JP5117052B2 - 露光装置および露光方法 - Google Patents

露光装置および露光方法 Download PDF

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Publication number
JP5117052B2
JP5117052B2 JP2007002038A JP2007002038A JP5117052B2 JP 5117052 B2 JP5117052 B2 JP 5117052B2 JP 2007002038 A JP2007002038 A JP 2007002038A JP 2007002038 A JP2007002038 A JP 2007002038A JP 5117052 B2 JP5117052 B2 JP 5117052B2
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Japan
Prior art keywords
tape
exposure
suction port
region
suction
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JP2007002038A
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English (en)
Japanese (ja)
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JP2007316588A (ja
Inventor
仁 佐藤
朗 中澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
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Orc Manufacturing Co Ltd
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Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Priority to JP2007002038A priority Critical patent/JP5117052B2/ja
Priority to TW096102060A priority patent/TW200741378A/zh
Publication of JP2007316588A publication Critical patent/JP2007316588A/ja
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Publication of JP5117052B2 publication Critical patent/JP5117052B2/ja
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP2007002038A 2006-04-26 2007-01-10 露光装置および露光方法 Active JP5117052B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007002038A JP5117052B2 (ja) 2006-04-26 2007-01-10 露光装置および露光方法
TW096102060A TW200741378A (en) 2006-04-26 2007-01-19 Exposure device and exposure method

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006122195 2006-04-26
JP2006122195 2006-04-26
JP2007002038A JP5117052B2 (ja) 2006-04-26 2007-01-10 露光装置および露光方法

Publications (2)

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JP2007316588A JP2007316588A (ja) 2007-12-06
JP5117052B2 true JP5117052B2 (ja) 2013-01-09

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ID=38850459

Family Applications (1)

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JP2007002038A Active JP5117052B2 (ja) 2006-04-26 2007-01-10 露光装置および露光方法

Country Status (2)

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JP (1) JP5117052B2 (enrdf_load_stackoverflow)
TW (1) TW200741378A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5362259B2 (ja) * 2008-05-14 2013-12-11 大日本スクリーン製造株式会社 画像記録装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5853724U (ja) * 1981-10-01 1983-04-12 森田特殊機工株式会社 被処理物の吸入収納装置
JPH03282473A (ja) * 1990-03-30 1991-12-12 Ushio Inc フィルム露光装置
JP2798158B2 (ja) * 1990-10-19 1998-09-17 ウシオ電機機株式会社 フィルム露光装置
JPH09274520A (ja) * 1996-04-04 1997-10-21 Ushio Inc 帯状ワークの搬送・位置決め方法および装置
JP2001313246A (ja) * 2000-04-28 2001-11-09 Nikon Corp 露光方法及び露光装置並びにデバイスの製造方法及びデバイス
JP2003045946A (ja) * 2001-07-31 2003-02-14 Matsushita Electric Ind Co Ltd 液晶表示素子基板の吸着方法及び液晶表示素子基板の吸着装置
JP4080401B2 (ja) * 2003-09-05 2008-04-23 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP4407333B2 (ja) * 2004-03-23 2010-02-03 ウシオ電機株式会社 帯状ワークの露光装置

Also Published As

Publication number Publication date
TW200741378A (en) 2007-11-01
TWI354188B (enrdf_load_stackoverflow) 2011-12-11
JP2007316588A (ja) 2007-12-06

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