KR101441156B1 - 조정 가능한 힘 전기 접촉기 - Google Patents

조정 가능한 힘 전기 접촉기 Download PDF

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Publication number
KR101441156B1
KR101441156B1 KR1020097017635A KR20097017635A KR101441156B1 KR 101441156 B1 KR101441156 B1 KR 101441156B1 KR 1020097017635 A KR1020097017635 A KR 1020097017635A KR 20097017635 A KR20097017635 A KR 20097017635A KR 101441156 B1 KR101441156 B1 KR 101441156B1
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KR
South Korea
Prior art keywords
contactor
contact
force
bracket
electronic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020097017635A
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English (en)
Korean (ko)
Other versions
KR20090107069A (ko
Inventor
더그 제이 가르시아
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20090107069A publication Critical patent/KR20090107069A/ko
Application granted granted Critical
Publication of KR101441156B1 publication Critical patent/KR101441156B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
    • H01R13/02—Contact members
    • H01R13/22—Contacts for co-operating by abutting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
KR1020097017635A 2007-01-29 2008-01-25 조정 가능한 힘 전기 접촉기 Expired - Fee Related KR101441156B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US88707607P 2007-01-29 2007-01-29
US60/887,076 2007-01-29
US11/740,480 US7839138B2 (en) 2007-01-29 2007-04-26 Adjustable force electrical contactor
US11/740,480 2007-04-26
PCT/US2008/052050 WO2008094831A1 (en) 2007-01-29 2008-01-25 Adjustable force electrical contactor

Publications (2)

Publication Number Publication Date
KR20090107069A KR20090107069A (ko) 2009-10-12
KR101441156B1 true KR101441156B1 (ko) 2014-09-17

Family

ID=39667238

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020097017635A Expired - Fee Related KR101441156B1 (ko) 2007-01-29 2008-01-25 조정 가능한 힘 전기 접촉기

Country Status (6)

Country Link
US (1) US7839138B2 (enExample)
JP (1) JP5143143B2 (enExample)
KR (1) KR101441156B1 (enExample)
CN (1) CN101589518B (enExample)
TW (1) TWI409999B (enExample)
WO (1) WO2008094831A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102269564B (zh) * 2011-05-03 2013-01-23 厦门精合电气自动化有限公司 接触器触头参数的测试装置及方法
KR20150097535A (ko) * 2012-12-19 2015-08-26 이스메카 세미컨덕터 홀딩 에스.아. 힘을 제한하는 장치 및 방법
KR102235612B1 (ko) 2015-01-29 2021-04-02 삼성전자주식회사 일-함수 금속을 갖는 반도체 소자 및 그 형성 방법
JP2018054463A (ja) * 2016-09-29 2018-04-05 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
JP6727651B2 (ja) 2016-09-30 2020-07-22 株式会社ヒューモラボラトリー チップ電子部品の電気特性の連続的な検査方法
JP6679552B2 (ja) 2017-10-02 2020-04-15 株式会社ヒューモラボラトリー チップ電子部品の検査選別方法
US10497521B1 (en) * 2018-10-29 2019-12-03 Xerox Corporation Roller electric contact
CN110132558B (zh) * 2019-04-30 2024-12-31 广州广汽荻原模具冲压有限公司 一种顶杆干涉排查装置
KR20220070434A (ko) * 2019-09-30 2022-05-31 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 전기 계측 시스템에 접촉하는 모듈식 2-단자 터미널에서의 축소된 임피던스 변동
KR102247261B1 (ko) * 2020-12-15 2021-04-30 김상길 내마모성 및 윤활성능이 개선된 전자부품 검사용 회전접촉롤러, 이를 포함하는 프로브 조립체 및 전자부품 검사장치
WO2022225675A1 (en) * 2021-04-22 2022-10-27 Electro Scientific Industries, Inc. Roller contact with reduced contact resistance variation
DE102022107387A1 (de) 2022-03-29 2023-10-05 Infineon Technologies Ag Eine vorrichtung zum testen von halbleiterbauelementen und ein rollender kontaktgeber zur verwendung in einer solchen vorrichtung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0789141B2 (ja) * 1987-06-19 1995-09-27 東京エレクトロン株式会社 検査装置
JP2005134421A (ja) * 2003-10-28 2005-05-26 Internatl Business Mach Corp <Ibm> アクティブマトリックスパネルの検査装置、アクティブマトリックスパネルの検査方法、およびアクティブマトリックスｏｌｅｄパネルの製造方法
JP2006194831A (ja) * 2005-01-17 2006-07-27 Humo Laboratory Ltd チップ形電子部品特性検査分類装置

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Publication number Priority date Publication date Assignee Title
US3915850A (en) * 1973-11-14 1975-10-28 Gti Corp Component handler and method and apparatus utilizing same
US4959609A (en) 1988-01-27 1990-09-25 Manfred Prokopp Electrical connecting apparatus for an electrical or electronic testing unit
US5034749A (en) * 1988-10-06 1991-07-23 Electro Scientific Industries, Inc. Sliding contact test apparatus
US5521519A (en) 1992-07-30 1996-05-28 International Business Machines Corporation Spring probe with piloted and headed contact and method of tip formation
JPH08292228A (ja) 1995-04-24 1996-11-05 Hitachi Electron Eng Co Ltd Ｉｃデバイスの試験装置
JPH08334547A (ja) 1995-06-09 1996-12-17 Iwaki Electron Corp Ltd 大電流電子部品の試験方法および試験装置
US6064195A (en) * 1998-05-11 2000-05-16 R-Tec Corporation Test probe positioning device
US6100707A (en) * 1998-09-25 2000-08-08 Electro Scientific Industries, Inc. Apparatus for testing multi-terminal electronic components
JP3662756B2 (ja) * 1999-01-11 2005-06-22 インターナショナル・ビジネス・マシーンズ・コーポレーション プローバ圧接装置及びプローバ圧接方法
CA2262175C (en) * 1999-02-16 2008-02-12 Mold-Masters Limited Injection molding apparatus with removable nozzle seal
JP4106859B2 (ja) * 2000-06-27 2008-06-25 沖電気工業株式会社 半導体装置の電気的特性試験装置
US6714028B2 (en) * 2001-11-14 2004-03-30 Electro Scientific Industries, Inc. Roller contact with conductive brushes
JP4173306B2 (ja) * 2001-11-30 2008-10-29 東京エレクトロン株式会社 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法
JP4123408B2 (ja) * 2001-12-13 2008-07-23 東京エレクトロン株式会社 プローブカード交換装置
JP4017586B2 (ja) * 2003-10-29 2007-12-05 三洋電機株式会社 電池の充電方法
US7443179B2 (en) * 2006-11-30 2008-10-28 Electro Scientific Industries, Inc. Zero motion contact actuation

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0789141B2 (ja) * 1987-06-19 1995-09-27 東京エレクトロン株式会社 検査装置
JP2005134421A (ja) * 2003-10-28 2005-05-26 Internatl Business Mach Corp <Ibm> アクティブマトリックスパネルの検査装置、アクティブマトリックスパネルの検査方法、およびアクティブマトリックスｏｌｅｄパネルの製造方法
JP2006194831A (ja) * 2005-01-17 2006-07-27 Humo Laboratory Ltd チップ形電子部品特性検査分類装置

Also Published As

Publication number Publication date
CN101589518B (zh) 2012-09-19
JP2010517058A (ja) 2010-05-20
TW200847540A (en) 2008-12-01
WO2008094831A1 (en) 2008-08-07
US20080180117A1 (en) 2008-07-31
CN101589518A (zh) 2009-11-25
US7839138B2 (en) 2010-11-23
TWI409999B (zh) 2013-09-21
JP5143143B2 (ja) 2013-02-13
KR20090107069A (ko) 2009-10-12

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