JP5064577B2 - ボールボンディング用ワイヤ - Google Patents
ボールボンディング用ワイヤ Download PDFInfo
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- JP5064577B2 JP5064577B2 JP2011009935A JP2011009935A JP5064577B2 JP 5064577 B2 JP5064577 B2 JP 5064577B2 JP 2011009935 A JP2011009935 A JP 2011009935A JP 2011009935 A JP2011009935 A JP 2011009935A JP 5064577 B2 JP5064577 B2 JP 5064577B2
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- H—ELECTRICITY
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Description
1stボンドが形成されれば、キャピラリー10aは、一定高さまで上昇した後(同図(c))、導体配線cの真上まで移動する(同図(d)〜(e))。このとき、安定したループを形成するため、キャピラリー10aに特殊な動きをさせてワイヤWに「くせ」を付ける動作をする場合がある(同図(d)の鎖線から実線参照)。
一方、金ボンディングワイヤWは高価であることから、安価な銅ボンディングワイヤへの置き換えもなされている。さらに、その銅ボンディングワイヤ表面にパラジウム(Pd)等を被覆してボンディング性を高めたものが開発され、一部では使用されている(特許文献1)。
表面被覆銅ボンディングワイヤは、銅ボンディングワイヤに比べて2nd接合性がよく、連続ボンディング性がよいが、FABが銅ボンディングワイヤよりもさらに硬くなるため、チップダメージ発生の問題がある。
このNi/Pd/Au被覆電極aに対し、上記表面被覆銅ボンディングワイヤは接合し難いという問題があり、銅ボンディングワイヤは、脆弱なチップ5に対してダメージを与えないような条件でボンディングしようとすると、十分な接合ができないという問題がある。
因みに、金ボンディングワイヤとNi/Pd/Au被覆電極aの接合であれば、高温信頼性は得られるが、材料費が高価になるという問題がある。
因みに、AgとNi/Pd/Au被覆電極との接合個所の耐食性は良いが、AlとAgとの接合個所は腐食し易い。
また、図2(h)に示すように、FABを作製する時にワイヤ先端部と放電棒gとの間で放電させてワイヤ先端を溶融させる際、Agに比べて高融点なAu、PdがFAB表面に集積するため、FAB(ボールb)表面がAuもしくはPdの高濃度層になり、同図(b)の、次に続く1st接合時に電極aとの接合界面の高信頼性化に寄与する。このとき、このFAB表面への集積はAu、Pdの融点が関わり、Pdの融点(1555℃)はAuの融点(1064℃)に比べて高く、Pdのほうがより高濃度化するから、接合部の信頼性をより向上させるためにはAuよりもPdのほうが好ましい。
『評価項目』
得られた各ボンディング用ワイヤWについて、自動ワイヤボンダで、図2に示すボール/ウェッジ接合を行った。すなわち、放電棒gによるアーク放電によりワイヤW先端にFAB(ボールb)を作製し、それをチップ5上のNi/Pd/Auメッキ電極aに接合し、ワイヤ他端をリード端子cに接合した。なお、FAB作製時にはワイヤW先端部にN2ガスを流しながらアーク放電を行った。リード端子cにはAgメッキ42%Ni−Fe合金を使用した。
そのボンディングにおける、FABの安定性、ワイヤフロー、HTST、HAST、1st接合部のチップ損傷、電気抵抗、及び総合評価を表2に示す。それらの評価方法等は以下の通りである。
「FAB形状の安定性の評価」
ワイヤ径に対するFAB(ボールb)径の比率が小さくなると、安定性の確保が難しいことから、FAB径/ワイヤ径の比率が1.9〜2.1の時の真球性を評価した。接合前のボールbを30本観察して、形状が真球状であるかを判定した。すべて真球状になり、ワイヤWの中心位置とFABの中心位置がずれる芯ずれが1本以下であればA、異形状のFAB発生が2本以下で芯ずれが1本を越え5本以下であればB、異形状のFAB発生が3本以上もしくは芯ずれが6本以上であれば使用できないと判断して評価をDとした。
ワイヤW長5mmのボンディング試料をエポキシ樹脂で封止した後で、X線非破壊観察装置にて最大ワイヤフロー量を測定した。測定は20本行い、その平均値をワイヤ長5mmで除した割合をワイヤフロー率とした。このワイヤフロー率が3%未満ならA、3%以上5%未満ではB、5%以上7%未満ではC、7%以上では実用上の問題があると考えて評価Dとした。
ボンディング試料を200℃の試験槽中に1000時間装入し、1000時間経過後のシェア強度H(1000)を初期のシェア強度H(Initial)で除した割合R(R=H(1000)/H(Initial)×100)を用いて評価した。Rが80%以上ならA、70%以上80%未満でB、60%以上70%未満ではC、60%未満では実用上問題があると考えてDとした。
ボンディング試料を130℃/85%RH(Relative Humidity)の試験槽中に1000時間装入し、1000時間経過後のシェア強度H(1000)を初期のシェア強度H(Initial)で除した割合R(R=H(1000)/H(Initial)×100)を用いて評価した。Rが80%以上ならA、60%以上80%未満ではB、60%未満ではDとした。
ボール接合部および電極膜を王水で溶解し、チップ5のクラックを光学顕微鏡と走査型電子顕微鏡(SEM)で観察した。100個の接合部を観察して5μm未満の微小なピットが1個もしくはまったく見られない場合はA、5μm以上のクラックが2個以上認められた場合をDとした。
4端子法を用いて室温での電気抵抗を測定した。固有抵抗が3.0×10−8Ω・m未満であれば十分な導電性を有すると考えられるのでA、固有抵抗が3.0×10−8Ω・m以上4.0×10−8Ω・m未満であればB、固有抵抗が4.0×10−8Ω・m以上であればDとした。
すべてAのものをA、AとBが混在しているものをB、A、B、Cが混在しているものをC、ひとつでもDがあるものをDとした。
また、Pd、Auから選ばれる1種以上の元素の合計重量が0.5重量%未満であると、比較例4から、HTST、HAST評価において「D」、5.0重量%を超えると、比較例5から、FABの安定性、チップ損傷、電気抵抗の評価において「D」となって総合評価で「D」となっている。
その各実施例において、Ca、Cu、Gd、Smから選ばれる2種以上の元素の内、Caを含み、かつGdとSmの少なくとも一方を含んで(表1中、Ca+(Gd+Sm))その合計が10重量ppm以上であって、Pdを含むと、実施例1〜4から、総合評価において、「A」以上を得ている。
その総合評価Bを得た実施例において、Caを含み、かつGdとSmの少なくとも一方を含んでそのCa+(Gd+Sm)の合計が10重量ppm以上であると、実施例5、10、11において、ワイヤフローが「A」となっていることから、高いワイヤ強度を得られることが理解できる。
a 集積回路素子の電極
b 溶融ボール
b’ 圧着ボール
c 回路配線基板の導体配線
Claims (4)
- 半導体素子のNi/Pd/Au被覆された電極(a)と回路配線基板の導体配線(c)をボールボンディング法によって接続するためのボンディング用ワイヤ(W)であって、
Ca、Cu、Gd、Smから選ばれる2種以上の元素を合計で5〜500重量ppm含み、かつその2種以上の元素はGdとSmの両者のみの場合を含まないものであり、さらに、Pd、Auから選ばれる1種以上の元素を合計で0.5〜5.0重量%含んで、それ以外がAg及び不可避不純物からなることを特徴とするボールボンディング用ワイヤ。 - 上記Ca、Cu、Gd、Smから選ばれる2種以上の元素を合計で10〜300重量ppm含み、Pd、Auから選ばれる1種以上の元素を合計で0.7〜3.0重量%含んでいることを特徴とする請求項1記載のボールボンディング用ワイヤ。
- 上記Ca、Cu、Gd、Smから選ばれる2種以上の元素の内、Caを含み、かつGdとSmの少なくとも一方を含んで、その合計が10重量ppm以上であること特徴とする請求項1又は2に記載のボールボンディング用ワイヤ。
- Pd、Auから選ばれる1種以上の元素は、Pdを必ず含有することを特徴とする請求項3に記載のボールボンディング用ワイヤ。
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