JP5049904B2 - 可動構造体及びそれを用いた光走査ミラー - Google Patents

可動構造体及びそれを用いた光走査ミラー Download PDF

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Publication number
JP5049904B2
JP5049904B2 JP2008185893A JP2008185893A JP5049904B2 JP 5049904 B2 JP5049904 B2 JP 5049904B2 JP 2008185893 A JP2008185893 A JP 2008185893A JP 2008185893 A JP2008185893 A JP 2008185893A JP 5049904 B2 JP5049904 B2 JP 5049904B2
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JP
Japan
Prior art keywords
movable plate
hinge
stopper
stopper portion
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2008185893A
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English (en)
Japanese (ja)
Other versions
JP2010026147A5 (enrdf_load_stackoverflow
JP2010026147A (ja
Inventor
英喜 上田
宏 野毛
清彦 河野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=41732054&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP5049904(B2) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2008185893A priority Critical patent/JP5049904B2/ja
Priority to US13/001,197 priority patent/US20110188104A1/en
Priority to EP09770219.5A priority patent/EP2299584A4/en
Priority to DE09770219T priority patent/DE09770219T8/de
Priority to KR1020107029073A priority patent/KR101183915B1/ko
Priority to PCT/JP2009/061583 priority patent/WO2009157509A1/ja
Priority to SG2013024781A priority patent/SG189737A1/en
Priority to CN2009801237280A priority patent/CN102067433A/zh
Priority to SG2013024815A priority patent/SG189738A1/en
Publication of JP2010026147A publication Critical patent/JP2010026147A/ja
Publication of JP2010026147A5 publication Critical patent/JP2010026147A5/ja
Publication of JP5049904B2 publication Critical patent/JP5049904B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2008185893A 2008-06-25 2008-07-17 可動構造体及びそれを用いた光走査ミラー Expired - Fee Related JP5049904B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2008185893A JP5049904B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー
SG2013024781A SG189737A1 (en) 2008-06-25 2009-06-25 Moving structure and light scanning mirror using the same
SG2013024815A SG189738A1 (en) 2008-06-25 2009-06-25 Semiconductor mechanical structure
DE09770219T DE09770219T8 (de) 2008-06-25 2009-06-25 Bewegliche struktur und lichtabtastspiegel damit
KR1020107029073A KR101183915B1 (ko) 2008-06-25 2009-06-25 가동 구조체 및 이것을 사용한 광주사 미러
PCT/JP2009/061583 WO2009157509A1 (ja) 2008-06-25 2009-06-25 可動構造体及びそれを用いた光走査ミラー
US13/001,197 US20110188104A1 (en) 2008-06-25 2009-06-25 Moving structure and light scanning mirror using the same
CN2009801237280A CN102067433A (zh) 2008-06-25 2009-06-25 可动结构体及使用它的光扫描反射镜
EP09770219.5A EP2299584A4 (en) 2008-06-25 2009-06-25 MOVABLE STRUCTURE AND LIGHTING MIRRORS WITH IT

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008185893A JP5049904B2 (ja) 2008-07-17 2008-07-17 可動構造体及びそれを用いた光走査ミラー

Publications (3)

Publication Number Publication Date
JP2010026147A JP2010026147A (ja) 2010-02-04
JP2010026147A5 JP2010026147A5 (enrdf_load_stackoverflow) 2012-05-10
JP5049904B2 true JP5049904B2 (ja) 2012-10-17

Family

ID=41732054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2008185893A Expired - Fee Related JP5049904B2 (ja) 2008-06-25 2008-07-17 可動構造体及びそれを用いた光走査ミラー

Country Status (1)

Country Link
JP (1) JP5049904B2 (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6180155B2 (ja) * 2013-04-01 2017-08-16 富士電機株式会社 アクチュエータ
KR102018784B1 (ko) * 2013-08-13 2019-09-05 (주)위드멤스 미세 전극 회로 검사용 핀 제조 방법 및 이의 방법으로 제조된 미세 전극 회로 검사용 핀
JP6515638B2 (ja) * 2015-03-31 2019-05-22 セイコーエプソン株式会社 光スキャナー、画像表示装置およびヘッドマウントディスプレイ
JP6460406B2 (ja) * 2015-06-09 2019-01-30 第一精工株式会社 可動反射素子及び二次元走査装置
US9920874B2 (en) 2015-07-30 2018-03-20 Nec Corporation Linkage rod including limited-displacement flexible mechanism
US10161561B2 (en) 2015-07-30 2018-12-25 Nec Corporation Linkage rod including limited-displacement flexible mechanism
CN112551474B (zh) * 2020-12-09 2022-05-24 北京航天控制仪器研究所 一种具有面内止挡的mems可动结构
EP4310574A4 (en) * 2021-03-17 2024-09-11 Koito Manufacturing Co., Ltd. Light reflecting device, sensor device, and lighting device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000097709A (ja) * 1998-09-21 2000-04-07 Murata Mfg Co Ltd 角速度センサ
JP3666370B2 (ja) * 2000-07-06 2005-06-29 株式会社村田製作所 外力検知センサ
JP2004177357A (ja) * 2002-11-29 2004-06-24 Hitachi Metals Ltd 半導体加速度センサ
US20090153935A1 (en) * 2004-04-22 2009-06-18 Osamu Kajino Actuator
JP2006340531A (ja) * 2005-06-03 2006-12-14 Matsushita Electric Works Ltd アクチュエータ
JP2007052256A (ja) * 2005-08-18 2007-03-01 Fujifilm Corp 回転変位型光変調素子及びこれを用いた光学装置
JP2007152497A (ja) * 2005-12-05 2007-06-21 Canon Inc 揺動体装置

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JP2010026147A (ja) 2010-02-04

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