04 2023-10-06 キヤノン株式会社 露光装置、および物品製造方法
JP7332415B2 (ja) * 2019-10-01 2023-08-23 キヤノン株式会社 投影光学系、走査露光装置および物品製造方法
JP7614962B2 (ja) * 2021-07-08 2025-01-16 キヤノン株式会社 投影光学系、露光装置、および物品の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1103498A (en) * 1977-02-11 1981-06-23 Abe Offner Wide annulus unit power optical system
JPS5890610A (ja) * 1981-11-24 1983-05-30 Matsushita Electric Ind Co Ltd カタデイオプトリツク光学系
JPS60168116A (ja) * 1984-02-13 1985-08-31 Canon Inc 反射光学系
JPS60201316A (ja) * 1984-03-26 1985-10-11 Canon Inc 反射光学系
JPH0553057A (ja) * 1991-08-26 1993-03-05 Nikon Corp 反射光学系
US6229595B1 (en) * 1995-05-12 2001-05-08 The B. F. Goodrich Company Lithography system and method with mask image enlargement
JPH09180985A (ja) * 1995-12-25 1997-07-11 Nikon Corp 投影露光装置
US7158215B2 (en) * 2003-06-30 2007-01-02 Asml Holding N.V. Large field of view protection optical system with aberration correctability for flat panel displays
JP2006078592A (ja) * 2004-09-07 2006-03-23 Canon Inc 投影光学系及びそれを有する露光装置
JP2008089832A (ja) * 2006-09-29 2008-04-17 Canon Inc 露光装置

Also Published As

Publication number Publication date
KR20080101695A (ko) 2008-11-21
TWI440988B (zh) 2014-06-11
TW200903187A (en) 2009-01-16
KR100966190B1 (ko) 2010-06-25
JP2008286888A (ja) 2008-11-27

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