JP5172078B2 - Cmosイメージ・センサーの製造方法 - Google Patents
Cmosイメージ・センサーの製造方法 Download PDFInfo
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- JP5172078B2 JP5172078B2 JP2005135456A JP2005135456A JP5172078B2 JP 5172078 B2 JP5172078 B2 JP 5172078B2 JP 2005135456 A JP2005135456 A JP 2005135456A JP 2005135456 A JP2005135456 A JP 2005135456A JP 5172078 B2 JP5172078 B2 JP 5172078B2
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- Prior art keywords
- ion implantation
- type ion
- photodiode
- implantation region
- transfer gate
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- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 238000005468 ion implantation Methods 0.000 claims description 89
- 238000000034 method Methods 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- 239000004065 semiconductor Substances 0.000 claims description 16
- 125000006850 spacer group Chemical group 0.000 claims description 14
- 238000009792 diffusion process Methods 0.000 claims description 10
- 238000002955 isolation Methods 0.000 claims description 9
- 238000002513 implantation Methods 0.000 claims description 2
- 230000008569 process Effects 0.000 description 16
- 230000003287 optical effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
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-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Description
22 素子分離膜
23 トランスファー・ゲート
24 フォトダイオード用第1のn型イオン注入領域
25 フォトダイオード用第2のn型イオン注入領域
26 フォトダイオード用p型イオン注入領域
27 スペーサ
28 フローティング拡散領域
Claims (4)
- 素子分離膜が形成された半導体基板の上にトランスファー・ゲートを形成する第1ステップと、
前記トランスファー・ゲートの一側面に整列し、第1の幅を有し、第1のイオン注入深さを有するフォトダイオード用第1のn型イオン注入領域を、第1のマスクを用いて、前記トランスファー・ゲート用のスペーサのために確保した領域の下方に形成する第2ステップと、
前記トランスファー・ゲートの一側面に整列し、前記フォトダイオード用第1のn型イオン注入領域を含み、前記第1の幅よりも広い第2の幅を有し、前記第1のイオン注入深さよりも深い第2のイオン注入深さを有するフォトダイオード用第2のn型イオン注入領域を、第2のマスクを用いて形成する第3ステップと、
前記トランスファー・ゲートの一側面に整列し、前記フォトダイオード用第1のn型イオン注入領域の上部と一部が重なるフォトダイオード用p型イオン注入領域を、前記フォトダイオード用第2のn型イオン注入領域の上部に前記第2のマスクを用いて形成する第4ステップと、
前記トランスファー・ゲートの両側壁にスペーサを形成する第5ステップと、
前記トランスファー・ゲートの他側にフローティング拡散領域を形成する第6ステップと
を含むことを特徴とするCMOSイメージ・センサーの製造方法。 - 前記第1の幅が、0.5μmであることを特徴とする請求項1に記載のCMOSイメージ・センサーの製造方法。
- 前記フォトダイオード用第1のn型イオン注入領域が、前記トランスファー・ゲートと同じ長さを有することを特徴とする請求項1に記載のCMOSイメージ・センサーの製造方法。
- 前記フォトダイオード用第1のn型イオン注入領域を形成する第2ステップが、60keVのイオン注入エネルギーを使用して行われることを特徴とする請求項1に記載のCMOSイメージ・センサーの製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040032001A KR101026616B1 (ko) | 2004-05-06 | 2004-05-06 | 시모스 이미지센서 및 그 제조방법 |
KR10-2004-0032001 | 2004-05-06 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012106951A Division JP5713956B2 (ja) | 2004-05-06 | 2012-05-08 | Cmosイメージ・センサー及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005322932A JP2005322932A (ja) | 2005-11-17 |
JP5172078B2 true JP5172078B2 (ja) | 2013-03-27 |
Family
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Family Applications (2)
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JP2005135456A Active JP5172078B2 (ja) | 2004-05-06 | 2005-05-06 | Cmosイメージ・センサーの製造方法 |
JP2012106951A Active JP5713956B2 (ja) | 2004-05-06 | 2012-05-08 | Cmosイメージ・センサー及びその製造方法 |
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JP2012106951A Active JP5713956B2 (ja) | 2004-05-06 | 2012-05-08 | Cmosイメージ・センサー及びその製造方法 |
Country Status (3)
Country | Link |
---|---|
US (3) | US7402479B2 (ja) |
JP (2) | JP5172078B2 (ja) |
KR (1) | KR101026616B1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100718776B1 (ko) * | 2005-11-24 | 2007-05-16 | 매그나칩 반도체 유한회사 | 시모스 이미지센서 제조 방법 |
US7692134B2 (en) * | 2008-03-24 | 2010-04-06 | Omnivision Technologies, Inc. | Variable transfer gate oxide thickness for image sensor |
JP5493430B2 (ja) | 2009-03-31 | 2014-05-14 | ソニー株式会社 | 固体撮像装置とその製造方法、及び電子機器 |
JP2012164768A (ja) * | 2011-02-04 | 2012-08-30 | Toshiba Corp | 固体撮像装置 |
JP6668600B2 (ja) * | 2015-03-19 | 2020-03-18 | セイコーエプソン株式会社 | 固体撮像素子及びその製造方法 |
JP6609948B2 (ja) * | 2015-03-19 | 2019-11-27 | セイコーエプソン株式会社 | 固体撮像素子及びその製造方法 |
US9930281B2 (en) | 2016-01-20 | 2018-03-27 | Semiconductor Components Industries, Llc | Image sensors having photodiode regions implanted from multiple sides of a substrate |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH04355964A (ja) * | 1990-12-21 | 1992-12-09 | Mitsubishi Electric Corp | 固体撮像装置及びその製造方法 |
JP3403061B2 (ja) * | 1998-03-31 | 2003-05-06 | 株式会社東芝 | 固体撮像装置 |
JP2000091551A (ja) * | 1998-09-11 | 2000-03-31 | Toshiba Corp | 固体撮像装置およびその製造方法 |
FR2820883B1 (fr) * | 2001-02-12 | 2003-06-13 | St Microelectronics Sa | Photodiode a grande capacite |
KR100381026B1 (ko) | 2001-05-22 | 2003-04-23 | 주식회사 하이닉스반도체 | 펀치전압과 포토다이오드의 집전양을 증가시킬 수 있는씨모스 이미지 센서 및 그 제조 방법 |
KR20020096336A (ko) * | 2001-06-19 | 2002-12-31 | 삼성전자 주식회사 | 씨모스형 촬상 장치 |
JP2003101004A (ja) * | 2001-09-25 | 2003-04-04 | Toshiba Corp | 固体撮像装置及びその製造方法 |
KR100436067B1 (ko) * | 2001-11-16 | 2004-06-12 | 주식회사 하이닉스반도체 | 이미지센서 및 그 제조 방법 |
KR100450670B1 (ko) | 2002-02-09 | 2004-10-01 | 삼성전자주식회사 | 포토 다이오드를 갖는 이미지 센서 및 그 제조방법 |
JP2003264279A (ja) | 2002-03-12 | 2003-09-19 | Mitsubishi Electric Corp | 半導体装置の製造方法及び半導体装置 |
US6730899B1 (en) * | 2003-01-10 | 2004-05-04 | Eastman Kodak Company | Reduced dark current for CMOS image sensors |
KR200340859Y1 (ko) | 2003-11-21 | 2004-02-05 | 심원보 | 전화번호 와 차량번호가 삽입 된 열쇠 |
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2004
- 2004-05-06 KR KR1020040032001A patent/KR101026616B1/ko active IP Right Grant
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2005
- 2005-05-06 JP JP2005135456A patent/JP5172078B2/ja active Active
- 2005-05-06 US US11/123,298 patent/US7402479B2/en active Active
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- 2008-06-11 US US12/157,546 patent/US8044444B2/en active Active
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- 2011-09-22 US US13/240,400 patent/US8679890B2/en active Active
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- 2012-05-08 JP JP2012106951A patent/JP5713956B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2005322932A (ja) | 2005-11-17 |
US20050266625A1 (en) | 2005-12-01 |
US8679890B2 (en) | 2014-03-25 |
US20120094419A1 (en) | 2012-04-19 |
US7402479B2 (en) | 2008-07-22 |
US8044444B2 (en) | 2011-10-25 |
JP5713956B2 (ja) | 2015-05-07 |
US20080251820A1 (en) | 2008-10-16 |
KR101026616B1 (ko) | 2011-04-04 |
KR20050106931A (ko) | 2005-11-11 |
JP2012199560A (ja) | 2012-10-18 |
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