JP5164359B2 - フリースタンディング窒化ガリウム基板の製造方法 - Google Patents
フリースタンディング窒化ガリウム基板の製造方法 Download PDFInfo
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- JP5164359B2 JP5164359B2 JP2006273738A JP2006273738A JP5164359B2 JP 5164359 B2 JP5164359 B2 JP 5164359B2 JP 2006273738 A JP2006273738 A JP 2006273738A JP 2006273738 A JP2006273738 A JP 2006273738A JP 5164359 B2 JP5164359 B2 JP 5164359B2
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
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- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/403—AIII-nitrides
- C30B29/406—Gallium nitride
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- H01L21/02458—Nitrides
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02513—Microstructure
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
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- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
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- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
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Description
Strain relaxation in GaN Layers grown on porous GaN sublayers(MRS Internet J.Nitride Semicond.Res.4,14(1999)) In−plane bandgap control in porous GaN through electroless wet chemical etching(Volume 80,Number6,11 February 2002,Applied Physics Letters) Preparation of Freestanding GaN Wafers by Hydride Vapor Phase Epitaxy with Void−Assisted Separation(Jpn.J.Appl.Phys.Vol.42(2003)pp.L1−L3 Part2,No.1A/B,15 January 2003)
Claims (6)
- 反応器内に窒化ガリウム層が形成された基板を設けるステップと、
前記反応器に塩化水素ガス及びアンモニアガスを供給して前記窒化ガリウム層の表面を処理して多孔性窒化ガリウム層を形成するステップと、
前記多孔性窒化ガリウム層上に前記多孔性窒化ガリウム層に連続して窒化ガリウム結晶成長層を形成するステップと、
前記窒化ガリウム結晶成長層が形成された前記基板を冷却して前記窒化ガリウム結晶成長層を前記基板から分離するステップと、
を含み、
前記窒化ガリウム層の表面を処理して多孔性窒化ガリウム層を形成するステップは、前記供給された塩化水素ガス及びアンモニアガスにより前記窒化ガリウム層の表面の窒化ガリウムを分解し、この分解により発生した塩化ガリウムガス及び水素ガスを排気することにより、前記窒化ガリウム層の表面に所定深さのボイドを形成することを特徴とするフリースタンディング窒化ガリウム基板の製造方法。 - 前記窒化ガリウム層が形成された基板を設けるステップは、前記反応器内に基板を設置し、基板の表面に窒化ガリウム層を形成するステップをさらに含むことを特徴とする請求項1に記載のフリースタンディング窒化ガリウム基板の製造方法。
- 前記基板は、サファイア基板、炭化珪素基板、窒化ガリウム基板のうち何れか一つであることを特徴とする請求項2に記載のフリースタンディング窒化ガリウム基板の製造方法。
- 前記多孔性窒化ガリウム層を形成するステップは、900〜1200℃の温度で進められることを特徴とする請求項1に記載のフリースタンディング窒化ガリウム基板の製造方法。
- 前記反応器は、HVPE(ハイドライド気相成長)装置の反応器であることを特徴とする請求項1に記載のフリースタンディング窒化ガリウム基板の製造方法。
- 常圧で、前記塩化水素ガスは50〜150sccm、前記アンモニアガスは500〜1500sccmの流量で供給されることを特徴とする請求項1〜5のいずれか1項に記載のフリースタンディング窒化ガリウム基板の製造方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2005-0096167 | 2005-10-12 | ||
KR1020050096167A KR100707166B1 (ko) | 2005-10-12 | 2005-10-12 | GaN 기판의 제조방법 |
Publications (2)
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JP2007106666A JP2007106666A (ja) | 2007-04-26 |
JP5164359B2 true JP5164359B2 (ja) | 2013-03-21 |
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JP2006273738A Expired - Fee Related JP5164359B2 (ja) | 2005-10-12 | 2006-10-05 | フリースタンディング窒化ガリウム基板の製造方法 |
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US (1) | US8349076B2 (ja) |
JP (1) | JP5164359B2 (ja) |
KR (1) | KR100707166B1 (ja) |
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WO2008091910A2 (en) * | 2007-01-22 | 2008-07-31 | Group4 Labs, Llc | Composite wafers having bulk-quality semiconductor layers |
US8920625B2 (en) * | 2007-04-27 | 2014-12-30 | Board Of Regents Of The University Of Texas System | Electrochemical method of making porous particles using a constant current density |
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2005
- 2005-10-12 KR KR1020050096167A patent/KR100707166B1/ko not_active IP Right Cessation
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2006
- 2006-10-05 JP JP2006273738A patent/JP5164359B2/ja not_active Expired - Fee Related
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7246616B2 (en) | 2002-08-19 | 2007-07-24 | Max Rist | Device for influencing gas flows |
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KR100707166B1 (ko) | 2007-04-13 |
US20070082465A1 (en) | 2007-04-12 |
JP2007106666A (ja) | 2007-04-26 |
US8349076B2 (en) | 2013-01-08 |
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