JP5077254B2 - パレット自動交換方法 - Google Patents

パレット自動交換方法 Download PDF

Info

Publication number
JP5077254B2
JP5077254B2 JP2009019152A JP2009019152A JP5077254B2 JP 5077254 B2 JP5077254 B2 JP 5077254B2 JP 2009019152 A JP2009019152 A JP 2009019152A JP 2009019152 A JP2009019152 A JP 2009019152A JP 5077254 B2 JP5077254 B2 JP 5077254B2
Authority
JP
Japan
Prior art keywords
pallet
fixing
magazine
palette
fixing table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2009019152A
Other languages
English (en)
Japanese (ja)
Other versions
JP2010177487A (ja
JP2010177487A5 (https=
Inventor
保夫 高浪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2009019152A priority Critical patent/JP5077254B2/ja
Publication of JP2010177487A publication Critical patent/JP2010177487A/ja
Publication of JP2010177487A5 publication Critical patent/JP2010177487A5/ja
Application granted granted Critical
Publication of JP5077254B2 publication Critical patent/JP5077254B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Supply And Installment Of Electrical Components (AREA)
  • Die Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2009019152A 2009-01-30 2009-01-30 パレット自動交換方法 Active JP5077254B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009019152A JP5077254B2 (ja) 2009-01-30 2009-01-30 パレット自動交換方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009019152A JP5077254B2 (ja) 2009-01-30 2009-01-30 パレット自動交換方法

Publications (3)

Publication Number Publication Date
JP2010177487A JP2010177487A (ja) 2010-08-12
JP2010177487A5 JP2010177487A5 (https=) 2011-03-10
JP5077254B2 true JP5077254B2 (ja) 2012-11-21

Family

ID=42708129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2009019152A Active JP5077254B2 (ja) 2009-01-30 2009-01-30 パレット自動交換方法

Country Status (1)

Country Link
JP (1) JP5077254B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5796162B2 (ja) * 2011-11-07 2015-10-21 パナソニックＩｐマネジメント株式会社 トレイフィーダおよびトレイセット用のパレットならびにトレイセット方法
EP2914078B1 (en) * 2012-10-29 2020-05-06 FUJI Corporation Component supply apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176257A (ja) * 1984-09-18 1986-04-18 Murata Mach Ltd ワークの加工装置
JPS63282004A (ja) * 1987-05-11 1988-11-18 Kawasaki Steel Corp 物品搬送保管設備
JPH0795551B2 (ja) * 1988-12-07 1995-10-11 松下電器産業株式会社 チップ供給装置
GB9006036D0 (en) * 1990-03-16 1990-05-09 Emhart Deutschland Die presentation system for die bonder
JPH06132398A (ja) * 1992-10-21 1994-05-13 Fujitsu Ltd ウエハリング固定装置
JPH09190988A (ja) * 1996-01-11 1997-07-22 Toshiba Mechatronics Kk シートの引き伸し装置
JP3693783B2 (ja) * 1997-03-21 2005-09-07 大日本スクリーン製造株式会社 基板処理装置
JP2002084096A (ja) * 2000-09-08 2002-03-22 Yamaha Motor Co Ltd トレイ部品供給装置
EP1310986A1 (de) * 2001-11-08 2003-05-14 F & K Delvotec Bondtechnik GmbH Chipträgerplatten-Wechselmechanismus
JP4039104B2 (ja) * 2002-04-18 2008-01-30 松下電器産業株式会社 ウェハの供給装置
JP4085995B2 (ja) * 2004-03-16 2008-05-14 松下電器産業株式会社 回転テーブル機構
JP4544173B2 (ja) * 2006-02-13 2010-09-15 パナソニック株式会社 電子部品移載装置

Also Published As

Publication number Publication date
JP2010177487A (ja) 2010-08-12

Similar Documents

Publication Publication Date Title
JP6040530B2 (ja) ハンドラーおよび検査装置
JP4693805B2 (ja) 半導体装置の製造装置及び製造方法
JP5231274B2 (ja) 産業用ロボット
JP5303301B2 (ja) 産業用ロボット
JP5077254B2 (ja) パレット自動交換方法
JP6571176B2 (ja) 部品実装機、および部品実装機の部品供給方法
JP5083221B2 (ja) パレット自動交換装置
JP6049221B2 (ja) ダイ供給装置
JP5077253B2 (ja) パレット自動交換装置
JP2019087720A (ja) 半導体ウエハーの試験ユニット
JP5083222B2 (ja) パレット自動交換装置
JP4905467B2 (ja) パレット自動交換装置
JP2006269794A (ja) ノズル交換装置及び部品実装装置
JP6040528B2 (ja) ハンドラーおよび検査装置
KR20100119753A (ko) 칩 공급 팔레트 및 칩 공급 장치
JP6840866B2 (ja) ワーク作業装置
JP7504829B2 (ja) コレット交換機構
JP5773490B2 (ja) ダイ突き上げ動作管理システム
JP5082914B2 (ja) チップ供給装置
JP5035009B2 (ja) チップ供給装置
JP4735564B2 (ja) 部品実装装置および部品実装方法
JP6040529B2 (ja) ハンドラーおよび検査装置
JP2008277354A (ja) 把持装置
JP4735565B2 (ja) 部品実装装置および部品実装方法
US20230398698A1 (en) Adsorption nozzle, component transfer apparatus, and attitude control method of adsorption nozzle

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20110125

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110125

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20110215

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20120622

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120731

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120813

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150907

Year of fee payment: 3

R151 Written notification of patent or utility model registration

Ref document number: 5077254

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150907

Year of fee payment: 3