JP5063180B2 - 薄膜トランジスタ基板、それを含む液晶表示パネル、及びその液晶表示パネルの製造方法 - Google Patents
薄膜トランジスタ基板、それを含む液晶表示パネル、及びその液晶表示パネルの製造方法 Download PDFInfo
- Publication number
- JP5063180B2 JP5063180B2 JP2007126799A JP2007126799A JP5063180B2 JP 5063180 B2 JP5063180 B2 JP 5063180B2 JP 2007126799 A JP2007126799 A JP 2007126799A JP 2007126799 A JP2007126799 A JP 2007126799A JP 5063180 B2 JP5063180 B2 JP 5063180B2
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- JP
- Japan
- Prior art keywords
- liquid crystal
- film transistor
- electrode
- thin film
- storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000758 substrate Substances 0.000 title claims description 83
- 239000010409 thin film Substances 0.000 title claims description 73
- 239000004973 liquid crystal related substance Substances 0.000 title claims description 60
- 238000004519 manufacturing process Methods 0.000 title description 34
- 238000003860 storage Methods 0.000 claims description 69
- 239000003990 capacitor Substances 0.000 claims description 17
- 229910052751 metal Inorganic materials 0.000 claims description 17
- 239000002184 metal Substances 0.000 claims description 17
- 230000005684 electric field Effects 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 48
- 239000010408 film Substances 0.000 description 38
- 230000001681 protective effect Effects 0.000 description 27
- 238000000034 method Methods 0.000 description 25
- 230000008569 process Effects 0.000 description 16
- 229920002120 photoresistant polymer Polymers 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 7
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- 239000004065 semiconductor Substances 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 5
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- 239000004020 conductor Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 2
- 229910001182 Mo alloy Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- GHIQFHXMXDVBQS-UHFFFAOYSA-N [In].[Sn]=O.[In] Chemical compound [In].[Sn]=O.[In] GHIQFHXMXDVBQS-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
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- 238000010295 mobile communication Methods 0.000 description 1
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- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
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- 230000000149 penetrating effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133553—Reflecting elements
- G02F1/133555—Transflectors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136213—Storage capacitors associated with the pixel electrode
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136286—Wiring, e.g. gate line, drain line
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1288—Multistep manufacturing methods employing particular masking sequences or specially adapted masks, e.g. half-tone mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/13—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body combined with thin-film or thick-film passive components
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2006-0042595 | 2006-05-11 | ||
| KR1020060042595A KR20070109521A (ko) | 2006-05-11 | 2006-05-11 | 박막트랜지스터 기판, 그를 포함하는 액정 표시 패널, 및그 액정 표시 패널의 제조 방법 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007304599A JP2007304599A (ja) | 2007-11-22 |
| JP2007304599A5 JP2007304599A5 (xx) | 2010-06-24 |
| JP5063180B2 true JP5063180B2 (ja) | 2012-10-31 |
Family
ID=38684286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007126799A Expired - Fee Related JP5063180B2 (ja) | 2006-05-11 | 2007-05-11 | 薄膜トランジスタ基板、それを含む液晶表示パネル、及びその液晶表示パネルの製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8035108B2 (xx) |
| JP (1) | JP5063180B2 (xx) |
| KR (1) | KR20070109521A (xx) |
| CN (1) | CN101071243A (xx) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100846958B1 (ko) * | 2007-05-11 | 2008-07-17 | 삼성에스디아이 주식회사 | 액정 표시 장치 및 그 제조 방법 |
| US7956411B2 (en) * | 2008-01-15 | 2011-06-07 | Fairchild Semiconductor Corporation | High aspect ratio trench structures with void-free fill material |
| TWI381230B (zh) * | 2008-01-31 | 2013-01-01 | Hannstar Display Corp | 液晶顯示器之畫素結構 |
| BRPI0822402A2 (pt) * | 2008-04-22 | 2015-06-16 | Sharp Kk | Dispositivo de monitor de cristal líquido |
| KR101542840B1 (ko) * | 2008-09-09 | 2015-08-07 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 이의 제조 방법 |
| KR101609727B1 (ko) * | 2008-12-17 | 2016-04-07 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 이의 제조 방법 |
| KR101600887B1 (ko) * | 2009-07-06 | 2016-03-09 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 이의 제조 방법 |
| JP5477140B2 (ja) * | 2010-04-19 | 2014-04-23 | カシオ計算機株式会社 | 液晶表示装置 |
| US8976094B2 (en) | 2011-05-05 | 2015-03-10 | Apple Inc. | Display edge seal improvement |
| KR102072798B1 (ko) * | 2013-06-11 | 2020-02-04 | 삼성디스플레이 주식회사 | 보조 전극을 포함하는 유기 발광 소자 |
| CN105988251A (zh) * | 2015-03-05 | 2016-10-05 | 群创光电股份有限公司 | 显示面板及显示装置 |
| KR102576999B1 (ko) * | 2016-07-05 | 2023-09-12 | 삼성디스플레이 주식회사 | 액정표시장치 |
| KR101908383B1 (ko) | 2018-04-25 | 2018-12-11 | 삼성디스플레이 주식회사 | 유기발광표시장치 및 그 제조방법 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100339332B1 (ko) * | 1999-02-08 | 2002-06-03 | 구본준, 론 위라하디락사 | 멀티도메인 액정표시소자 |
| KR100587217B1 (ko) * | 2000-12-29 | 2006-06-08 | 엘지.필립스 엘시디 주식회사 | 횡전계 방식의 액정표시장치용 어레이기판 및 그제조방법 |
| JP3895952B2 (ja) * | 2001-08-06 | 2007-03-22 | 日本電気株式会社 | 半透過型液晶表示装置及びその製造方法 |
| KR100801153B1 (ko) * | 2001-12-31 | 2008-02-05 | 엘지.필립스 엘시디 주식회사 | 횡전계방식 액정표시장치용 어레이기판과 그 제조방법 |
| JP4196611B2 (ja) * | 2002-08-09 | 2008-12-17 | セイコーエプソン株式会社 | 電気光学装置及び電子機器 |
| KR100439649B1 (ko) | 2002-08-14 | 2004-07-12 | 엘지.필립스 엘시디 주식회사 | 반사투과형 액정표시장치 및 그의 제조방법 |
| TW563258B (en) * | 2002-10-01 | 2003-11-21 | Au Optronics Corp | Pixel structure and fabricating method thereof |
| KR101041088B1 (ko) * | 2003-06-10 | 2011-06-13 | 삼성전자주식회사 | 반사-투과형 어레이 기판과, 이의 제조 방법 및 이를 갖는액정 표시 장치 |
| JP4614726B2 (ja) | 2003-11-25 | 2011-01-19 | シャープ株式会社 | 液晶表示装置 |
| JP4873882B2 (ja) * | 2004-05-21 | 2012-02-08 | 三洋電機株式会社 | 液晶表示装置 |
| US7379135B2 (en) | 2004-05-28 | 2008-05-27 | Fujitsu Limited | Transflective liquid crystal display |
| KR100647774B1 (ko) * | 2004-11-04 | 2006-11-23 | 엘지.필립스 엘시디 주식회사 | 폴리 실리콘형 박막 트랜지스터 기판 및 제조 방법 |
-
2006
- 2006-05-11 KR KR1020060042595A patent/KR20070109521A/ko not_active Application Discontinuation
-
2007
- 2007-01-12 US US11/622,651 patent/US8035108B2/en not_active Expired - Fee Related
- 2007-04-16 CN CNA2007100966036A patent/CN101071243A/zh active Pending
- 2007-05-11 JP JP2007126799A patent/JP5063180B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101071243A (zh) | 2007-11-14 |
| US20070262315A1 (en) | 2007-11-15 |
| US8035108B2 (en) | 2011-10-11 |
| KR20070109521A (ko) | 2007-11-15 |
| JP2007304599A (ja) | 2007-11-22 |
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