JP5074946B2 - 低誘電率膜およびその成膜方法並びにその膜を用いた電子装置 - Google Patents
低誘電率膜およびその成膜方法並びにその膜を用いた電子装置 Download PDFInfo
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- JP5074946B2 JP5074946B2 JP2008030866A JP2008030866A JP5074946B2 JP 5074946 B2 JP5074946 B2 JP 5074946B2 JP 2008030866 A JP2008030866 A JP 2008030866A JP 2008030866 A JP2008030866 A JP 2008030866A JP 5074946 B2 JP5074946 B2 JP 5074946B2
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- 238000000034 method Methods 0.000 title claims description 33
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 53
- 229910052799 carbon Inorganic materials 0.000 claims description 53
- 239000007789 gas Substances 0.000 claims description 50
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 49
- 229910052582 BN Inorganic materials 0.000 claims description 47
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 47
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 41
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 25
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 19
- 229930195733 hydrocarbon Natural products 0.000 claims description 17
- 150000002430 hydrocarbons Chemical class 0.000 claims description 17
- 239000004215 Carbon black (E152) Substances 0.000 claims description 16
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 9
- 239000011229 interlayer Substances 0.000 claims description 9
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims description 9
- 229910052753 mercury Inorganic materials 0.000 claims description 9
- 230000015572 biosynthetic process Effects 0.000 claims description 8
- 230000001681 protective effect Effects 0.000 claims description 7
- DZVPMKQTULWACF-UHFFFAOYSA-N [B].[C].[N] Chemical group [B].[C].[N] DZVPMKQTULWACF-UHFFFAOYSA-N 0.000 claims description 6
- 229910052796 boron Inorganic materials 0.000 claims description 5
- 239000012159 carrier gas Substances 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 5
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims description 3
- 229910052805 deuterium Inorganic materials 0.000 claims description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 229910052724 xenon Inorganic materials 0.000 claims description 3
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims description 3
- PPWPWBNSKBDSPK-UHFFFAOYSA-N [B].[C] Chemical compound [B].[C] PPWPWBNSKBDSPK-UHFFFAOYSA-N 0.000 claims 10
- 230000008021 deposition Effects 0.000 claims 4
- 238000005286 illumination Methods 0.000 claims 1
- 230000010365 information processing Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 96
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 28
- 239000010409 thin film Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 238000009616 inductively coupled plasma Methods 0.000 description 5
- 239000012212 insulator Substances 0.000 description 5
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 4
- 239000000460 chlorine Substances 0.000 description 4
- 229910052801 chlorine Inorganic materials 0.000 description 4
- 125000001309 chloro group Chemical group Cl* 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 4
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 4
- 238000010348 incorporation Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- WXRGABKACDFXMG-UHFFFAOYSA-N trimethylborane Chemical compound CB(C)C WXRGABKACDFXMG-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02345—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02345—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light
- H01L21/02348—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to radiation, e.g. visible light treatment by exposure to UV light
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
- H01L21/318—Inorganic layers composed of nitrides
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
- H01L21/76828—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc. thermal treatment
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76835—Combinations of two or more different dielectric layers having a low dielectric constant
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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Description
図1は本発明の第1実施例の成膜方法を実施する成膜装置を示す概略側面図である。円筒状容器1内に誘導結合プラズマ生成部2が設けられ、整合器3を介して高周波電源4に接続されている。高周波電源4は1kw〜10kwまでの高周波電力を供給することができる。窒素ガス導入部5より窒素ガスを供給し、プラズマ50を生成する。基板保持部6に基板60が置かれ、基板保持部6内にはヒータ7が装着されている。ヒータ7によって基板60の温度は室温から600℃の範囲で設定できるようになっている。円筒状容器1には、水素ガスをキャリアとした塩化ホウ素ガスを導入する導入部8が設けられている。
容器1内のガス圧力を0.6Torrに調整して窒化ホウ素炭素膜61の合成を行う。塩化ホウ素およびメタンガスはプラズマにするのではなく窒素プラズマによって塩化ホウ素およびメタンガスを分解し、ホウ素原子および炭素原子を生成し、窒素原子と反応させ、窒化ホウ素炭素膜61の合成を行う。塩素は水素原子と化合して塩化水素になり、塩素原子の膜内への取り込みが抑制される。成膜後、水銀ランプを用いて膜表面に光照射を行う。室温大気中で4分間の照射を行う。
本発明の第2実施例は第1実施例と同様の成膜装置を用いる。円筒状容器1内に誘導結合プラズマ生成部2が設けられ、整合器3を介して高周波電源4に接続されている。高周波電源4は1kw〜10kwの高周波電力を供給することができる。窒素ガス導入部5より窒素ガスを供給し、プラズマ50を生成する。基板保持部6に基板60が置かれ、基板保持部6内にはヒータ7が装着されている。
ヒータ7によって基板60の温度は室温から600℃の範囲で設定できるようになっている。円筒状容器1には、水素ガスをキャリアとした塩化ホウ素ガスを導入する導入部8が設けられている。また、円筒状容器1に炭化水素系ガスを導入する導入部9設けられている。基板保持部6より下方に排気部10が装着されている。
容器1内のガス圧力を0.6Torrに調整して窒化ホウ素炭素膜61の合成を行う。塩化ホウ素およびメタンガスはプラズマにするのではなく窒素プラズマによって塩化ホウ素およびメタンガスを分解し、ホウ素原子および炭素原子を生成し、窒素原子と反応させ、窒化ホウ素炭素膜61の合成を行う。
図4は本発明の第3実施例の成膜方法を実施する成膜装置を示す概略側面図である。円筒状容器工内に誘導結合プラズマ生成部2が設けられ、整合器3を介して高周波電源4に接続されている。高周波電源4は1kw〜10kwまでの高周波電力を供給することができる。窒素ガス導入部5より窒素ガスを供給し、プラズマ50を生成する。基板保持部6に基板60が置かれ、基板保持部6内にはヒータ7が装着されている。ヒータ7によって基板60の温度は室温から600℃の範囲で設定できるようになっている。更に成膜室の基板保持部上方に窓が設けられ、試料表面への水銀ランプによる光照射ができるようになっている。水銀ランプによる光照射の際には基板保持部6が窓の方ヘ移動できるようになっている。円筒状容器1には、水素ガスをキャリアとした塩化ホウ素ガスを導入する導入部8が設けられている。また、円筒状容器1に炭化水素系ガスを導入する導入部
9が設けられている。基板保持部6より下方に排気部10が装着されている。
容器1内のガス圧力を0.6Torrに調整して窒化ホウ素炭素膜61の合成を行う。塩化ホウ素およびメタンガスはブラズマにするのではなく窒素プラズマによって塩化ホウ素およびメタンガスを分解し、ホウ素原子および炭素原子を生成し、窒素原子と反応させ、窒化ホウ素炭素膜61の合成を行う。
図5は本発明の第4実施例の成膜方法を実施する成膜装置を示す概略側面図である。円筒状容器1内に誘導結合プラズマ生成部2が設けられ、整合器3を介して高周波電源4に接続されている。高周波電源4は1kw〜10kwまでの高周波電力を供給することができる。窒素ガス導入部5より窒素ガスを供給し、プラズマ50を生成する。基板保持部6に基板60が置かれ、基板保持部6内にはヒータ7が装着されている。ヒータ7によって基板60の温度は室温から600℃の範囲で設定できるようになっている。円筒状容器1には、水素ガスをキャリアとした塩化ホウ素ガスを導入する導入部8が設けられている。また、円筒状容器1に炭化水素系ガスを導入する導入部9が設けられている。基板保持部6より下方に排気部10が装着されている。成膜室とゲートバルブを介して膜の昇温保持のためにアニールチェンバーが装着され、水銀ランプにより光照射できるように
なっている。
容器1内のガス圧力を0.6Torrに調整して窒化ホウ素炭素膜61の合成を行う。塩化ホウ素およびメタンガスはプラズマにするのではなく窒素プラズマによって塩化ホウ素およびメタンガスを分解し、ホウ素原子および炭素原子を生成し、窒素原子と反応させ、窒化ホウ素炭素膜61の合成を行う。
2・・誘導結合プラズマ生成部
3・・整合器
4・・高周波電源
5・・窒素ガス導入部
6・・基板保持部
7・・ヒータ
8、9・・導入部
10・・排気部
50・・プラズマ
60・・基板
61・・窒化ホウ素炭素膜
501・・トランジスタ
502・・配線
503・・層間絶縁体薄膜
504・・保護膜
Claims (19)
- プラズマCVD法により窒化ホウ素炭素膜を成膜した後、水銀ランプ、キセノンランプ、重水素ランプ、赤外線ランプのいずれかを用いて光を照射して比誘電率を低下させることを特徴とする窒化ホウ素炭素膜の成膜方法。
- 前記比誘電率は2.4以下に低下させることを特徴とする請求項1に記載の窒化ホウ素炭素膜の成膜方法。
- 前記光の照射は大気中で照射を行うことを特徴とする請求項2に記載の窒化ホウ素炭素膜の成膜方法。
- 前記光の照射は3分間から10分間照射を行うことを特徴とする請求項2又は3に記載の窒化ホウ素炭素膜の成膜方法。
- 前記光の照射は室温で照射を行うことを特徴とする請求項3に記載の窒化ホウ素炭素膜の成膜方法。
- 前記光の照射は250〜550℃で保持して照射を行うことを特徴とする請求項2ないし4のいずれか1項記載の窒化ホウ素炭素膜の成膜方法。
- 成膜室内で窒素原子をホウ素および炭素と反応させ前記成膜を行うことを特徴とする請求項1ないし6のいずれか1項記載の窒化ホウ素炭素膜の成膜方法。
- 成膜室内に窒素原子を主に励起した後、励起された窒素原子をホウ素および炭素と反応させ、基板にホウ素炭素窒素膜を成膜することを特徴とする請求項1ないし7のいずれか1項記載の窒化ホウ素炭素膜の成膜方法。
- 成膜室内に窒素原子を主に励起した後、励起された窒素原子を、水素ガスをキャリャガスとした塩化ホウ素ガスおよび炭素と反応させ、基板にホウ素炭素窒素膜を成膜することを特徴とする請求項1ないし7のいずれか1項記載の窒化ホウ素炭素膜の成膜方法。
- 炭素の供給として炭化水素ガスを用いることを特徴とする請求項1ないし9のいずれか1項記載の窒化ホウ素炭素膜の成膜方法。
- 窒素ガスの流量と塩化ホウ素ガスの流量との比(窒素ガス/塩化ホウ素)を0.1〜10.0に設定したことを特徴とする請求項9記載の窒化ホウ素炭素膜の成膜方法。
- 炭化水素ガスの流量と塩化ホウ素ガスの流量との比(炭化水素ガス/塩化ホウ素)を0.01〜5.0に設定したことを特徴とする請求項9記載の窒化ホウ素炭素膜の成膜方法。
- 水素ガスの流量と塩化ホウ素ガスの流量との比(水素ガス/塩化ホウ素)を0.05〜5.0に設定したことを特徴とする請求項9記載の窒化ホウ素炭素膜の成膜方法。
- 請求項1ないし13のいずれか1項記載の方法により作成した窒化ホウ素炭素膜。
- 比誘電率が2.4以下であることを特徴とする請求項14記載の窒化ホウ素炭素膜。
- 比誘電率が2.2未満であることを特徴とする請求項14記載の窒化ホウ素炭素膜。
- 請求項1ないし13のいずれか1項記載の方法により作製した窒化ホウ素炭素膜を配線層間膜とすることを特徴とする半導体装置。
- 請求項1ないし13のいずれか1項記載の方法により作製した窒化ホウ素炭素膜を保護膜とすることを特徴とする半導体装置。
- 請求項17または18に記載の装置を有することを特徴とする情報処理・通信システム。
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US9640400B1 (en) * | 2015-10-15 | 2017-05-02 | Applied Materials, Inc. | Conformal doping in 3D si structure using conformal dopant deposition |
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