JP2009069038A5 - - Google Patents

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Publication number
JP2009069038A5
JP2009069038A5 JP2007238773A JP2007238773A JP2009069038A5 JP 2009069038 A5 JP2009069038 A5 JP 2009069038A5 JP 2007238773 A JP2007238773 A JP 2007238773A JP 2007238773 A JP2007238773 A JP 2007238773A JP 2009069038 A5 JP2009069038 A5 JP 2009069038A5
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JP
Japan
Prior art keywords
calculating
signal
phase
average value
measured
Prior art date
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Application number
JP2007238773A
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English (en)
Japanese (ja)
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JP2009069038A (ja
JP5188127B2 (ja
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Priority to JP2007238773A priority Critical patent/JP5188127B2/ja
Priority claimed from JP2007238773A external-priority patent/JP5188127B2/ja
Publication of JP2009069038A publication Critical patent/JP2009069038A/ja
Publication of JP2009069038A5 publication Critical patent/JP2009069038A5/ja
Application granted granted Critical
Publication of JP5188127B2 publication Critical patent/JP5188127B2/ja
Expired - Fee Related legal-status Critical Current
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JP2007238773A 2007-09-14 2007-09-14 絶対位置の計測装置および計測方法 Expired - Fee Related JP5188127B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007238773A JP5188127B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置および計測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007238773A JP5188127B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置および計測方法

Publications (3)

Publication Number Publication Date
JP2009069038A JP2009069038A (ja) 2009-04-02
JP2009069038A5 true JP2009069038A5 (enExample) 2010-10-28
JP5188127B2 JP5188127B2 (ja) 2013-04-24

Family

ID=40605445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007238773A Expired - Fee Related JP5188127B2 (ja) 2007-09-14 2007-09-14 絶対位置の計測装置および計測方法

Country Status (1)

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JP (1) JP5188127B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5932285B2 (ja) * 2011-10-14 2016-06-08 キヤノン株式会社 エンコーダおよびこれを備えた装置
JP6513327B2 (ja) * 2013-03-19 2019-05-15 Dmg森精機株式会社 測長器および原点位置検出方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184506A (ja) * 1984-10-03 1986-04-30 Canon Inc 光路長測定装置
JPH0921654A (ja) * 1995-07-03 1997-01-21 Yaskawa Electric Corp 光学式変位検出装置および検出方法
JP4668396B2 (ja) * 2000-08-28 2011-04-13 ハイデンハイン株式会社 原点信号発生装置
JP4357361B2 (ja) * 2004-05-18 2009-11-04 富士通株式会社 低コヒーレンス干渉法を用いた微小高さ測定装置
JP4914040B2 (ja) * 2005-07-28 2012-04-11 キヤノン株式会社 干渉測定装置
JP4804058B2 (ja) * 2005-07-28 2011-10-26 キヤノン株式会社 干渉測定装置
JP4995016B2 (ja) * 2007-09-14 2012-08-08 キヤノン株式会社 絶対位置の計測装置及び計測方法

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