JP5143143B2 - 可変力式電気接触器 - Google Patents

可変力式電気接触器 Download PDF

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Publication number
JP5143143B2
JP5143143B2 JP2009548372A JP2009548372A JP5143143B2 JP 5143143 B2 JP5143143 B2 JP 5143143B2 JP 2009548372 A JP2009548372 A JP 2009548372A JP 2009548372 A JP2009548372 A JP 2009548372A JP 5143143 B2 JP5143143 B2 JP 5143143B2
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JP
Japan
Prior art keywords
contactor
tip
force
contact
bracket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2009548372A
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English (en)
Japanese (ja)
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JP2010517058A (ja
JP2010517058A5 (enExample
Inventor
ジェイ． ガーシャ，ダッグ
Original Assignee
エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
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Application filed by エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド filed Critical エレクトロ サイエンティフィック インダストリーズ インコーポレーテッド
Publication of JP2010517058A publication Critical patent/JP2010517058A/ja
Publication of JP2010517058A5 publication Critical patent/JP2010517058A5/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
JP2009548372A 2007-01-29 2008-01-25 可変力式電気接触器 Expired - Fee Related JP5143143B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US88707607P 2007-01-29 2007-01-29
US60/887,076 2007-01-29
US11/740,480 2007-04-26
US11/740,480 US7839138B2 (en) 2007-01-29 2007-04-26 Adjustable force electrical contactor
PCT/US2008/052050 WO2008094831A1 (en) 2007-01-29 2008-01-25 Adjustable force electrical contactor

Publications (3)

Publication Number Publication Date
JP2010517058A JP2010517058A (ja) 2010-05-20
JP2010517058A5 JP2010517058A5 (enExample) 2011-03-10
JP5143143B2 true JP5143143B2 (ja) 2013-02-13

Family

ID=39667238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009548372A Expired - Fee Related JP5143143B2 (ja) 2007-01-29 2008-01-25 可変力式電気接触器

Country Status (6)

Country Link
US (1) US7839138B2 (enExample)
JP (1) JP5143143B2 (enExample)
KR (1) KR101441156B1 (enExample)
CN (1) CN101589518B (enExample)
TW (1) TWI409999B (enExample)
WO (1) WO2008094831A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102269564B (zh) * 2011-05-03 2013-01-23 厦门精合电气自动化有限公司 接触器触头参数的测试装置及方法
CN105008941B (zh) * 2012-12-19 2018-12-04 伊斯梅卡半导体控股公司 用于限制力的装置和方法
KR102235612B1 (ko) 2015-01-29 2021-04-02 삼성전자주식회사 일-함수 금속을 갖는 반도체 소자 및 그 형성 방법
JP2018054463A (ja) * 2016-09-29 2018-04-05 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP6727651B2 (ja) 2016-09-30 2020-07-22 株式会社ヒューモラボラトリー チップ電子部品の電気特性の連続的な検査方法
JP6679552B2 (ja) 2017-10-02 2020-04-15 株式会社ヒューモラボラトリー チップ電子部品の検査選別方法
US10497521B1 (en) * 2018-10-29 2019-12-03 Xerox Corporation Roller electric contact
CN110132558B (zh) * 2019-04-30 2024-12-31 广州广汽荻原模具冲压有限公司 一种顶杆干涉排查装置
CN114585940A (zh) * 2019-09-30 2022-06-03 伊雷克托科学工业股份有限公司 模组化二端点终端接触式电测量系统中的减少的阻抗变化
KR102247261B1 (ko) * 2020-12-15 2021-04-30 김상길 내마모성 및 윤활성능이 개선된 전자부품 검사용 회전접촉롤러, 이를 포함하는 프로브 조립체 및 전자부품 검사장치
WO2022225675A1 (en) * 2021-04-22 2022-10-27 Electro Scientific Industries, Inc. Roller contact with reduced contact resistance variation
DE102022107387A1 (de) 2022-03-29 2023-10-05 Infineon Technologies Ag Eine vorrichtung zum testen von halbleiterbauelementen und ein rollender kontaktgeber zur verwendung in einer solchen vorrichtung

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3915850A (en) * 1973-11-14 1975-10-28 Gti Corp Component handler and method and apparatus utilizing same
JPH0789141B2 (ja) * 1987-06-19 1995-09-27 東京エレクトロン株式会社 検査装置
CA1310693C (en) * 1988-01-27 1992-11-24 Manfred Prokopp Electrical connecting apparatus for an electrical or electronic testing unit
US5034749A (en) * 1988-10-06 1991-07-23 Electro Scientific Industries, Inc. Sliding contact test apparatus
US5521519A (en) * 1992-07-30 1996-05-28 International Business Machines Corporation Spring probe with piloted and headed contact and method of tip formation
JPH08292228A (ja) 1995-04-24 1996-11-05 Hitachi Electron Eng Co Ltd Ｉｃデバイスの試験装置
JPH08334547A (ja) 1995-06-09 1996-12-17 Iwaki Electron Corp Ltd 大電流電子部品の試験方法および試験装置
US6064195A (en) * 1998-05-11 2000-05-16 R-Tec Corporation Test probe positioning device
US6100707A (en) * 1998-09-25 2000-08-08 Electro Scientific Industries, Inc. Apparatus for testing multi-terminal electronic components
JP3662756B2 (ja) * 1999-01-11 2005-06-22 インターナショナル・ビジネス・マシーンズ・コーポレーション プローバ圧接装置及びプローバ圧接方法
CA2262175C (en) * 1999-02-16 2008-02-12 Mold-Masters Limited Injection molding apparatus with removable nozzle seal
JP4106859B2 (ja) * 2000-06-27 2008-06-25 沖電気工業株式会社 半導体装置の電気的特性試験装置
US6714028B2 (en) * 2001-11-14 2004-03-30 Electro Scientific Industries, Inc. Roller contact with conductive brushes
JP4173306B2 (ja) * 2001-11-30 2008-10-29 東京エレクトロン株式会社 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法
JP4123408B2 (ja) * 2001-12-13 2008-07-23 東京エレクトロン株式会社 プローブカード交換装置
JP3836830B2 (ja) * 2003-10-28 2006-10-25 インターナショナル・ビジネス・マシーンズ・コーポレーション アクティブマトリックスパネルの検査装置、アクティブマトリックスパネルの検査方法、およびアクティブマトリックスｏｌｅｄパネルの製造方法
JP4017586B2 (ja) * 2003-10-29 2007-12-05 三洋電機株式会社 電池の充電方法
JP2006194831A (ja) * 2005-01-17 2006-07-27 Humo Laboratory Ltd チップ形電子部品特性検査分類装置
US7443179B2 (en) * 2006-11-30 2008-10-28 Electro Scientific Industries, Inc. Zero motion contact actuation

Also Published As

Publication number Publication date
JP2010517058A (ja) 2010-05-20
TW200847540A (en) 2008-12-01
CN101589518A (zh) 2009-11-25
US20080180117A1 (en) 2008-07-31
TWI409999B (zh) 2013-09-21
WO2008094831A1 (en) 2008-08-07
US7839138B2 (en) 2010-11-23
KR20090107069A (ko) 2009-10-12
CN101589518B (zh) 2012-09-19
KR101441156B1 (ko) 2014-09-17

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