JP5086521B2 - 光受信機パッケージ - Google Patents

光受信機パッケージ Download PDF

Info

Publication number
JP5086521B2
JP5086521B2 JP2004268066A JP2004268066A JP5086521B2 JP 5086521 B2 JP5086521 B2 JP 5086521B2 JP 2004268066 A JP2004268066 A JP 2004268066A JP 2004268066 A JP2004268066 A JP 2004268066A JP 5086521 B2 JP5086521 B2 JP 5086521B2
Authority
JP
Japan
Prior art keywords
cap
die
wafer
submount
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004268066A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005094009A5 (https=
JP2005094009A (ja
Inventor
ギャラップ ケンドゥラ
エイ. ボー ブレントン
イー. ウィルソン ロバート
エイ. マシューズ ジェイムズ
エイチ. ウィリアムズ ジェイムズ
Original Assignee
アバゴ・テクノロジーズ・ファイバー・アイピー(シンガポール)プライベート・リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by アバゴ・テクノロジーズ・ファイバー・アイピー(シンガポール)プライベート・リミテッド filed Critical アバゴ・テクノロジーズ・ファイバー・アイピー(シンガポール)プライベート・リミテッド
Publication of JP2005094009A publication Critical patent/JP2005094009A/ja
Publication of JP2005094009A5 publication Critical patent/JP2005094009A5/ja
Application granted granted Critical
Publication of JP5086521B2 publication Critical patent/JP5086521B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • G02B6/4204Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/42Coupling light guides with opto-electronic elements
    • G02B6/4201Packages, e.g. shape, construction, internal or external details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/9415Dispositions of bond pads relative to the surface, e.g. recessed, protruding
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/721Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
    • H10W90/724Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Light Receiving Elements (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2004268066A 2003-09-19 2004-09-15 光受信機パッケージ Expired - Fee Related JP5086521B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/665660 2003-09-19
US10/665,660 US6900509B2 (en) 2003-09-19 2003-09-19 Optical receiver package

Publications (3)

Publication Number Publication Date
JP2005094009A JP2005094009A (ja) 2005-04-07
JP2005094009A5 JP2005094009A5 (https=) 2007-07-12
JP5086521B2 true JP5086521B2 (ja) 2012-11-28

Family

ID=34312918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004268066A Expired - Fee Related JP5086521B2 (ja) 2003-09-19 2004-09-15 光受信機パッケージ

Country Status (4)

Country Link
US (2) US6900509B2 (https=)
JP (1) JP5086521B2 (https=)
CN (1) CN100479197C (https=)
DE (2) DE102004025735B4 (https=)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3781026B2 (ja) * 2003-09-25 2006-05-31 住友電気工業株式会社 光モジュール、光送受信器及び光ジョイントスリーブ
US7026189B2 (en) * 2004-02-11 2006-04-11 Hewlett-Packard Development Company, L.P. Wafer packaging and singulation method
US7223619B2 (en) * 2004-03-05 2007-05-29 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. VCSEL with integrated lens
US7488117B2 (en) * 2004-03-05 2009-02-10 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Large tolerance fiber optic transmitter and receiver
US7422962B2 (en) * 2004-10-27 2008-09-09 Hewlett-Packard Development Company, L.P. Method of singulating electronic devices
US20060177173A1 (en) * 2005-02-04 2006-08-10 Sioptical, Inc. Vertical stacking of multiple integrated circuits including SOI-based optical components
JP2006253676A (ja) * 2005-03-08 2006-09-21 Sumitomo Electric Ind Ltd 光アセンブリ
US7859071B2 (en) * 2005-03-31 2010-12-28 Finisar Corporation Power and communication interface for sensors using a single tethered fiber
US8154414B2 (en) * 2005-03-31 2012-04-10 Finisar Corporation Systems and methods for collecting data with sensors
US7482682B2 (en) * 2005-04-12 2009-01-27 Hewlett-Packard Development Company, L.P. Micro-device packaging
US7611919B2 (en) * 2005-04-21 2009-11-03 Hewlett-Packard Development Company, L.P. Bonding interface for micro-device packaging
JP2009536362A (ja) * 2006-05-05 2009-10-08 リフレックス フォトニックス インコーポレイテッド 光学有効集積回路パッケージ
EP2104877A4 (en) * 2006-09-14 2010-02-24 Tessera Tech Hungary Kft PICTURE SYSTEM WITH INCREASED IMAGE QUALITY AND CORRESPONDING METHODS
WO2008087485A2 (en) * 2006-09-14 2008-07-24 Tessera Technologies Hungary Kft. Imaging system with relaxed assembly tolerances and associated methods
US7667324B2 (en) * 2006-10-31 2010-02-23 Avago Technologies Fiber Ip (Singapore) Pte. Ltd. Systems, devices, components and methods for hermetically sealing electronic modules and packages
US20080181558A1 (en) * 2007-01-31 2008-07-31 Hartwell Peter G Electronic and optical circuit integration through wafer bonding
US20080231600A1 (en) 2007-03-23 2008-09-25 Smith George E Near-Normal Incidence Optical Mouse Illumination System with Prism
DE102007039291A1 (de) * 2007-08-20 2009-02-26 Osram Opto Semiconductors Gmbh Optoelektronisches Halbleitermodul und Verfahren zur Herstellung eines solchen
US8579434B2 (en) 2007-11-07 2013-11-12 University Of Washington Through Its Center For Commercialization Free-standing two-sided device fabrication
US8394660B2 (en) 2007-11-07 2013-03-12 University of Washington its Center for Commercialization Free-standing two-sided device fabrication
KR20100115735A (ko) * 2007-11-30 2010-10-28 스카이워크스 솔루션즈, 인코포레이티드 플립 칩 실장을 이용하는 웨이퍼 레벨 패키징
TWI402979B (zh) * 2007-12-13 2013-07-21 夏普股份有限公司 電子元件晶圓模組、電子元件模組、感測器晶圓模組、感測器模組、透鏡陣列盤、感測器模組之製造方法、及電子資訊裝置
DE102008014121A1 (de) * 2007-12-20 2009-06-25 Osram Opto Semiconductors Gmbh Verfahren zur Herstellung von Halbleiterchips und Halbleiterchip
US8265432B2 (en) * 2008-03-10 2012-09-11 International Business Machines Corporation Optical transceiver module with optical windows
US8280080B2 (en) * 2009-04-28 2012-10-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Microcap acoustic transducer device
DE102009042479A1 (de) 2009-09-24 2011-03-31 Msg Lithoglas Ag Verfahren zum Herstellen einer Anordnung mit einem Bauelement auf einem Trägersubstrat und Anordnung sowie Verfahren zum Herstellen eines Halbzeuges und Halbzeug
US8260097B2 (en) * 2010-06-16 2012-09-04 Avago Technologies Fiber Ip (Singapore) Pte. Ltd Opto-electronic alignment system and method
US8596886B2 (en) 2011-09-07 2013-12-03 The Boeing Company Hermetic small form factor optical device packaging for plastic optical fiber networks
KR101690237B1 (ko) * 2011-12-14 2016-12-27 피니사 코포레이숀 플렉스 광학 서브어셈블리 상의 칩
US8901576B2 (en) 2012-01-18 2014-12-02 International Business Machines Corporation Silicon photonics wafer using standard silicon-on-insulator processes through substrate removal or transfer
US9285554B2 (en) 2012-02-10 2016-03-15 International Business Machines Corporation Through-substrate optical coupling to photonics chips
US9971088B2 (en) * 2012-04-16 2018-05-15 Hewlett Packard Enterprise Development Lp Integrated optical sub-assembly
US9500808B2 (en) 2012-05-09 2016-11-22 The Boeing Company Ruggedized photonic crystal sensor packaging
US8934745B2 (en) * 2012-07-31 2015-01-13 Hewlett-Packard Development Company, L.P. Apparatus for use in optoelectronics having a sandwiched lens
US8938136B2 (en) * 2012-08-08 2015-01-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Opto-electronic system having flip-chip substrate mounting
CN103852832A (zh) * 2012-11-30 2014-06-11 鸿富锦精密工业(深圳)有限公司 光通讯模组
TWI572922B (zh) * 2013-01-31 2017-03-01 鴻海精密工業股份有限公司 光纖連接器
TWI527166B (zh) * 2013-07-25 2016-03-21 菱生精密工業股份有限公司 The package structure of the optical module
GB2523841A (en) * 2014-03-07 2015-09-09 Melexis Technologies Nv Infrared sensor module
JP6294113B2 (ja) * 2014-03-17 2018-03-14 新光電気工業株式会社 キャップ及びその製造方法、半導体装置及びその製造方法
RU2698945C2 (ru) * 2014-05-23 2019-09-02 Нанопресижен Продактс, Инк. Основанная на визуальном наблюдении пассивная юстировка оптоволоконного узла относительно оптоэлектронного устройства
US10290993B2 (en) * 2016-06-03 2019-05-14 Princeton Optronics, Inc. VCSEL illuminator package
KR101968292B1 (ko) * 2016-10-19 2019-04-11 아이오솔루션(주) 적층구조를 적용한 파장 다중화 어레이 광수신 모듈의 패키지 구조
US10123597B1 (en) * 2018-01-11 2018-11-13 Joy Tong Vertical luggage
US11764117B2 (en) * 2018-04-03 2023-09-19 Corning Incorporated Hermetically sealed optically transparent wafer-level packages and methods for making the same
CN112513691A (zh) * 2018-07-30 2021-03-16 ams传感器新加坡私人有限公司 低高度光电模块和封装
US11251228B2 (en) * 2018-12-19 2022-02-15 Intel Corporation Optical receiver package with backside lens-integrated photodetector die
GB2575204B (en) * 2019-10-08 2020-08-19 Hilight Semiconductor Ltd Opto-electronic assembly
GB2575205B (en) * 2019-10-08 2020-09-09 Hilight Semiconductor Ltd Opto-electronic assembly
CN118015744A (zh) * 2024-03-05 2024-05-10 杭州海康威视数字技术股份有限公司 门禁设备

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4307934A (en) * 1978-05-08 1981-12-29 General Dynamics, Pomona Division Packaged fiber optic modules
JPH04158583A (ja) * 1990-10-22 1992-06-01 Matsushita Electric Works Ltd 赤外線検出素子
US5390271A (en) * 1993-05-03 1995-02-14 Litton Systems, Inc. Optical interface for hybrid circuit
JP3277646B2 (ja) * 1993-11-10 2002-04-22 富士通株式会社 光半導体装置の製造方法
EP0664585B1 (de) * 1993-12-22 1998-03-04 Siemens Aktiengesellschaft Sende- und Empfangsmodul für eine bidirektionale optische Nachrichten- und Signalübertragung
EP0660467B1 (de) 1993-12-22 1997-03-19 Siemens Aktiengesellschaft Optoelektronisches Bauelement und Verfahren zu dessen Herstellung
EP0706069B1 (de) * 1994-10-06 2003-04-02 Infineon Technologies AG Sende- und Empfangsmodul für eine bidirektionale optische Nachrichten- und Signalübertragung
DE19508222C1 (de) * 1995-03-08 1996-06-05 Siemens Ag Optoelektronischer Wandler und Herstellverfahren
JPH09145963A (ja) * 1995-11-20 1997-06-06 Toshiba Electron Eng Corp 光伝送用装置
US5940564A (en) * 1997-08-05 1999-08-17 Picolight, Inc. Device for coupling a light source or receiver to an optical waveguide
US6243508B1 (en) * 1999-06-01 2001-06-05 Picolight Incorporated Electro-opto-mechanical assembly for coupling a light source or receiver to an optical waveguide
US7004644B1 (en) * 1999-06-29 2006-02-28 Finisar Corporation Hermetic chip-scale package for photonic devices
JP4420538B2 (ja) 1999-07-23 2010-02-24 アバゴ・テクノロジーズ・ワイヤレス・アイピー(シンガポール)プライベート・リミテッド ウェーハパッケージの製造方法
US6228675B1 (en) 1999-07-23 2001-05-08 Agilent Technologies, Inc. Microcap wafer-level package with vias
US6265246B1 (en) 1999-07-23 2001-07-24 Agilent Technologies, Inc. Microcap wafer-level package
US6234687B1 (en) * 1999-08-27 2001-05-22 International Business Machines Corporation Self-aligning method and interlocking assembly for attaching an optoelectronic device to a coupler
US6556608B1 (en) 2000-04-07 2003-04-29 Stratos Lightwave, Inc. Small format optical subassembly
AUPR245601A0 (en) * 2001-01-10 2001-02-01 Silverbrook Research Pty Ltd An apparatus (WSM09)
JP2002258114A (ja) * 2001-02-28 2002-09-11 Kyocera Corp レセプタクル型光モジュール
US20030119308A1 (en) 2001-12-20 2003-06-26 Geefay Frank S. Sloped via contacts
US6787897B2 (en) 2001-12-20 2004-09-07 Agilent Technologies, Inc. Wafer-level package with silicon gasket
US6757308B1 (en) * 2002-05-22 2004-06-29 Optical Communication Products, Inc. Hermetically sealed transmitter optical subassembly

Also Published As

Publication number Publication date
DE102004064081B4 (de) 2008-12-18
DE102004025735B4 (de) 2008-10-23
US6900509B2 (en) 2005-05-31
CN1599059A (zh) 2005-03-23
DE102004025735A1 (de) 2005-04-21
US20050062117A1 (en) 2005-03-24
JP2005094009A (ja) 2005-04-07
CN100479197C (zh) 2009-04-15
US6955934B2 (en) 2005-10-18
US20050062119A1 (en) 2005-03-24
DE102004064081B9 (de) 2009-06-04

Similar Documents

Publication Publication Date Title
JP5086521B2 (ja) 光受信機パッケージ
JP4901086B2 (ja) 一体化された光学素子およびアライメントポストを有する面発光レーザパッケージ
US8290008B2 (en) Silicon carrier optoelectronic packaging
US6998646B2 (en) Integration of top-emitting and top-illuminated optoelectronic devices with micro-optic and electronic integrated circuits
US6558976B2 (en) Critically aligned optical MEMS dies for large packaged substrate arrays and method of manufacture
JP3778549B2 (ja) 光子デバイス用気密形チップスケールパッケージ
US7961989B2 (en) Optical chassis, camera having an optical chassis, and associated methods
US8233757B2 (en) Wafer based optical chassis and associated methods
US20100151614A1 (en) Wafer level method of forming side fiber insertion optoelectronic packages
JP4793099B2 (ja) 光モジュール
US20050139848A1 (en) Image sensor package and method for manufacturing the same
TW201436294A (zh) 具有成側向形態或頂向形態裝置定向之疊層無引線載架封裝的光電子裝置(一)
CN103531572B (zh) 晶片级封装的光学组件以及具有该光学组件的收发模块
JP2002329850A (ja) チップサイズパッケージおよびその製造方法
KR102715554B1 (ko) 반도체 패키지 및 반도체 패키지 제조 방법
JP4969775B2 (ja) 反射鏡及び位置合わせポストを有する光デバイスパッケージ
JP4643891B2 (ja) パラレル光学系接続装置用の位置決め方法
JPH11168233A (ja) 光モジュール及び光トランシーバ
EP1611468B1 (en) Package for optoelectronic device on wafer level
JP2001215370A (ja) 光モジュール
JP2013012587A (ja) 半導体チップの実装方法、及び光電変換モジュールの製造方法

Legal Events

Date Code Title Description
A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20070320

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20070411

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070524

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070524

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20071207

RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20071220

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100917

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100928

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101228

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111004

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111227

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120904

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120907

R150 Certificate of patent or registration of utility model

Ref document number: 5086521

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150914

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees