JP5154448B2 - 黒鉛材料及びその製造方法 - Google Patents
黒鉛材料及びその製造方法 Download PDFInfo
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- JP5154448B2 JP5154448B2 JP2008551079A JP2008551079A JP5154448B2 JP 5154448 B2 JP5154448 B2 JP 5154448B2 JP 2008551079 A JP2008551079 A JP 2008551079A JP 2008551079 A JP2008551079 A JP 2008551079A JP 5154448 B2 JP5154448 B2 JP 5154448B2
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- graphite material
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- graphite
- compound containing
- silicon
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- 239000007770 graphite material Substances 0.000 title claims description 90
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 40
- 150000001875 compounds Chemical class 0.000 claims description 40
- 229910002804 graphite Inorganic materials 0.000 claims description 37
- 239000010439 graphite Substances 0.000 claims description 37
- 229910052751 metal Inorganic materials 0.000 claims description 28
- 239000002184 metal Substances 0.000 claims description 28
- 239000013078 crystal Substances 0.000 claims description 23
- 239000000654 additive Substances 0.000 claims description 22
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 22
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 22
- 230000000996 additive effect Effects 0.000 claims description 19
- 229910052710 silicon Inorganic materials 0.000 claims description 18
- 239000010703 silicon Substances 0.000 claims description 18
- 239000000843 powder Substances 0.000 claims description 17
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 15
- 238000010438 heat treatment Methods 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000000465 moulding Methods 0.000 claims description 12
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 11
- 229910052719 titanium Inorganic materials 0.000 claims description 11
- 239000010936 titanium Substances 0.000 claims description 11
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 10
- 229910052791 calcium Inorganic materials 0.000 claims description 10
- 239000011575 calcium Substances 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000010949 copper Substances 0.000 claims description 10
- 239000002905 metal composite material Substances 0.000 claims description 10
- 229910052726 zirconium Inorganic materials 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 9
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims description 9
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 8
- 238000002441 X-ray diffraction Methods 0.000 claims description 8
- 229910045601 alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 8
- 230000017525 heat dissipation Effects 0.000 claims description 8
- 229910052742 iron Inorganic materials 0.000 claims description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims description 8
- 239000011733 molybdenum Substances 0.000 claims description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 7
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 claims description 7
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 239000011651 chromium Substances 0.000 claims description 7
- 229910017052 cobalt Inorganic materials 0.000 claims description 7
- 239000010941 cobalt Substances 0.000 claims description 7
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 229910052758 niobium Inorganic materials 0.000 claims description 7
- 239000010955 niobium Substances 0.000 claims description 7
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 7
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical group [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 7
- 229910052707 ruthenium Inorganic materials 0.000 claims description 7
- 229910052713 technetium Inorganic materials 0.000 claims description 7
- GKLVYJBZJHMRIY-UHFFFAOYSA-N technetium atom Chemical compound [Tc] GKLVYJBZJHMRIY-UHFFFAOYSA-N 0.000 claims description 7
- 229910001928 zirconium oxide Inorganic materials 0.000 claims description 7
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 5
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 5
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052727 yttrium Inorganic materials 0.000 claims description 5
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 5
- 239000011230 binding agent Substances 0.000 claims description 3
- 238000010298 pulverizing process Methods 0.000 claims description 3
- 238000004898 kneading Methods 0.000 claims description 2
- 238000002156 mixing Methods 0.000 claims description 2
- 239000002253 acid Substances 0.000 claims 2
- -1 Lee Ttoriumu Chemical compound 0.000 claims 1
- 238000000746 purification Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 22
- 239000002245 particle Substances 0.000 description 16
- 238000011161 development Methods 0.000 description 9
- 230000001737 promoting effect Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 238000009835 boiling Methods 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000004453 electron probe microanalysis Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 3
- 239000000571 coke Substances 0.000 description 3
- 238000005087 graphitization Methods 0.000 description 3
- 229910052720 vanadium Inorganic materials 0.000 description 3
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910026551 ZrC Inorganic materials 0.000 description 2
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000003197 catalytic effect Effects 0.000 description 2
- 150000001805 chlorine compounds Chemical class 0.000 description 2
- 239000011294 coal tar pitch Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(II) oxide Inorganic materials [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 2
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 description 2
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 238000005470 impregnation Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- VASIZKWUTCETSD-UHFFFAOYSA-N oxomanganese Chemical compound [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 239000005997 Calcium carbide Substances 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910021383 artificial graphite Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- BGGJELJUYBEGKP-UHFFFAOYSA-N chromium(2+);oxygen(2-) Chemical compound [O-2].[Cr+2] BGGJELJUYBEGKP-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000007723 die pressing method Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- LIKBJVNGSGBSGK-UHFFFAOYSA-N iron(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Fe+3].[Fe+3] LIKBJVNGSGBSGK-UHFFFAOYSA-N 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000000462 isostatic pressing Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000011812 mixed powder Substances 0.000 description 1
- 229910021382 natural graphite Inorganic materials 0.000 description 1
- 239000011331 needle coke Substances 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 239000012264 purified product Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- CLZWAWBPWVRRGI-UHFFFAOYSA-N tert-butyl 2-[2-[2-[2-[bis[2-[(2-methylpropan-2-yl)oxy]-2-oxoethyl]amino]-5-bromophenoxy]ethoxy]-4-methyl-n-[2-[(2-methylpropan-2-yl)oxy]-2-oxoethyl]anilino]acetate Chemical compound CC1=CC=C(N(CC(=O)OC(C)(C)C)CC(=O)OC(C)(C)C)C(OCCOC=2C(=CC=C(Br)C=2)N(CC(=O)OC(C)(C)C)CC(=O)OC(C)(C)C)=C1 CLZWAWBPWVRRGI-UHFFFAOYSA-N 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
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- C04B35/532—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite obtained from carbonaceous particles with or without other non-organic components containing a carbonisable binder
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Description
特許文献1:特開昭60−246216号公報
比較的高い温度で黒鉛結晶の発達を促す作用を示す第2の添加物としては、以下のものが挙げられる。
上述のように、第1の添加物としては、炭化珪素が最も好ましく、第2の添加物としては、酸化ジルコニウム及び酸化チタニウムが最も好ましい。
(発明の効果)
以下の実施例及び比較例においては、以下に示す第一〜第三段階からなる製造方法により黒鉛材料を製造した。
第一段階:骨材となるニードルコークス粉末100質量部(粒度範囲およそ100μm)、コールタールピッチ10〜70質量部(加熱すれば液状になるもの)を、混捏して結合塊を作製し、これを粉砕した粉砕粉(粒度範囲およそ1000μm)を用意する。
得られた黒鉛材料について、密度、熱膨張係数、熱伝導率、添加元素の残存量、及び結晶構造(面間隔(d112))を、以下のようにして測定した。
表2に示すように、炭化珪素(平均粒径50μm)を5mass%、酸化チタニウム(平均粒径50μm)を10mass%添加し、上記の第一〜第三段階により黒鉛材料を製造した。製造条件及び黒鉛材料の特性を表2に示す。
図3は、実施例3及び実施例4で得られた黒鉛材料のX線回折パターンを示す図である。図3に示すように、実施例3においては、炭化珪素及び炭化ジルコニウムのピークが得られており、実施例4においては、炭化珪素と炭化チタニウムのピークが得られている。このことから、添加物の元素は、炭化物として最終的な黒鉛材料中に残存していることが確認された。
上記実施例の黒鉛材料に、銅、銅合金、アルミニウム、またはアルミニウム合金を含浸させた。アルゴンの不活性ガス雰囲気下で、これらの金属または合金を溶解し、この中に黒鉛材料を浸漬し、加圧することにより、金属または合金を含浸させた。得られた黒鉛金属複合材料は、良好な放熱性を有しており、放熱部材として適したものであった。
Claims (23)
- X線回折による黒鉛結晶の112面の厚みが15nm以上で、かつX、Y、及びZ軸の三方向の平均熱伝導率が250W/(m・K)以上である黒鉛材料であって、
骨材と粘結材を含む粉砕粉に、珪素、ジルコニウム、カルシウム、チタニウム、クロム、マンガン、鉄、コバルト、ニッケル、イットリウム、ニオブ、モリブデン、テクネチウム及びルテニウム元素またはその元素を含む化合物から選ばれる少なくとも2種類以上を含有させた成形用粉末を熱処理することにより得られ、熱処理後の前記元素の残存量が、3mass%以下であることを特徴とする黒鉛材料。 - 前記元素を含む化合物が、炭化物または酸化物であることを特徴とする請求項1に記載の黒鉛材料。
- 前記元素を含む化合物が、珪素を含む化合物とジルコニウムを含む化合物であることを特徴とする請求項1または2に記載の黒鉛材料。
- 前記珪素を含む化合物が、炭化珪素であることを特徴とする請求項3に記載の黒鉛材料。
- 前記ジルコニウムを含む化合物が、酸化ジルコニウムであることを特徴とする請求項3または4に記載の黒鉛材料。
- 前記元素を含む化合物が、珪素を含む化合物とチタニウムを含む化合物であることを特徴とする請求項1または2に記載の黒鉛材料。
- 前記珪素を含む化合物が、炭化珪素であることを特徴とする請求項6に記載の黒鉛材料。
- 前記チタニウムを含む化合物が、酸化チタニウムであることを特徴とする請求項6または7に記載の黒鉛材料。
- 前記元素の残存量が、それぞれ0.1mass%以上であることを特徴とする請求項1〜8のいずれか1項に記載の黒鉛材料。
- 請求項1〜9のいずれか1項に記載の黒鉛材料を製造する方法であって、
骨材と粘結材を混合、混捏、粉砕して得た粉砕粉に、珪素、ジルコニウム、カルシウム、チタニウム、クロム、マンガン、鉄、コバルト、ニッケル、イットリウム、ニオブ、モリブデン、テクネチウムおよびルテニウム元素またはその元素を含む化合物から選ばれる少なくとも2種類以上を含有させた成形用粉末を調製する工程と、
前記成形用粉末を成形し、熱処理する工程とを備えることを特徴とする黒鉛材料の製造方法。 - 前記元素を含む化合物が、炭化物または酸化物であることを特徴とする請求項10に記載の黒鉛材料の製造方法。
- 前記元素を含む化合物が、珪素を含む化合物とジルコニウムを含む化合物であることを特徴とする請求項10または11に記載の黒鉛材料の製造方法。
- 前記珪素を含む化合物が、炭化珪素であることを特徴とする請求項12に記載の黒鉛材料の製造方法。
- 前記ジルコニウムを含む化合物が、酸化ジルコニウムであることを特徴とする請求項12または13に記載の黒鉛材料の製造方法。
- 前記元素を含む化合物が、珪素を含む化合物とチタニウムを含む化合物であることを特徴とする請求項10または11に記載の黒鉛材料の製造方法。
- 前記珪素を含む化合物が、炭化珪素であることを特徴とする請求項15に記載の黒鉛材料の製造方法。
- 前記チタニウムを含む化合物が、酸化チタニウムであることを特徴とする請求項15または16に記載の黒鉛材料の製造方法。
- さらに高純度処理を施したことを特徴とする請求項1〜9のいずれか1項に記載の黒鉛材料。
- 請求項1〜9及び18のいずれか1項に記載の黒鉛材料に、金属または合金を含浸させたことを特徴とする黒鉛金属複合材料。
- 金属または合金が、銅、銅合金、アルミニウム、またはアルミニウム合金であることを特徴とする請求項19に記載の黒鉛金属複合材料。
- 請求項1〜9及び18のいずれか1項に記載の黒鉛材料、または請求項19もしくは20に記載の黒鉛金属複合材料の表面に金属を被覆したことを特徴とする金属被覆黒鉛材料。
- 請求項1〜9及び18のいずれか1項に記載の黒鉛材料、請求項19もしくは20に記載の黒鉛金属複合材料、または請求項21に記載の金属被覆黒鉛材料を使用したことを特徴とする放熱部材。
- 請求項22に記載の放熱部材を使用した半導体電子機器。
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JP5352893B2 (ja) * | 2008-04-14 | 2013-11-27 | 東洋炭素株式会社 | 炭素繊維炭素複合成形体及び炭素繊維強化炭素複合体材料並びにその製造方法 |
JP5340069B2 (ja) * | 2008-08-29 | 2013-11-13 | 京セラ株式会社 | 炭素−金属複合体およびこれを用いた回路部材または放熱部材 |
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US20110286876A1 (en) * | 2010-05-24 | 2011-11-24 | Applied Nanotech Holdings, Inc. | Thermal management composite materials |
DE102010038669A1 (de) * | 2010-07-29 | 2012-02-02 | Sgl Carbon Se | Kathodenblock für eine Aluminium-Elektrolysezelle und ein Verfahren zu seiner Herstellung |
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US20130108015A1 (en) | 2011-10-28 | 2013-05-02 | Csem Centre Suisse D'electronique Et De Microtechnique S.A - Recherche Et Developpement | X-ray interferometer |
KR101543888B1 (ko) * | 2013-12-20 | 2015-08-11 | 주식회사 포스코 | 방열성이 우수한 금속 봉지재, 그 제조방법 및 상기 금속 봉지재로 봉지된 유연전자소자 |
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CN109207786B (zh) * | 2018-11-01 | 2020-08-07 | 西北工业大学 | Zr3Al3C5-ZrAlxSiy复合材料制备方法 |
EP3905305A4 (en) * | 2018-12-28 | 2022-09-21 | National Institute Of Advanced Industrial Science And Technology | SILICON SUBSTRATE/THIN GRAPHITE FILM LAMINATE, METHOD FOR PRODUCTION THEREOF, AND SUBSTRATE FOR HIGH HEAT EXHAUST TYPE ELECTRONIC DEVICES |
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