JP5154852B2 - 基板搬送装置および基板搬送方法 - Google Patents

基板搬送装置および基板搬送方法 Download PDF

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JP5154852B2
JP5154852B2 JP2007189793A JP2007189793A JP5154852B2 JP 5154852 B2 JP5154852 B2 JP 5154852B2 JP 2007189793 A JP2007189793 A JP 2007189793A JP 2007189793 A JP2007189793 A JP 2007189793A JP 5154852 B2 JP5154852 B2 JP 5154852B2
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substrate
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stroke end
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至 赤羽
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Olympus Corp
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Olympus Corp
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JP2007189793A 2007-07-20 2007-07-20 基板搬送装置および基板搬送方法 Expired - Fee Related JP5154852B2 (ja)

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JP2007189793A JP5154852B2 (ja) 2007-07-20 2007-07-20 基板搬送装置および基板搬送方法

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JP2007189793A JP5154852B2 (ja) 2007-07-20 2007-07-20 基板搬送装置および基板搬送方法

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JP2009023804A JP2009023804A (ja) 2009-02-05
JP2009023804A5 JP2009023804A5 (https=) 2010-08-05
JP5154852B2 true JP5154852B2 (ja) 2013-02-27

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Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5550882B2 (ja) * 2009-10-19 2014-07-16 東京応化工業株式会社 塗布装置
KR101384092B1 (ko) * 2011-12-30 2014-04-14 엘아이지에이디피 주식회사 기판 이송장치 및 이것을 포함하는 기판 검사장비
CN102723303B (zh) * 2012-06-13 2015-05-20 南京工业大学 Xy两坐标气浮定位平台
JP2014123769A (ja) * 2014-03-06 2014-07-03 Tokyo Ohka Kogyo Co Ltd 紫外線照射装置および紫外線照射方法
KR102510962B1 (ko) * 2016-08-22 2023-03-16 세메스 주식회사 기판 이송 장치 및 기판 이송 방법
CN107316834A (zh) * 2017-07-31 2017-11-03 武汉华星光电半导体显示技术有限公司 基板传送装置
CN108106996B (zh) * 2017-12-25 2024-05-28 通彩智能科技集团有限公司 一种玻璃检测盛放平台
JP2022156749A (ja) * 2021-03-31 2022-10-14 パナソニックＩｐマネジメント株式会社 ストリング製造装置
CN117067325B (zh) * 2023-09-07 2026-01-30 徐州帝伦木业有限公司 一种木质板材加工用自动化上料设备

Family Cites Families (1)

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Publication number Priority date Publication date Assignee Title
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置

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