TWI409999B - 可調應力電接觸器 - Google Patents

可調應力電接觸器 Download PDF

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Publication number
TWI409999B
TWI409999B TW097102902A TW97102902A TWI409999B TW I409999 B TWI409999 B TW I409999B TW 097102902 A TW097102902 A TW 097102902A TW 97102902 A TW97102902 A TW 97102902A TW I409999 B TWI409999 B TW I409999B
Authority
TW
Taiwan
Prior art keywords
contactor
stress
test
contact
axis
Prior art date
Application number
TW097102902A
Other languages
English (en)
Chinese (zh)
Other versions
TW200847540A (en
Inventor
Doug J Garcia
Original Assignee
Electro Scient Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scient Ind Inc filed Critical Electro Scient Ind Inc
Publication of TW200847540A publication Critical patent/TW200847540A/zh
Application granted granted Critical
Publication of TWI409999B publication Critical patent/TWI409999B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
TW097102902A 2007-01-29 2008-01-25 可調應力電接觸器 TWI409999B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US88707607P 2007-01-29 2007-01-29
US11/740,480 US7839138B2 (en) 2007-01-29 2007-04-26 Adjustable force electrical contactor

Publications (2)

Publication Number Publication Date
TW200847540A TW200847540A (en) 2008-12-01
TWI409999B true TWI409999B (zh) 2013-09-21

Family

ID=39667238

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097102902A TWI409999B (zh) 2007-01-29 2008-01-25 可調應力電接觸器

Country Status (6)

Country Link
US (1) US7839138B2 (enExample)
JP (1) JP5143143B2 (enExample)
KR (1) KR101441156B1 (enExample)
CN (1) CN101589518B (enExample)
TW (1) TWI409999B (enExample)
WO (1) WO2008094831A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102269564B (zh) * 2011-05-03 2013-01-23 厦门精合电气自动化有限公司 接触器触头参数的测试装置及方法
CN105008941B (zh) * 2012-12-19 2018-12-04 伊斯梅卡半导体控股公司 用于限制力的装置和方法
KR102235612B1 (ko) 2015-01-29 2021-04-02 삼성전자주식회사 일-함수 금속을 갖는 반도체 소자 및 그 형성 방법
JP2018054463A (ja) * 2016-09-29 2018-04-05 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP6727651B2 (ja) 2016-09-30 2020-07-22 株式会社ヒューモラボラトリー チップ電子部品の電気特性の連続的な検査方法
JP6679552B2 (ja) 2017-10-02 2020-04-15 株式会社ヒューモラボラトリー チップ電子部品の検査選別方法
US10497521B1 (en) * 2018-10-29 2019-12-03 Xerox Corporation Roller electric contact
CN110132558B (zh) * 2019-04-30 2024-12-31 广州广汽荻原模具冲压有限公司 一种顶杆干涉排查装置
CN114585940A (zh) * 2019-09-30 2022-06-03 伊雷克托科学工业股份有限公司 模组化二端点终端接触式电测量系统中的减少的阻抗变化
KR102247261B1 (ko) * 2020-12-15 2021-04-30 김상길 내마모성 및 윤활성능이 개선된 전자부품 검사용 회전접촉롤러, 이를 포함하는 프로브 조립체 및 전자부품 검사장치
WO2022225675A1 (en) * 2021-04-22 2022-10-27 Electro Scientific Industries, Inc. Roller contact with reduced contact resistance variation
DE102022107387A1 (de) 2022-03-29 2023-10-05 Infineon Technologies Ag Eine vorrichtung zum testen von halbleiterbauelementen und ein rollender kontaktgeber zur verwendung in einer solchen vorrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63317788A (ja) * 1987-06-19 1988-12-26 Tokyo Electron Ltd 検査装置
JP2005134421A (ja) * 2003-10-28 2005-05-26 Internatl Business Mach Corp <Ibm> アクティブマトリックスパネルの検査装置、アクティブマトリックスパネルの検査方法、およびアクティブマトリックスｏｌｅｄパネルの製造方法
JP2006194831A (ja) * 2005-01-17 2006-07-27 Humo Laboratory Ltd チップ形電子部品特性検査分類装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3915850A (en) * 1973-11-14 1975-10-28 Gti Corp Component handler and method and apparatus utilizing same
CA1310693C (en) * 1988-01-27 1992-11-24 Manfred Prokopp Electrical connecting apparatus for an electrical or electronic testing unit
US5034749A (en) * 1988-10-06 1991-07-23 Electro Scientific Industries, Inc. Sliding contact test apparatus
US5521519A (en) * 1992-07-30 1996-05-28 International Business Machines Corporation Spring probe with piloted and headed contact and method of tip formation
JPH08292228A (ja) 1995-04-24 1996-11-05 Hitachi Electron Eng Co Ltd Ｉｃデバイスの試験装置
JPH08334547A (ja) 1995-06-09 1996-12-17 Iwaki Electron Corp Ltd 大電流電子部品の試験方法および試験装置
US6064195A (en) * 1998-05-11 2000-05-16 R-Tec Corporation Test probe positioning device
US6100707A (en) * 1998-09-25 2000-08-08 Electro Scientific Industries, Inc. Apparatus for testing multi-terminal electronic components
JP3662756B2 (ja) * 1999-01-11 2005-06-22 インターナショナル・ビジネス・マシーンズ・コーポレーション プローバ圧接装置及びプローバ圧接方法
CA2262175C (en) * 1999-02-16 2008-02-12 Mold-Masters Limited Injection molding apparatus with removable nozzle seal
JP4106859B2 (ja) * 2000-06-27 2008-06-25 沖電気工業株式会社 半導体装置の電気的特性試験装置
US6714028B2 (en) * 2001-11-14 2004-03-30 Electro Scientific Industries, Inc. Roller contact with conductive brushes
JP4173306B2 (ja) * 2001-11-30 2008-10-29 東京エレクトロン株式会社 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法
JP4123408B2 (ja) * 2001-12-13 2008-07-23 東京エレクトロン株式会社 プローブカード交換装置
JP4017586B2 (ja) * 2003-10-29 2007-12-05 三洋電機株式会社 電池の充電方法
US7443179B2 (en) * 2006-11-30 2008-10-28 Electro Scientific Industries, Inc. Zero motion contact actuation

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63317788A (ja) * 1987-06-19 1988-12-26 Tokyo Electron Ltd 検査装置
JP2005134421A (ja) * 2003-10-28 2005-05-26 Internatl Business Mach Corp <Ibm> アクティブマトリックスパネルの検査装置、アクティブマトリックスパネルの検査方法、およびアクティブマトリックスｏｌｅｄパネルの製造方法
JP2006194831A (ja) * 2005-01-17 2006-07-27 Humo Laboratory Ltd チップ形電子部品特性検査分類装置

Also Published As

Publication number Publication date
JP2010517058A (ja) 2010-05-20
TW200847540A (en) 2008-12-01
CN101589518A (zh) 2009-11-25
US20080180117A1 (en) 2008-07-31
WO2008094831A1 (en) 2008-08-07
US7839138B2 (en) 2010-11-23
JP5143143B2 (ja) 2013-02-13
KR20090107069A (ko) 2009-10-12
CN101589518B (zh) 2012-09-19
KR101441156B1 (ko) 2014-09-17

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MM4A Annulment or lapse of patent due to non-payment of fees