JP5146366B2 - 光学式エンコーダ - Google Patents

光学式エンコーダ Download PDF

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Publication number
JP5146366B2
JP5146366B2 JP2009054848A JP2009054848A JP5146366B2 JP 5146366 B2 JP5146366 B2 JP 5146366B2 JP 2009054848 A JP2009054848 A JP 2009054848A JP 2009054848 A JP2009054848 A JP 2009054848A JP 5146366 B2 JP5146366 B2 JP 5146366B2
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JP
Japan
Prior art keywords
slit
annular slit
displacement
annular
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2009054848A
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English (en)
Japanese (ja)
Other versions
JP2010210316A5 (enExample
JP2010210316A (ja
Inventor
吉田　　康
陽介 山口
嚆二 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Corp filed Critical Yaskawa Electric Corp
Priority to JP2009054848A priority Critical patent/JP5146366B2/ja
Priority to US12/717,135 priority patent/US8258459B2/en
Priority to KR1020100020278A priority patent/KR20100101532A/ko
Priority to CN2010101288075A priority patent/CN101832790B/zh
Publication of JP2010210316A publication Critical patent/JP2010210316A/ja
Publication of JP2010210316A5 publication Critical patent/JP2010210316A5/ja
Application granted granted Critical
Publication of JP5146366B2 publication Critical patent/JP5146366B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/3473—Circular or rotary encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34776—Absolute encoders with analogue or digital scales
    • G01D5/34792—Absolute encoders with analogue or digital scales with only digital scales or both digital and incremental scales
    • G01D5/34794—Optical encoders using the Vernier principle, i.e. incorporating two or more tracks having a (n, n+1, ...) relationship
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
JP2009054848A 2009-03-09 2009-03-09 光学式エンコーダ Expired - Fee Related JP5146366B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009054848A JP5146366B2 (ja) 2009-03-09 2009-03-09 光学式エンコーダ
US12/717,135 US8258459B2 (en) 2009-03-09 2010-03-04 Optical encoder and motor system comprising dual decentered annular slits
KR1020100020278A KR20100101532A (ko) 2009-03-09 2010-03-08 광학식 인코더
CN2010101288075A CN101832790B (zh) 2009-03-09 2010-03-08 光学式编码器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009054848A JP5146366B2 (ja) 2009-03-09 2009-03-09 光学式エンコーダ

Publications (3)

Publication Number Publication Date
JP2010210316A JP2010210316A (ja) 2010-09-24
JP2010210316A5 JP2010210316A5 (enExample) 2012-01-19
JP5146366B2 true JP5146366B2 (ja) 2013-02-20

Family

ID=42677387

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009054848A Expired - Fee Related JP5146366B2 (ja) 2009-03-09 2009-03-09 光学式エンコーダ

Country Status (4)

Country Link
US (1) US8258459B2 (enExample)
JP (1) JP5146366B2 (enExample)
KR (1) KR20100101532A (enExample)
CN (1) CN101832790B (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6032010B2 (ja) 2010-10-12 2016-11-24 株式会社ニコン エンコーダ、駆動装置及びロボット装置
JP4945674B2 (ja) 2010-11-08 2012-06-06 株式会社安川電機 反射型エンコーダ、サーボモータ及びサーボユニット
CN102261927A (zh) * 2011-04-28 2011-11-30 南京中科天文仪器有限公司 一种输出单周期位置型正弦波信号的单码道光栅编码器
CN103718004B (zh) * 2011-07-22 2016-05-18 株式会社安川电机 伺服马达制造方法、伺服马达制造装置、伺服马达和编码器
CN103017801B (zh) * 2011-09-23 2014-06-11 华为终端有限公司 位置检测装置
EP2775269B1 (en) * 2011-10-31 2019-03-06 NSK Ltd. Torque detection device and electric power steering device
JPWO2014141370A1 (ja) * 2013-03-11 2017-02-16 株式会社安川電機 エンコーダ、エンコーダ付きモータ、サーボシステム
CN103471629A (zh) * 2013-09-22 2013-12-25 绵阳福德机器人有限责任公司 一种单圈绝对值编码盘
JP6004194B2 (ja) * 2013-11-05 2016-10-05 株式会社安川電機 エンコーダ、エンコーダ付きモータ、サーボシステム
JP2015090308A (ja) * 2013-11-05 2015-05-11 株式会社安川電機 エンコーダ、エンコーダ付きモータ、サーボシステム
JP6128328B2 (ja) * 2013-11-05 2017-05-17 株式会社安川電機 エンコーダ、エンコーダ付きモータ、サーボシステム
US10914614B2 (en) * 2015-07-17 2021-02-09 Nikon Corporation Encoder apparatus and method for calculating eccentricity information based on a phase difference between an incremental detection signal and an absolute detection signal used to correct rotational information
CN106767600B (zh) * 2016-12-27 2018-11-23 西安交通大学 一种高精度同步监测旋转体转角及径向位移的系统
JP6404984B1 (ja) * 2017-04-07 2018-10-17 ファナック株式会社 ロータリエンコーダ
US11340336B2 (en) 2017-12-07 2022-05-24 Ouster, Inc. Rotating light ranging system with optical communication uplink and downlink channels
JP7293985B2 (ja) * 2019-08-27 2023-06-20 日本精工株式会社 角度検出装置
JP6940105B1 (ja) * 2020-10-08 2021-09-22 多摩川精機株式会社 エンコーダ装置
CN118369553A (zh) * 2021-12-27 2024-07-19 松下知识产权经营株式会社 编码器以及安装方法
JP2023183432A (ja) * 2022-06-16 2023-12-28 多摩川精機株式会社 ロータリエンコーダ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1059597A1 (ru) * 1982-07-12 1983-12-07 Институт радиофизики и электроники АН АрмССР Преобразователь угла поворота вала в код
JPH06341858A (ja) * 1993-06-02 1994-12-13 Copal Co Ltd 光学式変位検出装置
JPH06341859A (ja) * 1993-06-02 1994-12-13 Copal Co Ltd 光学式ｓｉｎ／ｃｏｓ関数出力ポテンショメータ
JPH06235646A (ja) * 1993-07-27 1994-08-23 Harmonic Drive Syst Ind Co Ltd 回転角検知装置
KR100215926B1 (ko) * 1996-05-17 1999-08-16 류정열 엔코더와 포텐시어미터의 결합된 방식을 가지는 자동차의 조향각도센서
JP4768164B2 (ja) * 2001-08-10 2011-09-07 株式会社リコー ロータリーエンコーダ装置
CN100359291C (zh) * 2004-09-27 2008-01-02 中国科学院长春光学精密机械与物理研究所 一种绝对式单圈偏心码道编码盘
US7595480B2 (en) * 2006-10-16 2009-09-29 Arcus Technology, Inc. Optical encoder with encoder member having one or more digital diffractive optic regions
JP4900140B2 (ja) 2007-08-30 2012-03-21 株式会社安川電機 光学式エンコーダ
DE102007056612A1 (de) * 2007-11-23 2009-05-28 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung

Also Published As

Publication number Publication date
US20100224768A1 (en) 2010-09-09
JP2010210316A (ja) 2010-09-24
US8258459B2 (en) 2012-09-04
KR20100101532A (ko) 2010-09-17
CN101832790B (zh) 2012-06-20
CN101832790A (zh) 2010-09-15

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