JP5104029B2 - 静電アクチュエータ及び液滴吐出ヘッド - Google Patents
静電アクチュエータ及び液滴吐出ヘッド Download PDFInfo
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- JP5104029B2 JP5104029B2 JP2007133799A JP2007133799A JP5104029B2 JP 5104029 B2 JP5104029 B2 JP 5104029B2 JP 2007133799 A JP2007133799 A JP 2007133799A JP 2007133799 A JP2007133799 A JP 2007133799A JP 5104029 B2 JP5104029 B2 JP 5104029B2
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- diaphragm
- individual electrode
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- 239000011521 glass Substances 0.000 description 23
- 230000005684 electric field Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000000347 anisotropic wet etching Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000001638 boron Chemical class 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007133799A JP5104029B2 (ja) | 2007-05-21 | 2007-05-21 | 静電アクチュエータ及び液滴吐出ヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007133799A JP5104029B2 (ja) | 2007-05-21 | 2007-05-21 | 静電アクチュエータ及び液滴吐出ヘッド |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012216069A Division JP5212567B2 (ja) | 2012-09-28 | 2012-09-28 | 静電アクチュエータ及び液滴吐出ヘッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008284824A JP2008284824A (ja) | 2008-11-27 |
| JP2008284824A5 JP2008284824A5 (enExample) | 2010-06-24 |
| JP5104029B2 true JP5104029B2 (ja) | 2012-12-19 |
Family
ID=40145012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007133799A Expired - Fee Related JP5104029B2 (ja) | 2007-05-21 | 2007-05-21 | 静電アクチュエータ及び液滴吐出ヘッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5104029B2 (enExample) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09267472A (ja) * | 1996-03-29 | 1997-10-14 | Seiko Epson Corp | インクジェットヘッド |
| JPH11138794A (ja) * | 1997-11-06 | 1999-05-25 | Ricoh Co Ltd | 液体噴射記録装置 |
| JPH11277742A (ja) * | 1998-03-31 | 1999-10-12 | Ricoh Co Ltd | 静電型アクチュエータ |
| JP2000263779A (ja) * | 1999-03-16 | 2000-09-26 | Ricoh Co Ltd | インクジェットヘッド及びアクチュエータ |
| JP3933378B2 (ja) * | 2000-08-25 | 2007-06-20 | 株式会社リコー | インクジェットヘッド及びインクジェット記録装置、画像形成装置 |
| JP4003917B2 (ja) * | 2000-10-24 | 2007-11-07 | 株式会社リコー | 液滴吐出ヘッド及びその製造方法 |
| JP2002210957A (ja) * | 2001-01-22 | 2002-07-31 | Ricoh Co Ltd | 液滴吐出ヘッド、インクジェット記録装置及びマイクロアクチュエータ |
| JP4172221B2 (ja) * | 2002-07-31 | 2008-10-29 | セイコーエプソン株式会社 | インクジェットヘッドおよびその駆動方法 |
| JP2007055160A (ja) * | 2005-08-26 | 2007-03-08 | Seiko Epson Corp | 電極基板の製造方法、静電アクチュエータの製造方法、および液滴吐出ヘッドの製造方法 |
-
2007
- 2007-05-21 JP JP2007133799A patent/JP5104029B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008284824A (ja) | 2008-11-27 |
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