JP2010026147A5 - - Google Patents
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- Publication number
- JP2010026147A5 JP2010026147A5 JP2008185893A JP2008185893A JP2010026147A5 JP 2010026147 A5 JP2010026147 A5 JP 2010026147A5 JP 2008185893 A JP2008185893 A JP 2008185893A JP 2008185893 A JP2008185893 A JP 2008185893A JP 2010026147 A5 JP2010026147 A5 JP 2010026147A5
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- hinge
- stopper
- movable
- movable structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008185893A JP5049904B2 (ja) | 2008-07-17 | 2008-07-17 | 可動構造体及びそれを用いた光走査ミラー |
SG2013024781A SG189737A1 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using the same |
SG2013024815A SG189738A1 (en) | 2008-06-25 | 2009-06-25 | Semiconductor mechanical structure |
DE09770219T DE09770219T8 (de) | 2008-06-25 | 2009-06-25 | Bewegliche struktur und lichtabtastspiegel damit |
KR1020107029073A KR101183915B1 (ko) | 2008-06-25 | 2009-06-25 | 가동 구조체 및 이것을 사용한 광주사 미러 |
PCT/JP2009/061583 WO2009157509A1 (ja) | 2008-06-25 | 2009-06-25 | 可動構造体及びそれを用いた光走査ミラー |
US13/001,197 US20110188104A1 (en) | 2008-06-25 | 2009-06-25 | Moving structure and light scanning mirror using the same |
CN2009801237280A CN102067433A (zh) | 2008-06-25 | 2009-06-25 | 可动结构体及使用它的光扫描反射镜 |
EP09770219.5A EP2299584A4 (en) | 2008-06-25 | 2009-06-25 | MOVABLE STRUCTURE AND LIGHTING MIRRORS WITH IT |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008185893A JP5049904B2 (ja) | 2008-07-17 | 2008-07-17 | 可動構造体及びそれを用いた光走査ミラー |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2010026147A JP2010026147A (ja) | 2010-02-04 |
JP2010026147A5 true JP2010026147A5 (enrdf_load_stackoverflow) | 2012-05-10 |
JP5049904B2 JP5049904B2 (ja) | 2012-10-17 |
Family
ID=41732054
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008185893A Expired - Fee Related JP5049904B2 (ja) | 2008-06-25 | 2008-07-17 | 可動構造体及びそれを用いた光走査ミラー |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5049904B2 (enrdf_load_stackoverflow) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6180155B2 (ja) * | 2013-04-01 | 2017-08-16 | 富士電機株式会社 | アクチュエータ |
KR102018784B1 (ko) * | 2013-08-13 | 2019-09-05 | (주)위드멤스 | 미세 전극 회로 검사용 핀 제조 방법 및 이의 방법으로 제조된 미세 전극 회로 검사용 핀 |
JP6515638B2 (ja) * | 2015-03-31 | 2019-05-22 | セイコーエプソン株式会社 | 光スキャナー、画像表示装置およびヘッドマウントディスプレイ |
JP6460406B2 (ja) * | 2015-06-09 | 2019-01-30 | 第一精工株式会社 | 可動反射素子及び二次元走査装置 |
US9920874B2 (en) | 2015-07-30 | 2018-03-20 | Nec Corporation | Linkage rod including limited-displacement flexible mechanism |
US10161561B2 (en) | 2015-07-30 | 2018-12-25 | Nec Corporation | Linkage rod including limited-displacement flexible mechanism |
CN112551474B (zh) * | 2020-12-09 | 2022-05-24 | 北京航天控制仪器研究所 | 一种具有面内止挡的mems可动结构 |
EP4310574A4 (en) * | 2021-03-17 | 2024-09-11 | Koito Manufacturing Co., Ltd. | Light reflecting device, sensor device, and lighting device |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000097709A (ja) * | 1998-09-21 | 2000-04-07 | Murata Mfg Co Ltd | 角速度センサ |
JP3666370B2 (ja) * | 2000-07-06 | 2005-06-29 | 株式会社村田製作所 | 外力検知センサ |
JP2004177357A (ja) * | 2002-11-29 | 2004-06-24 | Hitachi Metals Ltd | 半導体加速度センサ |
US20090153935A1 (en) * | 2004-04-22 | 2009-06-18 | Osamu Kajino | Actuator |
JP2006340531A (ja) * | 2005-06-03 | 2006-12-14 | Matsushita Electric Works Ltd | アクチュエータ |
JP2007052256A (ja) * | 2005-08-18 | 2007-03-01 | Fujifilm Corp | 回転変位型光変調素子及びこれを用いた光学装置 |
JP2007152497A (ja) * | 2005-12-05 | 2007-06-21 | Canon Inc | 揺動体装置 |
-
2008
- 2008-07-17 JP JP2008185893A patent/JP5049904B2/ja not_active Expired - Fee Related
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