JP5154253B2 - 電子部品パッケージ - Google Patents
電子部品パッケージ Download PDFInfo
- Publication number
- JP5154253B2 JP5154253B2 JP2008035762A JP2008035762A JP5154253B2 JP 5154253 B2 JP5154253 B2 JP 5154253B2 JP 2008035762 A JP2008035762 A JP 2008035762A JP 2008035762 A JP2008035762 A JP 2008035762A JP 5154253 B2 JP5154253 B2 JP 5154253B2
- Authority
- JP
- Japan
- Prior art keywords
- electronic component
- layer
- chip
- component package
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/12—Mountings, e.g. non-detachable insulating substrates
- H01L23/14—Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
- H01L23/147—Semiconductor insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49805—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers the leads being also applied on the sidewalls or the bottom of the substrate, e.g. leadless packages for surface mounting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L24/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/82—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by forming build-up interconnects at chip-level, e.g. for high density interconnects [HDI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/065—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L25/0652—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next and on each other, i.e. mixed assemblies
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
- H01L2224/241—Disposition
- H01L2224/24135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/24137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L2224/23—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process
- H01L2224/24—Structure, shape, material or disposition of the high density interconnect connectors after the connecting process of an individual high density interconnect connector
- H01L2224/241—Disposition
- H01L2224/24151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/24221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/24225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/24226—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the HDI interconnect connecting to the same level of the item at which the semiconductor or solid-state body is mounted, e.g. the item being planar
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73267—Layer and HDI connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
- H01L2224/92—Specific sequence of method steps
- H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
- H01L2224/9222—Sequential connecting processes
- H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
- H01L2224/92244—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a build-up interconnect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01006—Carbon [C]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01013—Aluminum [Al]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01015—Phosphorus [P]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01024—Chromium [Cr]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01029—Copper [Cu]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01033—Arsenic [As]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01042—Molybdenum [Mo]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01044—Ruthenium [Ru]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01074—Tungsten [W]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01082—Lead [Pb]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
Description
複数の電子部品パッケージに対応した複数組の外部接続端子と、複数組の外部接続端子を保持するウェハ本体とを有し、それぞれ後に互いに分離されることによって基体となる複数の基体予定部を含むウェハを作製する工程と、
ウェハにおける各基体予定部の上にそれぞれ複数の階層部分が配置されるように、ウェハの上に複数組の階層部分を形成して、ウェハと複数組の階層部分を含む電子部品パッケージ用基礎構造物を作製する工程と、
各基体予定部とその上に配置された複数の階層部分とを含む部分が互いに分離されて複数の電子部品パッケージが形成されるように、電子部品パッケージ用基礎構造物を切断する工程とを備えている。
Claims (13)
- 上面と側面とを有する基体と、それぞれ少なくとも1つの電子部品チップを含み、前記基体の上面上に積み重ねられた複数の階層部分とを備えた電子部品パッケージであって、
前記基体は、複数の外部接続端子と、前記複数の外部接続端子を保持する保持部と、前記基体に最も近い階層部分に含まれる少なくとも1つの電子部品チップが接合されるチップ接合用導体層とを含み、
各階層部分は、更に、前記電子部品チップを覆う絶縁層と、前記電子部品チップに電気的に接続された階層部分内導体層とを含み、
各外部接続端子は、前記基体の側面に配置された端面を有し、
前記複数の階層部分に含まれる複数の電子部品チップのうちの少なくとも1つは、少なくとも1つの外部接続端子に電気的に接続され、
各電子部品チップは複数の電極を有し、
少なくとも1つの階層部分は、複数の電子部品チップを含むと共に、前記階層部分内導体層として、前記複数の電子部品チップの電極同士を電気的に接続する少なくとも1つのチップ間接続部を含むことを特徴とする電子部品パッケージ。 - 前記基体に最も近い階層部分は、前記階層部分内導体層として、そこに含まれる電子部品チップの少なくとも1つの電極と少なくとも1つの外部接続端子とを電気的に接続する少なくとも1つの端子用接続部を含むことを特徴とする請求項1記載の電子部品パッケージ。
- 前記電子部品パッケージは、前記複数の階層部分のうちの、前記基体に最も近い階層部分以外の階層部分に含まれる電子部品チップの少なくとも1つの電極と少なくとも1つの外部接続端子とを電気的に接続する少なくとも1つの端子用接続路を含むことを特徴とする請求項1記載の電子部品パッケージ。
- 前記少なくとも1つの端子用接続路は、少なくとも1つの階層部分を貫通する柱状導体を含むことを特徴とする請求項3記載の電子部品パッケージ。
- 前記複数の電子部品チップを含む前記少なくとも1つの階層部分における前記絶縁層は、前記複数の電子部品チップを覆い、平坦化された上面を有し、
前記複数の電子部品チップを覆う絶縁層は、前記少なくとも1つのチップ間接続部によって接続される複数の電極を露出させるための開口部を有し、
前記少なくとも1つのチップ間接続部は、前記複数の電子部品チップを覆う絶縁層の上に配置された部分と前記開口部に挿入された部分とを含むことを特徴とする請求項1記載の電子部品パッケージ。 - 前記複数の電子部品チップを覆う絶縁層は、前記複数の電子部品チップを覆う樹脂絶縁膜と、前記樹脂絶縁膜を覆い、平坦化された上面を有する無機絶縁膜とを含むことを特徴とする請求項5記載の電子部品パッケージ。
- 前記電子部品パッケージは、異なる階層部分に含まれる2つの電子部品チップの電極同士を接続する少なくとも1つのチップ間接続路を含むことを特徴とする請求項1記載の電子部品パッケージ。
- 前記少なくとも1つのチップ間接続路は、少なくとも1つの階層部分を貫通する柱状導体を含むことを特徴とする請求項7記載の電子部品パッケージ。
- 前記複数の階層部分のうちの、前記基体から最も遠い階層部分以外の階層部分は、平坦化され、その上に配置された階層部分に接する上面を有する平坦化層を含むことを特徴とする請求項1記載の電子部品パッケージ。
- 前記平坦化層は、樹脂絶縁膜と、前記樹脂絶縁膜を覆い、平坦化された上面を有する無機絶縁膜とを含むことを特徴とする請求項9記載の電子部品パッケージ。
- 前記基体から最も遠い階層部分は、更に、そこに含まれる少なくとも1つの電子部品チップを覆う保護層を含むことを特徴とする請求項1記載の電子部品パッケージ。
- 電子部品パッケージは、更に、前記基体の側面に配置され、それぞれ前記外部接続端子の端面に接続された複数の端子用導体膜を備えたことを特徴とする請求項1記載の電子部品パッケージ。
- 電子部品パッケージは、更に、それぞれ前記外部接続端子の端面に接続された複数の端子用ピンを備えたことを特徴とする請求項1記載の電子部品パッケージ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/878,282 US7906838B2 (en) | 2007-07-23 | 2007-07-23 | Electronic component package and method of manufacturing same |
US11/878,282 | 2007-07-23 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009027130A JP2009027130A (ja) | 2009-02-05 |
JP5154253B2 true JP5154253B2 (ja) | 2013-02-27 |
Family
ID=40294534
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008035762A Expired - Fee Related JP5154253B2 (ja) | 2007-07-23 | 2008-02-18 | 電子部品パッケージ |
Country Status (2)
Country | Link |
---|---|
US (1) | US7906838B2 (ja) |
JP (1) | JP5154253B2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8435837B2 (en) * | 2009-12-15 | 2013-05-07 | Silicon Storage Technology, Inc. | Panel based lead frame packaging method and device |
US8012802B2 (en) * | 2010-02-04 | 2011-09-06 | Headway Technologies, Inc. | Method of manufacturing layered chip package |
EP3013734B1 (en) * | 2013-06-25 | 2021-02-24 | Hairy Back Ranch Inc. | A foldable stirrup for mounting animals and methods of mounting an animal |
US20150115420A1 (en) * | 2013-10-31 | 2015-04-30 | Navas Khan Oratti Kalandar | Sensor die grid array package |
KR102154039B1 (ko) * | 2013-12-23 | 2020-09-09 | 에스케이하이닉스 주식회사 | 접속 조인트부의 크랙이 억제된 칩 내장형 패키지 |
US10923456B2 (en) * | 2018-12-20 | 2021-02-16 | Cerebras Systems Inc. | Systems and methods for hierarchical exposure of an integrated circuit having multiple interconnected die |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5247423A (en) * | 1992-05-26 | 1993-09-21 | Motorola, Inc. | Stacking three dimensional leadless multi-chip module and method for making the same |
JP2960276B2 (ja) * | 1992-07-30 | 1999-10-06 | 株式会社東芝 | 多層配線基板、この基板を用いた半導体装置及び多層配線基板の製造方法 |
KR0179920B1 (ko) | 1996-05-17 | 1999-03-20 | 문정환 | 칩 사이즈 패키지의 제조방법 |
KR100447035B1 (ko) * | 1996-11-21 | 2004-09-07 | 가부시키가이샤 히타치세이사쿠쇼 | 반도체 장치의 제조방법 |
JP2001035993A (ja) | 1999-07-19 | 2001-02-09 | Sony Corp | マルチチップモジュールおよびその製造方法 |
JP4158008B2 (ja) * | 1999-11-16 | 2008-10-01 | セイコーエプソン株式会社 | 半導体チップの製造方法 |
JP2001244403A (ja) | 2000-02-29 | 2001-09-07 | Seiko Epson Corp | 半導体装置及びその製造方法 |
JP2003163324A (ja) | 2001-11-27 | 2003-06-06 | Nec Corp | ユニット半導体装置及びその製造方法並びに3次元積層型半導体装置 |
-
2007
- 2007-07-23 US US11/878,282 patent/US7906838B2/en not_active Expired - Fee Related
-
2008
- 2008-02-18 JP JP2008035762A patent/JP5154253B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20090026603A1 (en) | 2009-01-29 |
JP2009027130A (ja) | 2009-02-05 |
US7906838B2 (en) | 2011-03-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4994274B2 (ja) | 電子部品パッケージの製造方法 | |
JP5536973B2 (ja) | 貫通接続構造物を高密度に備えた積層可能な層構造体及び積層体 | |
JP5389956B2 (ja) | ボンドパッドを貫通して延在するバイアを有するスタック型マイクロ電子アセンブリ | |
KR101124568B1 (ko) | 반도체 칩, 이를 포함하는 적층 칩 구조의 반도체 패키지 | |
JP5004311B2 (ja) | 積層チップパッケージおよびその製造方法 | |
JP5154667B2 (ja) | 積層チップパッケージおよびその製造方法 | |
CN107403733A (zh) | 三层叠层封装结构及其形成方法 | |
JP5769293B2 (ja) | 積層チップパッケージの製造方法 | |
JP5154253B2 (ja) | 電子部品パッケージ | |
JP2012253392A (ja) | モールド再構成ウェハーを利用したスタックパッケージ及びその製造方法 | |
JP5228068B2 (ja) | 積層チップパッケージおよびその製造方法 | |
US10651150B2 (en) | Multichip module including surface mounting part embedded therein | |
KR102508526B1 (ko) | 반도체 패키지 제조 방법 | |
KR20140063271A (ko) | 관통 전극을 갖는 반도체 장치 및 그 제조 방법 | |
JP5389752B2 (ja) | 電子部品パッケージの製造方法 | |
TWI518874B (zh) | 半導體封裝、半導體封裝單元以及半導體封裝製造方法 | |
JP5313291B2 (ja) | 積層チップパッケージの製造方法 | |
JP5241219B2 (ja) | 電子部品パッケージの製造方法、電子部品パッケージ用ウェハの製造方法ならびに電子部品パッケージ用基礎構造物の製造方法 | |
JP2012060102A (ja) | 積層チップパッケージおよびその製造方法 | |
JP2011091358A (ja) | 半導体基板、積層チップパッケージおよび半導体プレート並びにこれらの製造方法 | |
KR100577015B1 (ko) | 반도체 소자의 적층 칩 패키지 및 그 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100311 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120523 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120704 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120829 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20121106 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20121204 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20121205 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20151214 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5154253 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |