JP5151823B2 - 圧電振動片、圧電振動子及び発振器 - Google Patents
圧電振動片、圧電振動子及び発振器 Download PDFInfo
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- JP5151823B2 JP5151823B2 JP2008224731A JP2008224731A JP5151823B2 JP 5151823 B2 JP5151823 B2 JP 5151823B2 JP 2008224731 A JP2008224731 A JP 2008224731A JP 2008224731 A JP2008224731 A JP 2008224731A JP 5151823 B2 JP5151823 B2 JP 5151823B2
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- Prior art keywords
- piezoelectric
- vibrating piece
- value
- substrate
- vibration
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- 239000000758 substrate Substances 0.000 claims description 58
- 239000010453 quartz Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 239000000853 adhesive Substances 0.000 claims description 14
- 230000001070 adhesive effect Effects 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000013078 crystal Substances 0.000 description 21
- 230000008878 coupling Effects 0.000 description 16
- 238000010168 coupling process Methods 0.000 description 16
- 238000005859 coupling reaction Methods 0.000 description 16
- 230000000694 effects Effects 0.000 description 9
- 230000008859 change Effects 0.000 description 7
- 238000005530 etching Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000009412 basement excavation Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008224731A JP5151823B2 (ja) | 2008-09-02 | 2008-09-02 | 圧電振動片、圧電振動子及び発振器 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008224731A JP5151823B2 (ja) | 2008-09-02 | 2008-09-02 | 圧電振動片、圧電振動子及び発振器 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010062723A JP2010062723A (ja) | 2010-03-18 |
JP2010062723A5 JP2010062723A5 (enrdf_load_stackoverflow) | 2011-11-04 |
JP5151823B2 true JP5151823B2 (ja) | 2013-02-27 |
Family
ID=42189068
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2008224731A Expired - Fee Related JP5151823B2 (ja) | 2008-09-02 | 2008-09-02 | 圧電振動片、圧電振動子及び発振器 |
Country Status (1)
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JP (1) | JP5151823B2 (enrdf_load_stackoverflow) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5589167B2 (ja) | 2010-11-19 | 2014-09-17 | セイコーエプソン株式会社 | 圧電振動片および圧電振動子 |
JP5772081B2 (ja) * | 2011-03-09 | 2015-09-02 | セイコーエプソン株式会社 | 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス |
JP5772082B2 (ja) * | 2011-03-09 | 2015-09-02 | セイコーエプソン株式会社 | 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス |
CN202535316U (zh) | 2011-03-09 | 2012-11-14 | 精工爱普生株式会社 | 振动元件、振子、振荡器以及电子设备 |
JP5708089B2 (ja) | 2011-03-18 | 2015-04-30 | セイコーエプソン株式会社 | 圧電振動素子、圧電振動子、圧電発振器及び電子デバイス |
JP2013021667A (ja) | 2011-03-23 | 2013-01-31 | Nippon Dempa Kogyo Co Ltd | 水晶デバイス |
JP5982898B2 (ja) * | 2012-03-14 | 2016-08-31 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、発振器、及び電子機器 |
JP5943186B2 (ja) * | 2012-03-19 | 2016-06-29 | セイコーエプソン株式会社 | 振動片、振動子、電子デバイス、および電子機器 |
JP2013197801A (ja) * | 2012-03-19 | 2013-09-30 | Seiko Epson Corp | 振動片、振動子、電子デバイス、および電子機器 |
JP6175743B2 (ja) * | 2012-06-06 | 2017-08-09 | セイコーエプソン株式会社 | 振動素子の製造方法 |
WO2014167980A1 (ja) * | 2013-04-08 | 2014-10-16 | 株式会社村田製作所 | 水晶振動装置 |
JP5741876B2 (ja) * | 2014-03-19 | 2015-07-01 | セイコーエプソン株式会社 | 圧電振動片および圧電振動子 |
JP5871144B2 (ja) * | 2014-03-19 | 2016-03-01 | セイコーエプソン株式会社 | 圧電振動子 |
JP6390836B2 (ja) | 2014-07-31 | 2018-09-19 | セイコーエプソン株式会社 | 振動片、振動子、振動デバイス、発振器、電子機器、および移動体 |
US9503045B2 (en) | 2015-01-19 | 2016-11-22 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, and moving object |
WO2016199918A1 (ja) | 2015-06-12 | 2016-12-15 | 株式会社村田製作所 | 水晶片及び水晶振動子 |
CN107636962B (zh) * | 2015-06-12 | 2020-07-31 | 株式会社村田制作所 | 石英片以及石英振子 |
JPWO2017006941A1 (ja) * | 2015-07-09 | 2018-04-19 | 株式会社村田製作所 | 水晶振動片及び水晶振動子 |
JP6176365B2 (ja) * | 2016-06-14 | 2017-08-09 | セイコーエプソン株式会社 | 振動片、発振器および電子機器 |
JP6238032B2 (ja) * | 2016-06-30 | 2017-11-29 | セイコーエプソン株式会社 | 振動素子、振動子、電子デバイス、および電子機器 |
JP6327307B2 (ja) * | 2016-09-15 | 2018-05-23 | セイコーエプソン株式会社 | 圧電振動片および圧電振動子 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54151389A (en) * | 1978-05-19 | 1979-11-28 | Seiko Instr & Electronics Ltd | Crystal oscillator of rectangular at cut |
JPS5669918A (en) * | 1979-11-13 | 1981-06-11 | Seiko Instr & Electronics Ltd | Rectangular at cut quartz oscillator |
JPS5847316A (ja) * | 1981-09-16 | 1983-03-19 | Seikosha Co Ltd | 厚みすべり圧電振動子およびその製法 |
JPH0213007A (ja) * | 1988-06-29 | 1990-01-17 | Murata Mfg Co Ltd | LiTaO↓3厚みすべり振動子 |
JPH05243889A (ja) * | 1992-02-27 | 1993-09-21 | Kyocera Corp | 厚みすべり圧電振動素子 |
JP2001230654A (ja) * | 2000-02-16 | 2001-08-24 | Matsushita Electric Ind Co Ltd | 圧電振動素子およびその製造方法 |
JP4665282B2 (ja) * | 2000-02-18 | 2011-04-06 | エプソントヨコム株式会社 | Atカット水晶振動子 |
JP2003017978A (ja) * | 2001-06-29 | 2003-01-17 | Kinseki Ltd | 圧電振動子 |
JP3894771B2 (ja) * | 2001-10-29 | 2007-03-22 | 京セラ株式会社 | 圧電共振装置 |
JP4506135B2 (ja) * | 2003-09-18 | 2010-07-21 | エプソントヨコム株式会社 | 圧電振動子 |
JP4341583B2 (ja) * | 2005-06-02 | 2009-10-07 | エプソントヨコム株式会社 | メサ型水晶振動子 |
JP4572807B2 (ja) * | 2005-10-31 | 2010-11-04 | エプソントヨコム株式会社 | メサ型圧電振動片 |
JP2007189491A (ja) * | 2006-01-13 | 2007-07-26 | Epson Toyocom Corp | 圧電基板の製造方法、圧電基板、圧電振動子、及び圧電発振器 |
JP4341671B2 (ja) * | 2006-11-30 | 2009-10-07 | エプソントヨコム株式会社 | メサ型水晶振動子 |
JP2008187579A (ja) * | 2007-01-31 | 2008-08-14 | Epson Toyocom Corp | 水晶発振器 |
JP2008263387A (ja) * | 2007-04-11 | 2008-10-30 | Epson Toyocom Corp | メサ型圧電振動片 |
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2008
- 2008-09-02 JP JP2008224731A patent/JP5151823B2/ja not_active Expired - Fee Related
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JP2010062723A (ja) | 2010-03-18 |
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