JP5188127B2 - 絶対位置の計測装置および計測方法 - Google Patents

絶対位置の計測装置および計測方法 Download PDF

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JP5188127B2
JP5188127B2 JP2007238773A JP2007238773A JP5188127B2 JP 5188127 B2 JP5188127 B2 JP 5188127B2 JP 2007238773 A JP2007238773 A JP 2007238773A JP 2007238773 A JP2007238773 A JP 2007238773A JP 5188127 B2 JP5188127 B2 JP 5188127B2
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signal
phase
calculating
measured
amplitude
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JP2009069038A (ja
JP2009069038A5 (enExample
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雄三 瀬尾
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Canon Inc
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Canon Inc
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  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP2007238773A 2007-09-14 2007-09-14 絶対位置の計測装置および計測方法 Expired - Fee Related JP5188127B2 (ja)

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JP2007238773A JP5188127B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置および計測方法

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JP2007238773A JP5188127B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置および計測方法

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JP2009069038A JP2009069038A (ja) 2009-04-02
JP2009069038A5 JP2009069038A5 (enExample) 2010-10-28
JP5188127B2 true JP5188127B2 (ja) 2013-04-24

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5932285B2 (ja) * 2011-10-14 2016-06-08 キヤノン株式会社 エンコーダおよびこれを備えた装置
JP6513327B2 (ja) * 2013-03-19 2019-05-15 Dmg森精機株式会社 測長器および原点位置検出方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184506A (ja) * 1984-10-03 1986-04-30 Canon Inc 光路長測定装置
JPH0921654A (ja) * 1995-07-03 1997-01-21 Yaskawa Electric Corp 光学式変位検出装置および検出方法
JP4668396B2 (ja) * 2000-08-28 2011-04-13 ハイデンハイン株式会社 原点信号発生装置
JP4357361B2 (ja) * 2004-05-18 2009-11-04 富士通株式会社 低コヒーレンス干渉法を用いた微小高さ測定装置
JP4914040B2 (ja) * 2005-07-28 2012-04-11 キヤノン株式会社 干渉測定装置
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
JP4995016B2 (ja) * 2007-09-14 2012-08-08 キヤノン株式会社 絶対位置の計測装置及び計測方法

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