JP5196106B2 - 圧電素子の製造方法 - Google Patents

圧電素子の製造方法 Download PDF

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Publication number
JP5196106B2
JP5196106B2 JP2007084619A JP2007084619A JP5196106B2 JP 5196106 B2 JP5196106 B2 JP 5196106B2 JP 2007084619 A JP2007084619 A JP 2007084619A JP 2007084619 A JP2007084619 A JP 2007084619A JP 5196106 B2 JP5196106 B2 JP 5196106B2
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JP
Japan
Prior art keywords
annealing
piezoelectric element
piezoelectric
layer
manufacturing
Prior art date
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Expired - Fee Related
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JP2007084619A
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English (en)
Japanese (ja)
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JP2008244266A5 (enrdf_load_stackoverflow
JP2008244266A (ja
Inventor
昇 古谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2007084619A priority Critical patent/JP5196106B2/ja
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Publication of JP2008244266A5 publication Critical patent/JP2008244266A5/ja
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Expired - Fee Related legal-status Critical Current
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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2007084619A 2007-03-28 2007-03-28 圧電素子の製造方法 Expired - Fee Related JP5196106B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007084619A JP5196106B2 (ja) 2007-03-28 2007-03-28 圧電素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007084619A JP5196106B2 (ja) 2007-03-28 2007-03-28 圧電素子の製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012264698A Division JP2013077827A (ja) 2012-12-03 2012-12-03 圧電素子の製造方法

Publications (3)

Publication Number Publication Date
JP2008244266A JP2008244266A (ja) 2008-10-09
JP2008244266A5 JP2008244266A5 (enrdf_load_stackoverflow) 2010-02-04
JP5196106B2 true JP5196106B2 (ja) 2013-05-15

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ID=39915212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007084619A Expired - Fee Related JP5196106B2 (ja) 2007-03-28 2007-03-28 圧電素子の製造方法

Country Status (1)

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JP (1) JP5196106B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5549913B2 (ja) * 2009-09-01 2014-07-16 株式会社リコー 電気機械変換素子の製造方法
GB2579039A (en) 2018-11-15 2020-06-10 Xaar Technology Ltd Electrical component
GB2579041A (en) 2018-11-15 2020-06-10 Xaar Technology Ltd Electrical component

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0492915B1 (en) * 1990-12-17 1996-09-04 Canon Kabushiki Kaisha Cantilever probe and apparatus using the same
JPH1012751A (ja) * 1996-06-27 1998-01-16 Sharp Corp 強誘電体記憶素子
JP2000332209A (ja) * 1999-05-21 2000-11-30 Oki Electric Ind Co Ltd Ｂｉ系強誘電体素子の製造方法
JP2004311924A (ja) * 2003-03-26 2004-11-04 Seiko Epson Corp 強誘電体キャパシタおよびその製造方法、強誘電体メモリ、圧電素子。
JP2006246451A (ja) * 2005-02-07 2006-09-14 Kyocera Corp 薄膜バルク音響波共振子およびフィルタならびに通信装置
KR101101566B1 (ko) * 2006-03-30 2012-01-02 후지쯔 세미컨덕터 가부시키가이샤 반도체 장치 및 그 제조 방법

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Publication number Publication date
JP2008244266A (ja) 2008-10-09

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